09-01-2020 дата публикации
Номер: US20200010973A1
Принадлежит:
LG CHEM, LTD.
The present disclosure relates to a silicon-based fusion composition used for a solution growth method for forming a silicon carbide single crystal, and represented by the following Formula 1, including silicon, a first metal (M1), scandium (Sc) and aluminum (Al): 1. A silicon fusion composition for a solution growth method for forming a silicon carbide single crystal , comprising:silicon, a first metal (M1), scandium (Sc) and aluminum (Al), [{'br': None, 'sub': a', 'b', 'c', 'd, 'SiM1ScAl\u2003\u2003(Formula 1)'}, 'wherein a is more than 0.4 and less than 0.8, b is more than 0.2 and less than 0.6, c is more than 0.01 and less than 0.1, and d is more than 0.01 and less than 0.1., 'as represented by the following Formula 12. The silicon fusion composition of claim 1 , wherein:the first metal (M1) is one or more selected from the group consisting of titanium (Ti), chromium (Cr), vanadium (V), yttrium (Y), manganese (Mn), iron (Fe), cobalt (Co), boron (B), cerium (Ce), lanthanum (La) and praseodymium (Pr).3. The silicon fusion composition of claim 1 , wherein:in Formula 1, a is more than 0.5 and less than 0.7, b is more than 0.2 and less than 0.4, and d is more than 0.01 and less than 0.05.4. The silicon fusion composition of claim 1 , wherein:the silicon fusion composition has a carbon solubility of 5% or more.5. A silicon fused solution claim 1 , comprising: the silicon fusion composition of and carbon claim 1 , wherein the scandium increases a carbon solubility in the silicon fused solution.6. A manufacturing method of a silicon carbide single crystal comprising:preparing a silicon carbide seed crystal; {'br': None, 'sub': a', 'b', 'c', 'd, 'SiM1ScAl\u2003\u2003(Formula 1)'}, 'preparing a silicon fusion composition comprising: silicon (Si), a first metal (M1), scandium (Sc) and aluminum (Al), as represented by the following Formula 1;'}wherein a is more than 0.4 and less than 0.8, b is more than 0.2 and less than 0.6 m c us nire than 0.01 and less than 0.1, and d is ...
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