Integrated tool with interchangeable wet processing components for processing microfeature workpieces

13-05-2008 дата публикации

Номер:

US7371306B2

Автор: Jeffry Alan Davis, Randy A. Harris

Принадлежит: Semitool Inc

Контакты:

Номер заявки:

Дата заявки:

CPC - классификация

B B0 B01 B01D B01D6 B01D61 B01D61/B01D61/4 B01D61/42 B01D61/425 C C2 C25 C25D C25D1 C25D17 C25D17/C25D17/0 C25D17/00 H H0 H01 H01L H01L2 H01L21 H01L21/H01L21/6 H01L21/67 H01L21/670 H01L21/6700 H01L21/67005 H01L21/671 H01L21/6719 H01L21/672 H01L21/6723 H01L21/677 H01L21/6774 H01L21/67742 H01L21/68 H01L21/687 H01L21/6870 H01L21/68707

IPC - классификация

C C2 C25 C25D C25D1 C25D17 C25D17/C25D17/0 C25D17/06 H H0 H01 H01L H01L2 H01L21 H01L21/H01L21/6 H01L21/67 H01L21/677 H01L21/6774 H01L21/67742 H01L21/68 H01L21/687 H01L21/6870 H01L21/68707

Получить PDF