CORRECTION LENS SYSTEM FOR A PARTICLE BEAM PROJECTION DEVICE
03-11-2005 дата публикации
Номер:
WO2005104169A1
Принадлежит: Vistec Electron Beam Gmbh
Контакты:
Номер заявки: EP07-05-200581
Дата заявки: 24-02-2005
Disclosed is a correction lens system for a particle beam projection device, comprising at least one first and second magnetic lens (20a, 20b). Several pairs of correction lenses (23, 24, 25) are arranged between the first and second magnetic lens (20a, 20b) and particle beam (1).[1][2][3][4][5][6][7][8][9][10][11][12]
