Capacitive balance leveling device

Capacitive balance leveling device

CAPACITANCE-TYPE LIQUID SENSOR

METHOD FOR MANUFACTURING A STRAIN GAUGE DEVICE, A STRAIN GAUGE DEVICE, AND THE USE OF THE DEVICE

Capacitive sensor

A capacitive sensor includes a retaining member, an intermediate member retained by the retaining member such that the intermediate member can rotate around a first axis, a movable member retained by the intermediate member such that the movable member can rotate around a second axis which is perpendicular to the first axis, a weight provided on the movable member, a movable electrode unit consisting of one or more electrodes which is provided on the movable member, and a board on which a fixed electrode unit consisting of one or more electrodes is provided such that the fixed electrode unit faces the movable electrode unit. At least one of the movable electrode unit and the fixed electrode unit includes a plurality of electrodes, and capacitances between the one or more electrodes of the movable electrode unit and the one or more electrodes of the fixed electrode unit are detected.

Compensated capacitive liquid level sensor

A fringing-field capacitive liquid level sensor comprising an electrically insulating substrate, having a first and a second pattern of conductive capacitance plates plated on the substrate. Each pattern constitutes a fringing-field capacitor having a capacitance the value of which is both dependent on the liquid level and dependent on the dielectric constant of the liquid. The ratio of the two capacitances, however, is proportional to the liquid level and independent of the dielectric constant of the liquid. The fringing-field capacitive liquid level sensor may be used for measurement of liquids of substantially any dielectric constant without requiring full-scale calibration or knowledge of, and calibration for, dielectric constant of the liquid to be measured. Compensation for tilt angle can be provided through the addition of a second level sensor.

MEMS INCLINOMETER HAVING A REDUCED VIBRATION RECTIFICATION ERROR

HESSONDE FOR DIFFERENT LIQUIDS AND BENT FLUID LEVELS

Liquid level detector

A liquid level detector for use in a pump control system comprises a chamber (20) for liquid, a liquid inlet (6) to the chamber (20), a liquid outlet (7) from the chamber and connectable to a pump, and a capacitive sensor comprising mutually spaced capacitive sensor elements (21, 22; 22, 23) forming a capacitance which is sensitive to permittivity within a region of the chamber proximate the capacitive sensor. The chamber is defined at least partially by a barrier member 25 and the capacitive sensor elements are provided on the barrier member outside the chamber.

DEVICE COMPRISING AN AMPOULE CONTAINING A BUBBLE AND CAPACITIVE MEANS FOR DETECTING THE POSITION OF THE BUBBLE IN THE BULB

Capacitive inclination and acceleration sensor

A capacitive position sensor employs conventional printed circuit board (PCB) technology to detect capacitive changes caused by the movement of a ball along conductive tracks. A recessed region (or through hole) is stamped on the PCB with well controlled dimensions. Electrically conductive tracks are laid around the region and connect to a capacitance detection circuit on the PCB. As the PCB experiences inclination or acceleration the ball moves along the axis of the recessed region causing variations in the measured capacitance.

Electrostatic capacitance tilt angle sensor

An electrostatic capacitance tilt angle sensor having a size that is reduced without lowering detection capacity. The sensor is provided with a case including a first wall and a second wall facing each other. A common electrode is arranged on the first wall and a differential electrode is arranged on the second wall. A liquid electrostatic capacitance medium is accommodated in the case and contacts the common electrode and the differential electrode. The electrostatic capacitance medium includes an insulative liquid base and fine particles mixed in the base. The fine particles have a dielectric constant that is higher than that of the base.

Inclination meter, especially for geotechnical applications

The inclination meter measures inclination in two mutually perpendicular axes. It contains a measurement cell with two inclination components consisting of two electrodes for x-axis measurement, two electrodes for y-axis measurement and a central electrode. The electrodes are partly enclosed by a liquid of high dielectric constant and partly by a gas or other liquid with a high dielectric constant. The measurement cell capacitance is measured at programmed time intervals to indicate inclination. The average of several measurements is calculated after temperature compensation, digitized, stored and transmitted or read out as required. Power can be supplied by a battery or with cables.

Neigungsmesser und Verwendung eines Halbleitersensors als Neigungsmesser

Ein Neigungsmesser hat einen Halbleitersensor (2) mit einer kapazitiv empfindlichen Oberfläche (3). Im Bereich der Oberfläche (3) ist ein Behältnis (5) zur Aufnahme einer Meßflüssigkeit (6) ausgeformt. Oberflächenbereiche der Oberfläche (3) werden selektiv danach abgetastet, wo die Oberfläche (3) mit der Meßflüssigkeit (6) bedeckt ist. Eine Auswertungseinrichtung (13) bestimmt daraus die Lage und Orientierung der Oberfläche (8) der Meßflüssigkeit (6) bezüglich der Oberfläche (3) des Halbleitersensors (1), die ein Maß für die Neigung des Neigungsmessers ist.

Capacitance balance bubble levelling device

The present invention relates (with reference to Figure 2A) to a levelling system comprising a bubble chamber (e.g. 29) enclosing a fluid (42) and defining a bubble (43) therein; an upper capacitor plate (e.g. 32) contacting at least a portion of said fluid (42); a first capacitor plate (e.g.34) contacting said fluid (42) and disposed in a substantially parallel relationship with said upper capacitor plate (32) a second capacitor plate (e.g. 36) contacting said fluid (42) and disposed in a substantially parallel relationship with said upper capacitor plate (32) coaxial with said first capacitor plate (34); a third capacitor plate (e.g. 38) contacting said fluid (42) and disposed in a substantially parallel relationship with said upper capacitor plate (32); a fourth capacitor plate (e.g. 40) contacting said fluid (42) and disposed in a substantially parallel relationship with said upper capacitor plate (32) coaxial with said third capacitor plate (38); wherein movement of said bubble (43 ...

Horizontal inclination detector

The inclination detector has a closed vessel (14) containing an electrolytic soln. (A), in which a bubble (B) is formed. The vessel is provided as a cylinder (13), with top and bottom plates (11,12), the inside face of the top plate having a pair of spaced electrodes (21,22) and the inside face of the bottom plate having a single electrode (23) over its full surface. The outer edge of each electrode projects beyond the cylinder and is coupled to a detector circuit (41), determining the horizontal inclination from the detected resistance variation.

Liquid level and angle detector

Liquid level detector

A liquid level detector for use in a pump control system comprises a chamber 20 for liquid, a liquid inlet 6 to the chamber 20, a liquid outlet 7 from the chamber and connectable to a pump, and a capacitive sensor comprising mutually spaced capacitive sensor elements (first capacitive sensor 21, 22; second capacitive sensor 22, 23) forming a capacitance which is sensitive to permittivity within a region of the chamber proximate the capacitive sensor. The chamber is defined at least partially by a barrier member 25 and the capacitive sensor elements are provided on the barrier member outside the chamber. The capacitive sensor elements may each form a ring around the chamber. An electronic controller may be provided configured to generate a pump control signal by comparison of the output signal from the first and second capacitive sensors in order to control the pump in response to the liquid level independently of the orientation / inclination of the chamber. The capacitive sensor may form ...

Electronic Circuit for Acousto-Optoelectronic Angle Indication and Level Gauge Thereof

The present invention discloses an electronic circuit for acousto-optoelectronic angle indication and a level gauge thereof. The electronic circuit for acousto-optoelectronic angle indication comprises a main control circuit (a), a power circuit (b), a key circuit (c), a sensor module circuit (d), an LED indicator module circuit (e), a buzzer module circuit (f) and a data storage module (g). The control circuit (a) comprises a microcontroller (U), a capacitor (C), a capacitor (C), a capacitor (C), a capacitor (C), a capacitor (C), a capacitor (C), an electrolytic capacitor (E), a resistor (R), a resistor (R) and a resistor (R). The invention realizes an acousto-optoelectronically indicated design circuit device with high precision, so that the current angular value state can be accurately displayed through acoustic and photoelectric changes by simply placing a measuring device on a test plane. 1. An electronic circuit for acousto-optoelectronic angle indication , comprising: a main control circuit (a) , a power circuit (b) , a key circuit (c) , a sensor module circuit (d) , an LED indicator module circuit (e) , a buzzer module circuit (f) and a data storage module (g);{'b': 2', '2', '3', '4', '5', '6', '8', '1', '11', '12', '20', '2', '2', '2', '2', '3', '6', '12', '2', '3', '6', '12', '11', '8', '2', '11', '8', '2', '20', '1', '5', '5', '1', '20', '4', '2, 'wherein the control circuit (a) comprises a microcontroller (U), a capacitor (C), a capacitor (C), a capacitor (C), a capacitor (C), a capacitor (C), a capacitor (C), an electrolytic capacitor (E), a resistor (R), a resistor (R) and a resistor (R), one end of the capacitor (C) is connected with the 6th pin of the microcontroller (U), and the other end of the capacitor (C) is grounded; the 5th pin of the microcontroller (U) is connected with a +2.4V power supply, and connected with one end of the capacitor (C), one end of the capacitor (C), one end of the resistor (R) and the 9th pin of the microcontroller (U) in ...

Device for generating electrical signal corresponding to change in position or posture

[Problem] To provide a compact device for generating an electrical signal corresponding to a change in position or posture, which can be used in such as posture control of a ship, a motor vehicle, aircraft, or the like, and detection of action or posture of various parts of a human body. [Means for Resolution] A device for generating an electrical signal corresponding to a change in posture includes: a container which is formed of an electrical insulating material and is fixed to an electrode holder formed of an electrical insulating material and in which a fluid dielectric is sealed with a volume ratio sufficient to have an angle of inclination with respect to a free surface of the fluid dielectric; a plurality of pairs of peripheral electrodes disposed at positions which are symmetrical about a central point of a cross section of the container at a predetermined interval with an inner peripheral surface of the container; and a pair of counter electrodes which are electrically insulated from each other and are respectively disposed at an upper surface of the electrode holder which serves as a bottom of the container and at a lower surface of a ceiling of the container at the central point of the cross section of the container, a voltage being applied to the pair of counter electrodes.

Sensor unit for determining position of object with hollow body

The detecting unit is a capacitor unit (15-22, fig 33). The detecting unit is a light barrier unit, which detects the degree of light permeability of the liquid medium (2). The light barrier unit has a LED (9) and a photo cell tuned to the spectrum of the LED (9, fig 2). The float element (3) is light permeable and the liquid medium (2) is coloured black or with reduced light. The LED (9) can transmit visible light, IR beams or laser beams. Beam guide elements are arranged in or parallel to the radiation axis (4) of the light barrier unit.

ELECTRONIC APPLIANCE INDICATING INCLINATION

The invention concerns an appliance indicating the inclination of a device along two spatial directions (3, 4), said appliance being designed to be associated with the device (22), and comprising a housing (1) wherein are arranged: a first instantaneous inclination sensor for measuring a first inclination value (8), a second instantaneous inclination sensor for measuring a second inclination value (9), an electronic processing unit. The invention is characterized in that said electronic processing unit is designed to store set point values (6, 7), and to compare them respectively with the measured inclination values (8, 9), and to compute calculated inclination values (10, 11) which correspond to values of the difference between the measured inclination values (8, 9) and the set point values (6, 7), said inclination sensors comprising semiconductor electronic accelerometer type sensors. The invention applicable to an inclination indicator.

INDICATING ELECTRONIC DEVICE Of SLOPE

Capacitive sensor

A capacitive sensor includes a fixed board provided with a fixed electrode unit consisting of one or more electrodes, a movable member provided with a movable electrode unit consisting of one or more electrodes which faces the fixed electrode unit with a gap therebetween, the movable member being rotatable with respect to the fixed board, a weight provided on the movable member, and a retaining element which is disposed between the fixed plate and the weight and retains the movable member in a rotatable manner. At least one of the movable electrode unit and the fixed electrode unit includes a plurality of electrodes.

Capacitive inclination sensor has pair of differential electrodes arranged in vertical direction relatively to fluid surface level

Changes in an electrostatic capacitance related to a fluid surface level corresponds to an inclination angle in a dielectric fluid in the airtight container. A pair of differential electrodes (21a,21b) is arranged in vertical direction relatively to the fluid surface level.

Liquid level detector

Electronic appliance indicating inclination

DEVICE COMPRISING a BULB CONTAINING a BUBBLE AND CAPACITIVE MEANS OF DETECTION OF the POSITION OF the BUBBLE IN the BULB

L'invention concerne un dispositif comportant une carte de circuit imprimé (2) ainsi qu'une ampoule oblongue (12) renfermant un liquide et une bulle (13), ce circuit imprimé comportant une première plage métallique (8) et une seconde plage métallique (9) situées au niveau de deux régions distinctes de l'ampoule oblongue (12) le long de cette ampoule, et des moyens électroniques (3) reliés aux deux plages métalliques (8, 9) et à un élément métallique (14) de référence du dispositif pour déterminer d'une part la capacité électrique entre la première plage métallique (8) et l'élément métallique de référence (14), et d'autre part la capacité électrique entre la seconde plage métallique (9) et l'élément métallique de référence (14). L'invention concerne notamment un niveau à laser pourvu de moyens pour qu'il se configure automatiquement à l'horizontale.

Capacitance-type liquid sensor

A capacitance type liquid sensor is disclosed which detects a tilt angle and acceleration of an object using the fact that a liquid surface always keeps itself horizontal. Openings ( 13, 14 ) are formed in two sides of a hollow cylindrical closed container ( 6 ) made of an electrically insulating material, and the container has two parallel sides ( 2, 3 ). Plate-shaped main electrodes ( 4, 5 ) on at least one face of each of which silicon oxide film is formed are made to be in contact with the sides so as to close the openings, with the silicon oxide film being placed so as to face the inside of the container. A sealing agent ( 28 ) is interposed in a gap between the plate-shaped main electrodes and the sides. The container is filled with electrically conductive liquid ( 27 ) of an amount equal to substantially one-half of the inside volume of the container. An auxiliary electrode ( 8 ) brought into electrical contact with the conductive liquid is mounted in the container.

Neigungssensor

Ein Neigungssensor umfaßt eine Bahn aus einem Spritzguß-Polymerkunststoff, ein entlang der Bahn bewegliches Element, wobei eine Stellung des beweglichen Elements entlang der Bahn von einer Neigung der Bahn bezüglich einer Bezugsstellung abhängt, und eine Erfassungseinrichtung zum Erfassen der Stellung des beweglichen Elements entlang der Bahn und/oder einer zeitlichen Änderung der Stellung des beweglichen Elements entlang der Bahn. Dieser Aufbau des Neigungssensors eignet sich für eine preisgünstige Herstellung und Flexibilität des Einsatzes.

Circuits for the detection of movement of a medium

CAPACITYIVE SENSOR FOR MEASURING OF INCLINATION

This invention relates to a capacity sensor for measuring of inclination wherein such an inside electrode plate that it has guard-ring electrode in the circumference and also forms each couple of semicircular type inside electrode symmetrically in the front and rear of printing circuit plate is fixed to the center of metal ring for supporting an electrode, and an outside electrode having a guarding electrode in the circumference is placed against the inside electrode as such and also it is separated and fixed by designated distance for the inside electrode plate both sides of metal ring for supporting an electrode thereafter, the sensor structure is comprised by pouring liquid transmission display between inside electrode plate and outside electrode plate, and inside electrode and outside electrode is separated into a couple because liquid transmission display caused by inclination of the sensor is flown, whereby it can be measured an inclination on a basis of the change of electricity ...

ELECTRONIC APPLIANCE INDICATING INCLINATION

The invention concerns an appliance indicating the inclination of a device along two spatial directions (3, 4), said appliance being designed to be associated with the device (22), and comprising a housing (1) wherein are arranged: a first instantaneous inclination sensor for measuring a first inclination value (8), a second instantaneous inclination sensor for measuring a second inclination value (9), an electronic processing unit. The invention is characterized in that said electronic processing unit is designed to store set point values (6, 7), and to compare them respectively with the measured inclination values (8, 9), and to compute calculated inclination values (10, 11) which correspond to values of the difference between the measured inclination values (8, 9) and the set point values (6, 7), said inclination sensors comprising semiconductor electronic accelerometer type sensors. The invention applicable to an inclination indicator.

Liquid level state detection apparatus and fuel cell system

A liquid level state detection apparatus 10 includes a float portion 20 which is guided by a guide rod 45 erected in a liquid storage tank 1 for storing a liquid 2, and which enables the float to move in a vertical direction, and a pair of electrode portions 30 which are fixed integrally to the float portion 20, and which are disposed opposite each other in the vertical direction. A space defined between the upper electrode plate 31 and the lower electrode plate 32 is opened outwards via a plurality of window portions 36, so that the liquid 2 stored in the liquid storage tank 1 and air inside the liquid storage tank 1 are allowed to enter and exit from the space freely. A stopper 46 is provided at a lower portion of the guide rod 45. If the amount of liquid is greater than a predetermined amount then liquid 2 fills the space between the electrode plates, fig. 2. If the level is lower than stopper 46, the space between the electrode plates is exposed to air. If the tank is inclined the space ...

Liquid level detector

A compensated capacitive liquid level sensor

INDICATING ELECTRONIC DEVICE Of SLOPE

- Appareil électronique indicateur d'inclinaison.- Appareil indicateur de l'inclinaison d'un dispositif selon deux directions de l'espace, ledit appareil étant destiné à associé au dispositif, et comprenant un boîtier au sein duquel sont agencés :- un premier capteur d'inclinaison instantanée pour mesurer une première valeur d'inclinaison,- un deuxième capteur d'inclinaison instantanée pour mesurer une deuxième valeur d'inclinaison,- une unité de traitement électronique,caractérisé en ce que ladite unité de traitement électronique est agencée de manière à stocker des valeurs de consigne, et à les comparer respectivement aux valeurs d'inclinaison mesurées, et à calculer des valeurs d'inclinaison calculées qui correspondent aux valeurs de l'écart entre les valeurs d'inclinaison mesurées et les valeurs de consigne, lesdits capteurs d'inclinaison comprenant des capteurs électroniques semi-conducteurs du type accéléromètre.- Indicateur d'inclinaison. - Electronic tilt indicator device - Indicator device of the tilt of a device in two spatial directions, said device being intended to be associated with the device, and comprising a housing within which are arranged: - a first sensor of instantaneous inclination to measure a first inclination value, - a second instantaneous inclination sensor for measuring a second inclination value, - an electronic processing unit, characterized in that said electronic processing unit is arranged in such a way in storing setpoint values, and in comparing them respectively with the measured inclination values, and in calculating calculated inclination values which correspond to the values of the difference between the measured inclination values and the setpoint values, said inclination sensors comprising electronic semiconductor sensors of the accelerometer type - Inclination indicator.

Precision Inclinometer with Parallel Dipole Line Trap System

Inclinometers with a parallel dipole line (PDL) trap system are provided. In one aspect, an inclinometer includes: a PDL trap having a pair of dipole line magnets, a transparent tube in between the dipole line magnets, and a diamagnetic object within the transparent tube, wherein the diamagnetic object is levitating in between the dipole line magnets; and a sensing system for determining a position z of the diamagnetic object in the PDL trap and for determining an inclination angle θ using the position z of the diamagnetic object in the PDL trap. Techniques to detect the diamagnetic object position using optical, capacitive and manual methods are described. A method for determining an inclination angle θ using the present inclinometers is also provided. 1. An inclinometer , comprising:a parallel dipole line (PDL) trap having a pair of dipole line magnets, a transparent tube in between the dipole line magnets, and a diamagnetic object within the transparent tube, wherein the diamagnetic object is levitating in between the dipole line magnets; anda sensing system for determining a position z of the diamagnetic object in the PDL trap and for determining an inclination angle θ using the position z of the diamagnetic object in the PDL trap.2. The inclinometer of claim 1 , wherein the sensing system is an optical sensing system comprising a digital video camera positioned facing the PDL trap and the diamagnetic object for capturing video images of the position z of the diamagnetic object in the PDL trap.3. The inclinometer of claim 2 , wherein the optical sensing system further comprises a microcomputer for i) analyzing the video images and ii) determining the inclination angle θ.4. The inclinometer of claim 1 , wherein the sensing system is a capacitance sensing system comprising electrodes attached to at least two opposite ends of the transparent tube claim 1 , and a capacitance measurement system for measuring a change in capacitance as the diamagnetic object passes ...

Method and apparatus for hysteresis reduction in displacement of sensors

A method and apparatus are provided for improving the performance of displacement sensors, including inclinometers, accelerometers and linear position transducers, by reducing hysteresis.

Liquid level and inclination detection apparatus and fuel cell system comprising the apparatus

Liquid level state detection device and fuel cell system

本发明提供一种能够进行罐内的液面高度的计测及罐的倾斜的检测的液面状态检测装置及具备该液面状态检测装置的燃料电池系统。液面状态检测装置(10)具备：浮子部(20)，其能够由在贮藏液体(2)的液体贮存罐(1)内立起设置的引导杆(45)引导而在上下方向上移动；以及一对电极部(30)，它们一体固定于浮子部(20)，且在上下方向上对置配置，其中，基于因存在于一对电极部(30)之间的绝缘物的介电常数而变化的一对电极部(30)之间的静电电容，来检测液体贮存罐(1)内的液面高度及液体贮存罐(1)的倾斜。

Inclination sensor

An electronic inclination sensor is provided for the determination and display of surface inclination and the direction of such inclination. The information regarding the inclination and direction of inclination can be displayed such that an end user can readily and easily comprehend and use the information without additional interpretation. Further, when the inclination is displayed in decimal values, a large range of inclination angles can be displayed with significant accuracy.

Method and apparatus for measuring wear of inner surfaces of tubes

A detection sensor includes a detector unit which is provided on an insulating board at a first side of the board, a circuit component which is provided on the board at a second side of the board and which processes a signal detected by the detector unit, and a wiring unit which penetrates through the board in the thickness direction of the board and connects the detector unit and the circuit component.

Neigungswinkelsensor

Ferrofluid inclinometer

An inclinometer device containing a magnet surrounded at each pole by a thin, discrete band of ferrofluid; these bands are retained against the magnet by its own magnetic field, and suffice to suspend the magnet within a nonmagnetic housing that may be open or closed to the atmosphere. In a first embodiment, a Hall element senses the axial position of the magnet, and a pair of inductor coils, positioned on opposite sides of the neutral point and configured to generate opposing magnetic fields, counteract the magnet's movement and restore it to the neutral position upon application of an appropriate electric current. The magnitude and direction of this restorative current indicate the extent and orientation of the tilt. In a second embodiment, the axial position of the magnet is sensed by a pair of split capacitors disposed on the housing and spaced apart from one another. A coil centered between the capacitors restores the magnet to its neutral position, and once again the magnitude and ...

DEVICE FOR GENERATING ELECTRICAL SIGNAL CORRESPONDING TO LOCATION/ATTITUDE CHANGE

PROBLEM TO BE SOLVED: To provide a compact device capable of being used for the attitude control of ships, cars, aircraft, etc., the detection of the movement/attitude of each human body region etc. and generating electrical signals corresponding to location/attitude changes. SOLUTION: The device for generating electrical signals corresponding to location/attitude changes comprises a container made of an electrical insulation material which is fixed to an electrode holding body made of an electrical insulation material and in which a liquid dielectric is sealed at a volume ratio sufficient for having its free surface and an angle of inclination; a plurality of groups of outer circumferential electrodes arranged at locations symmetrical to the center point of a cross section of the container at prescribed intervals from the inner circumferential surface of the container; and counter electrodes which are electrically insulated from each other and arranged at the center point of the cross ...

Liquid level state detection apparatus and fuel cell system

Capacitive sensor for measuring of inclination

Liquid level detector

A liquid level detector for use in a pump control system comprises a chamber (20) for liquid, a liquid inlet (6) to the chamber (20), a liquid outlet (7) from the chamber and connectable to a pump, and a capacitive sensor comprising mutually spaced capacitive sensor elements (21, 22; 22, 23) forming a capacitance which is sensitive to permittivity within a region of the chamber proximate the capacitive sensor. The chamber is defined at least partially by a barrier member 25 and the capacitive sensor elements are provided on the barrier member outside the chamber.

Electrostatic capacitance sensor

本发明涉及适用于2轴周围电容检测的静电电容式传感器，其目的在于获得大的电容变化。其结构具有：支承部(3a)，中间部(3b)，它由支承部(3a)进行支承，能在第1轴系中摆动；活动部(3d)，它由中间部(3d)进行支承，能在与上述第1轴相垂直的第2轴系中进行摆动；平衡锤(4)，它设置在上述活动部(3d)上；活动电极，它形成在上述活动部(3d)上；以及基板(1)，其上形成了与上述活动电极相对置的固定电极(1a)，上述活动电极和上述固定电极(1a)中的至少一种设置了多个，用于检测上述活动电极和上述固定电极(1a)之间的静电电容。

Liquid level and angle detector

A feedback circuit 10 generates an output signal from a sensor 14 that is independent of the electrical and temperature characteristics of the sensor and any sensing medium. As shown the sensor has a differential input (formed by a pair of plates 24,26) and a single output (formed by a plate 28), but an arrangement using a sensor having a single input and a pair of differential outputs is described (Fig.2). The sensor output is connected to an amplifier 18, the output of which is fed back to the sensor inputs via resistors 22; the circuit is driven by a signal generator 12. The sensor is thus in the forward loop of the circuit to make the output depend on the area of the parallel plates 24,26,28 of the sensor and not on any electrical or temperature characteristics of the sensor or sensing medium. The sensor may have liquid between the parallel plates and may be used as a liquid level sensor or an inclinometer. Alternative sensors such as inductive sensors may also be used.

ELECTRONIC APPLIANCE INDICATING INCLINATION

Detector

Method and device for diagnosing trouble with sensor function

A sensor for converting a physical quantity into an electric signal and issuing the output is driven by a drive circuit which is driven by a drive signal issued from a 1-chip microcomputer. The 1-chip microcomputer judges fault of sensor function when the sensor output signal is out of a specified output range. Further, when stopping the operation of the drive circuit, if the sensor output signal does not coincide with a specific value, the 1-chip microcomputer also judges fault of sensor function. According to the invention, in the event of a trouble of sensor function allowing the sensor output signal to settle within an output range, such trouble can be detected.

SYSTEM FOR OUTPUTTING DEGREE OF INCLINATION OF ELECTRONIC DEVICE

A system includes a frequency signal generator, a capacitor sensor, a frequency-voltage converter, and a degree of inclination displaying device. The capacitor sensor can be attached to an electronic device and includes a variable capacitor having a capacitance which varies in dependence upon a degree of inclination of the electronic device. The frequency signal generator outputs a frequency signal to the frequency-voltage converter. The capacitor sensor outputs a capacitor signal to the frequency-voltage converter. The frequency-voltage converter outputs a voltage signal to the degree of inclination displaying device according to the frequency signal and the capacitor signal. The degree of inclination displaying device obtains the degree of inclination of the electronic device according to the voltage signal and displays the degree of inclination. 1. A system for outputting a degree of inclination of an electronic device , the system comprising:a frequency signal generator;a capacitor sensor attached to an electronic device, the capacitor sensor comprising a variable capacitor having a capacitance which varies in dependence upon the degree of inclination of the electronic device;a frequency-voltage converter coupled to the frequency signal generator and the capacitor sensor; anda degree of inclination displaying device coupled to the frequency-voltage converter;wherein the frequency signal generator is configured to output a frequency signal to the frequency-voltage converter, the capacitor sensor is configured to output a capacitor signal to the frequency-voltage converter, the frequency-voltage converter is configured to output a voltage signal to the degree of inclination displaying device according to the frequency signal and the capacitor signal, and the degree of inclination displaying device is configured to obtain the degree of inclination of the electronic device according to the voltage signal and display the degree of inclination.2. The system of claim 1 ...

Precision inclinometer with parallel dipole line trap system

Inclinometers with a parallel dipole line (PDL) trap system are provided. In one aspect, an inclinometer includes: a PDL trap having a pair of dipole line magnets, a transparent tube in between the dipole line magnets, and a diamagnetic object within the transparent tube, wherein the diamagnetic object is levitating in between the dipole line magnets; and a sensing system for determining a position z of the diamagnetic object in the PDL trap and for determining an inclination angle θ using the position z of the diamagnetic object in the PDL trap. Techniques to detect the diamagnetic object position using optical, capacitive and manual methods are described. A method for determining an inclination angle θ using the present inclinometers is also provided.

Electrostatic capacitance sensor

CAPACITANCE TYPE INCLINATION SENSOR

PURPOSE: A capacitance type inclination sensor is provided to accurately measure tilt of a structure by preventing changes of capacitance between inner electrodes and outer electrodes, while allowing the tilt measurement range to be selected. CONSTITUTION: A capacitance type inclination sensor comprises a cylindrical electrode supporting metal ring(3); an inner electrode disk(1) fixed at the center of the electrode supporting metal ring, in such a manner that the inner electrode disk is perpendicular to the lengthwise direction of the electrode supporting metal ring, wherein the inner electrode disk has semi-circular inner electrodes(11a,11b,16a,16b) arranged at both sides of the inner electrode disk; outer electrode disks(2,4) fixed to both sides of the electrode supporting metal ring, in such a manner that the outer electrode disks area spaced apart from the inner electrode disk, wherein outer electrode disks have outer electrodes(24,41), respectively; a liquid dielectric material filling ...

INTEGRATED TILT SENSOR

A tilt sensor having a printed circuit board disposed in a direction normal to a reference plane for measuring a tilt angle with a pair of electrodes formed on a first surface of the printed circuit board. A cover is affixed to the printed circuit board and creates a cavity between the cover and the printed circuit board with a predetermined gap between the cover and the pair of electrodes, the cover acting as a common electrode to the pair of electrodes to create a pair of capacitors. An inert liquid is contained in the cavity, the surface level of the inert fluid varying according to the tilt angle of the reference plane. A signal processing circuit is formed on a second surface of the printed circuit board that produces an output signal corresponding to a difference in capacitance between the two capacitors as a tilt angle detection output.

CAPACITIVE SENSOR FOR MEASURING A MEASURABLE VARIABLE

Disclosed is a sensor for measuring a measurable variable. Said sensor comprises a first couple of electrodes (103) and a second couple of electrodes (105). The electrodes (103a, 103b, 105a, 105b) of the first couple of electrodes (103) and the second couple of electrodes (105) are alternately electrically disconnected from each other and interconnected in a conductive manner. A capacity measuring device (111, 113) can then determine a first and a second measured differential capacity value such that a processing device (117) can determine a measured value with the aid of the first measured differential capacity value and the second measured differential capacity value.

Method and apparatus for hysteresis reduction in displacement sensors

A method and apparatus are provided for improving the performance of displacement sensors, including absolute displacement sensors, such as inclinometers and accelerometers, and relative displacement sensors such as linear relative position transducers, by reducing or eliminating hysteresis. During use, independent, controlled and limited displacement is induced between the sensing unit and housing or base of such sensors.

VERFAHREN UND VORRICHTUNG ZUM DIAGNOSTIZIEREN VON SENSORFUNKTIONSPROBLEMEN

Method for manufacturing a strain gauge device, a strain gauge device, and the use of the device

Tilt sensor

A tilt angle sensor is disclosed that is capable of detecting whether a tilt angle of a reference plane exceeds a predetermined value by means of only one threshold value. Although only one threshold value is used, the tilt angle can be measured with respect to either a clockwise or a counterclockwise direction from the untilted state. A pair of differential electrodes electrically independent of each other are formed in a shape symmetric with respect to upper and lower sections of a printed circuit board. A common electrode plate is mounted opposed to the pair of differential electrodes with a predetermined gap therebetween. The pair of differential electrodes and the common electrode is stored in a closed space formed by the printed circuit board and an oil case. A dielectric liquid is filled into the closed space in such a way that the level of the liquid varies according to the tilt of the reference plane. An output signal corresponding to the difference in capacity between two capacitors ...

Hessonde für verschiedene Flüssigkeiten und geneigte Flüssigkeitsspiegel

Mems sensor

METHOD AND DEVICE FOR DIAGNOSING TROUBLE WITH SENSOR FUNCTION

A drive for diagnosing a trouble with sensor function, wherein a sensor converting a physical amount to an electric signal and outputting the signal is driven by a drive circuit controlled by a drive signal output from a one-chip microcomputer, the one-chip microcomputer judges the sensor function to be defective if the output signal from the sensor comes out of a specified output range and also judges the sensor function to be defective if the output signal from the sensor does not become a constant value when the operation of the drive circuit is stopped, whereby, even if such a trouble with the sensor function that the output signal from the sensor comes within the output range occurs, the trouble can be detected.

Capacitative sensor to measure values, e.g. for vehicle tilts and automatic machines, has two electrode pairs with a moving component between them with measurement of difference capacities at part-capacitors formed by the electrode array

The capacitative sensor (100), for the measurement of given values, has two pairs of electrodes (103,105) with their electrodes (103a,103b,105a,105b). There is a gap between the electrode pairs and the array has the electrode of one pair overlapping both electrodes of the other pair. A moving component (106) takes up a position between the electrode pairs according to the measurement value. A capacity meter (111,113) measures the difference capacities at part-capacitors formed by the electrodes. The difference capacities are used by a processing unit (117) to give the measured value.

A COMPENSATED CAPACITIVE LIQUID LEVEL SENSOR

A fringing-field capacitive level sensor comprising an electrically insulating substrate, having a first and a second pattern of conductive capacitance plates plated on the substrate. Each pattern constitutes a fringing-field capacitor having a capacitance the value of which is both dependent on the liquid level and dependent on the dielectric constant of the liquid. The ratio of the two capacitances, however, is proportional to the liquid level and independent of the dielectric constant of the liquid. The fringing-field capacitive liquid level sensor may be used for measurement of liquids of substantially any dielectric constant without requiring full-scale calibration or knowledge of, and calibration for, dielectric constant of the liquid to be measured. A fringing-field inclinometer sensor application is also provided. The inclinometer uses the liquid level sensor in a circular configuration with four quadrant plates providing the angle sensing of liquid in the sensor liquid container ...

Capacitive based gravity sensor

An improved inclination sensor in which electrically conductive elements are fabricated onto one or both surfaces of a flat plate. The plate comprising discrete, isolated sector sections having a distinct electrically conductive regions is oriented in a substantially vertical plane. The plate has an axis which lies in a horizontal plane and which is substantially perpendicular to the plate so that the plate may tilt about the axis. The plate is encased within a sealed chamber occupied by a fluid having electrical properties. In one embodiment a dielectric fluid occupies a first portion of a chamber and has a dielectric constant greater than that of a gas which occupies a second portion of the sealed chamber. The fluid flows in response to a change in the tilt of the sealed chamber and the plate. In a second embodiment a capacitive fluid changes the capacitance between the distinct electrically conductive regions of each section of the plate. By determining the capacitance between the electrically ...

Analog floating-gate inclinometer

An analog floating-gate (AFG) inclinometer where a plurality of AFG sensors are provided to detect the presence of a discharge caused by settling of a conductive liquid droplet contained in a sealed microchannel under gravity. A plurality of sensor port electrodes associated with the AFG sensors are placed along the length of a curved sealed microchannel of the inclinometer at specific positions calibrated to corresponding angular inclinations. Discharge detected at a specific AFG sensor port during measurement due to the movement of the conductive liquid droplet under gravity is used in determining a surface inclination being measured.

Capacitive sensor

A capacitive sensor includes a fixed board provided with a fixed electrode unit consisting of one or more electrodes, a movable member provided with a movable electrode unit consisting of one or more electrodes which faces the fixed electrode unit with a gap therebetween, the movable member being rotatable with respect to the fixed board, a weight provided on the movable member, and a retaining element which is disposed between the fixed plate and the weight and retains the movable member in a rotatable manner. At least one of the movable electrode unit and the fixed electrode unit includes a plurality of electrodes.

METHOD AND DEVICE OF DIAGNOSIS OF FAILURES OF OPERATION OF A SENSOR

Un sensor para convertir una cantidad física en una senal eléctrica de salida y enviarla, es excitado por un circuito de excitacion que es excitado por una senal de excitacion emitida por un microordenador de 1 chip. El microordenador de 1 chip considera avería de funcionamiento del sensor cuando la senal de salida del sensor está fuera de una banda de salida especificada. Además, cuando se para el funcionamiento del circuito de excitacion, si la senal de salida del sensor no coincide con un valor específico, el microordenador de 1 chip también considera avería del funcionamiento del sensor. Segun la presente, en caso de un problema de funcionamiento del sensor en el que la senal de salida del sensor se estabilice dentro de una banda de salida, dicho problema puede ser detectado.

MEMS sensor

The present invention relates to A MEMS sensor with movable and fixed components for measuring linear acceleration. The MEMS sensor includes at least two mutually independent differential sensor elements disposed inside a common frame structure providing walls for hermetic sealing of the MEMS sensor. The mutually independent differential sensor elements are pairwise configured to perform double differential detection of linear acceleration. The MEMS sensor includes a common anchoring area to which the at least two differential sensor elements are anchored. The common anchoring area is located at the centroid of the pairwise configured differential sensor elements. A self-test capability of the MEMS sensor is also provided.

Integrated tilt sensor

Inclination-angle sensor (clinometer)

First and second fixed electrodes are provided fastened in a housing which is fastened on a surface whose inclination angle ( theta ) is intended to be detected. A rotatable electrode is fitted between these fixed electrodes, and this rotatable electrode is fastened on a shaft which is provided rotatably in the housing. The rotatable electrode is produced so as to be uniformly aligned in a constant direction relative to the gravitational direction. The first fixed electrode has a central angle of, for example, 180 DEG and is slit into a first, fixed slit-electrode element having a central angle of 60 DEG and a second, fixed slit-electrode element having a central angle of 120 DEG . Wires are connected to the respective, fixed slit-electrode elements, as a result of which two series-connected capacitors, which are formed by a respective one of the first and second fixed slit-electrode elements and the rotatable electrode, are fed out. The second fixed electrode is structured in similar fashion ...

DEVICE FOR GENERATING ELECTRICAL SIGNAL CORRESPONDING TO CHANGE IN POSITION OR POSTURE

A device for generating an electrical signal corresponding to a change in posture comprising, a container which is formed of an electrical insulating material and is fixed to an electrode holder formed of an electrical insulating material and in which a fluid dielectric is sealed; a plurality of pairs of peripheral electrodes disposed at positions which are symmetrical about a central point of a cross section of the container at a predetermined interval with an inner peripheral surface of the container; and a pair of counter electrodes which are electrically insulated from each other and are respectively disposed at an upper surface of the electrode holder which serves as a bottom of the container and at a lower surface of a ceiling of the container at the central point of the cross section of the container; a voltage being applied to the pair of container electrodes.

MICROWAVE ANTENNA CONTROL SYSTEM

The invention discloses a microwave antenna control system used for automatically adjusting boresight alignment of a microwave antenna. The microwave antenna control system comprises a first driving device, a second driving device, an inclination angle sensor and a control unit, wherein the first driving device, the second driving device and the inclination angle sensor are connected with the microwave antenna and are also connected with the control unit, The inclination angle sensor monitors angular alignment information of the microwave antenna, and the control unit controls the first driving device and/or the second driving device to accurately and automatically adjust the boresight alignment of the microwave antenna according to the angle information.

Integrated tilt sensor

A tilt sensor having a printed circuit board disposed in a direction normal to a reference plane for measuring a tilt angle with a pair of electrodes formed on a first surface of the printed circuit board. A cover is affixed to the printed circuit board and creates a cavity between the cover and the printed circuit board with a predetermined gap between the cover and the pair of electrodes, the cover acting as a common electrode to the pair of electrodes to create a pair of capacitors. An inert liquid is contained in the cavity, the surface level of the inert fluid varying according to the tilt angle of the reference plane. A signal processing circuit is formed on a second surface of the printed circuit board that produces an output signal corresponding to a difference in capacitance between the two capacitors as a tilt angle detection output.

Capacitive sensor

A capacitive sensor includes a retaining member, an intermediate member retained by the retaining member such that the intermediate member can rotate around a first axis, a movable member retained by the intermediate member such that the movable member can rotate around a second axis which is perpendicular to the first axis, a weight provided on the movable member, a movable electrode unit consisting of one or more electrodes which is provided on the movable member, and a board on which a fixed electrode unit consisting of one or more electrodes is provided such that the fixed electrode unit faces the movable electrode unit. At least one of the movable electrode unit and the fixed electrode unit includes a plurality of electrodes, and capacitances between the one or more electrodes of the movable electrode unit and the one or more electrodes of the fixed electrode unit are detected.

TILT SENSOR

The invention relates to a tilt sensor comprising a path (20) made of an injection molded polymer plastic, an element (10) movable along said path, wherein a position of the movable element (10) along said path (20) is dependent upon a tilt of the path relative to a reference position. The tilt sensor also comprises a detection device (50) for detecting the position of the movable element (10) along the path (20) and/or a temporary change of the position of the movable element (10) along said path (20). This tilt sensor structure can be produced economically and provides flexibility in the use thereof.

Capacitive sensor

A capacitive sensor includes a retaining member, an intermediate member retained by the retaining member such that the intermediate member can rotate around a first axis, a movable member retained by the intermediate member such that the movable member can rotate around a second axis which is perpendicular to the first axis, a weight provided on the movable member, a movable electrode unit consisting of one or more electrodes which is provided on the movable member, and a board on which a fixed electrode unit consisting of one or more electrodes is provided such that the fixed electrode unit faces the movable electrode unit. At least one of the movable electrode unit and the fixed electrode unit includes a plurality of electrodes, and capacitances between the one or more electrodes of the movable electrode unit and the one or more electrodes of the fixed electrode unit are detected.

Method and device for diagnosing trouble with sensor function

A sensor for converting a physical quantity into an electric signal and issuing the output is driven by a drive circuit which is driven by a drive signal issued from a 1-chip microcomputer. The 1-chip microcomputer judges fault of sensor function when the sensor output signal is out of a specified output range. Further, when stopping the operation of the drive circuit, if the sensor output signal does not coincide with a specific value, the 1-chip microcomputer also judges fault of sensor function. According to the invention, in the event of a trouble of sensor function allowing the sensor output signal to settle within an output range, such trouble can be detected.

Method and apparatus for measuring wear of inner surfaces of tubes

A capacitive sensor includes a retaining member, an intermediate member retained by the retaining member such that the intermediate member can rotate around a first axis, a movable member retained by the intermediate member such that the movable member can rotate around a second axis which is perpendicular to the first axis, a weight provided on the movable member, a movable electrode unit consisting of one or more electrodes which is provided on the movable member, and a board on which a fixed electrode unit consisting of one or more electrodes is provided such that the fixed electrode unit faces the movable electrode unit. At least one of the movable electrode unit and the fixed electrode unit includes a plurality of electrodes, and capacitances between the one or more electrodes of the movable electrode unit and the one or more electrodes of the fixed electrode unit are detected.

Tilting detector

This invention is to provide a tilting detector which, by a critical value and having nothing to do with counterclockwise or clockwise direction can detect out whether, from a non-tilting status, tilting angle is over a certain value. On a printed substrate 21, an area separated by a surface that is parallel to a basis surface and by a cross line L2 of the printed substrate installs a pair of differential electrodes 22a, 22b that are electrically independent in the cross line L2 as a symmetric axis so as to form a linear symmetric shape and installs in a cross line L1 that is perpendicular to the basis surface and that is cross line L1. There are installed with a pair of relative common electrode plates 23 in a predetermined gap for the differential electrodes. The pairs of the differential electrodes and the common electrode plates are accommodated in a sealing chamber formed between the printed substrate. In the sealing chamber, the fluid surface changes based on tilting of the basis ...

CAPACITIVE INCLINATION DEVICE COMPRISING A PENDULUM

The invention relates to an inclination device comprising a base (20) provided with a suspension element (24), a pendulum device (10) which is suspended on the suspension element (24) so that the pendulum device can be displaced dependent on the inclination in relation to the base. At least one flat pendulum capacitor electrode (12, 13) is provided for detecting the capacity on the pendulum device and the base comprises at least one flat base capacitor electrode (22). The capacitor electrodes are arranged in relation to each other in such a manner that they are laterally opposite each other so that a lateral overlapping area is formed between the two capacitor electrodes, said area varying according to a deflection of the pendulum in relation to the base according to inclination. On the basis of laterally opposite base capacitor electrode and the pendulum capacitor electrode, an inclination sensor having a larger detection capacity per volume unit can be produced.

ELECTROSTATIC CAPACITOR-TYPE INCLINATION SENSOR

To provide an electrostatic capacitor-type sensor that does not require regulation such as zero-point adjustment and temperature compensation, etc. A pair of semi-circular differential electrodes are positioned next to each other in the vertical direction with a common electrode arranged so as to face the differential electrodes, with a fixed gap therebetween. The pair of differential electrodes and the common electrode are housed within an airtight container, and a dielectric fluid is sealed within the airtight container. The differential electrode on an upper side and the common electrode form an upper variable capacitor, and the differential electrode on the lower side and the common electrode form a lower variable capacitor.

Capacitive gravity sensor and inclinometer

Disclosed is an improved inclination sensor and an improved inclinometer. A pair of plates in combination with a metallic housing provides accurate inclination information over ranges of 0 DEG +/-60 DEG and 180 DEG +/-60 DEG . A second pair of plates rotated 90 DEG in the plane of the first pair of plates, provides accurate inclination information over ranges of 90 DEG +/-60 DEG to 270 DEG +/-60 DEG . Coverage is thereby provided over 360 DEG . The inclination sensor is combined with a microprocessor which is programmed to weight the contribution of the plates so as to provide a smooth transition for angles in the region of coverage overlap. A EEPROM memory stores and provides calibration input information to correct the inclination sensor output to accurate output angles.

Motion sensors

A motion sensor device comprises a conductive cap fixed to one layer of a printed circuit board to define a volume half of which is filled with a dielectric liquid. A conductive layer on the opposite side of the printed circuit board forms with the cap a capacitor, the capacitance of which is dependent upon the location of the liquid within the cap. A motion signal is generated in response to a change of capacitance from that presented in any static orientation of the device, so long as the capacitance change exceeds a threshold and occurs within a predetermined interval.

FLUCTUATING FLUID LEVEL AND INCLINATION DETECTING PROBE DEVICE

PURPOSE: To enhance the accuracy of detecting a capacity indicated by the fluid level by providing a one-piece base with completely separated capacitors. CONSTITUTION: The fluid sensor comprises a one-piece base 10 having a pair of capacitor elements 8, 11 bonded to opposite surfaces 12 and forming a printed circuit. The base 10 is coupled integrally with a connector part 13 to install a mount part 14 and an order-designed IC 15. The capacitor elements 8, 11 are disposed along a measuring axis showing the increment of fluid level within the horizontal plane of an inductive fluid, are electrically isolated from each other, and individually affected by the inductive fluid at that level, and have an electric capacity form which the detected difference with respect to an intermediate threshold related to the presence or absence of the fluid can be read. Further, the capacitor elements 8, 11 are each split into two columns 8a, 11a, 8b, 11b so that when a fluid container is inclined the action ...

ELECTRONIC APPLIANCE INDICATING INCLINATION

The invention concerns an appliance indicating the inclination of a device along two spatial directions (3, 4), said appliance being designed to be associated with the device (22), and comprising a housing (1) wherein are arranged: a first instantaneous inclination sensor for measuring a first inclination value (8), a second instantaneous inclination sensor for measuring a second inclination value (9), an electronic processing unit. The invention is characterized in that said electronic processing unit is designed to store set point values (6, 7), and to compare them respectively with the measured inclination values (8, 9), and to compute calculated inclination values (10, 11) which correspond to values of the difference between the measured inclination values (8, 9) and the set point values (6, 7), said inclination sensors comprising semiconductor electronic accelerometer type sensors. The invention applicable to an inclination indicator.

INTEGRATED TILT SENSOR

A tilt sensor having a printed circuit board disposed in a direction normal to a reference plane for measuring a tilt angle with a pair of electrodes formed on a first surface of the printed circuit board. A cover is affixed to the printed circuit board and creates a cavity between the cover and the printed circuit board with a predetermined gap between the cover and the pair of electrodes, the cover acting as a common electrode to the pair of electrodes to create a pair of capacitors. An inert liquid is contained in the cavity, the surface level of the inert fluid varying according to the tilt angle of the reference plane. A signal processing circuit is formed on a second surface of the printed circuit board that produces an output signal corresponding to a difference in capacitance between the two capacitors as a tilt angle detection output.

传感器功能的故障诊断方法和装置

将物理量转换成电信号进行输出的传感器，由根据单片机输出的驱动信号由所控制的驱动电路进行驱动。当传感器的输出信号变成规定输出范围外的时候，单片机判断传感器功能出故障。并且，在单片机停止上述驱动电路的工作时，而传感器的输出信号不为一定值时，也判断为传感器功能出故障。采用本发明，即使发生传感器的输出信号落在输出范围也能检测出传感器功能故障。

ELECTRONIC APPLIANCE INDICATING INCLINATION

The invention concerns an appliance indicating the inclination of a device along two spatial directions (3, 4), said appliance being designed to be associated with the device (22), and comprising a housing (1) wherein are arranged: a first instantaneous inclination sensor for measuring a first inclination value (8), a second instantaneous inclination sensor for measuring a second inclination value (9), an electronic processing unit. The invention is characterized in that said electronic processing unit is designed to store set point values (6, 7), and to compare them respectively with the measured inclination values (8, 9), and to compute calculated inclination values (10, 11) which correspond to values of the difference between the measured inclination values (8, 9) and the set point values (6, 7), said inclination sensors comprising semiconductor electronic accelerometer type sensors. The invention applicable to an inclination indicator.

CAPACITANCE-TYPE LIQUID SENSOR

A capacitance type liquid sensor for detecting an inclination angle and acceleration of an object using the fact that a liquid surface always keeps it horizontal. Openings (13, 14) are provided in two side faces of a hollow cylinder-shaped sealed container (6) made of an electric insulating material, and the container has two parallel side faces (2,3). Plate-shaped main electrodes (4, 5) on at least one face of each of which silicon oxide film is formed are made to be in contact with the side faces so as to close the openings, with the silicon oxide film being placed so as to face the inside of the container. A sealing agent (28) is provided in the gap between the plate-shaped main electrodes and the side faces. Electrically conductive liquid (27) of an amount equal to substantially one-half of the inside volume of the container is filled and sealed in the container. An auxiliary electrode (8) that is in electrically contact with the electrically conductive liquid is provided in the container ...

Motion sensors

A motion sensor device comprises a conductive cap (8) fixed to one layer of a printed circuit board (4) to define a volume half of which is filled with a dielectric liquid (16). A conductive layer on the opposite side of the printed circuit board forms with the cap a capacitor, the capacitance of which is dependent upon the location of the liquid within the cap. A motion signal is generated in response to a change of capacitance from that presented in any static orientation of the device, so long as the capacitance change exceeds a threshold and occurs within a predetermined interval.

MEMS Tilt Sensor

An acoustic sensor includes a back plate; at least one back plate electrode coupled to the back plate; a proof of mass with the proof of mass elastically coupled to the back plate; and a proof of mass electrode coupled to the proof of mass. Movement of the sensor causes a capacitance between the proof of mass electrode and the at least one back plate electrode to vary and the capacitance represents a magnitude of the movement of the sensor.

METHOD AND DEVICE FOR MEASURING DIP ANGLE OF OPPOSITELY CROSSLY PLACED PAIRED QUARTERED RING-QUARTERED CIRCLE NESTED POLAR PLATES

A method for measuring a dip angle of oppositely crossly placed paired quartered ring-quartered circle nested polar plates. An annular coplanar capacitance measuring head of a sensor unit consists of four quarter round metal plates and four quarter circular-ring-shaped metal plates, the eight metal plates are coplanar and concentric with one another, and a quarter round metal plate and a quarter circular-ring-shaped metal plate corresponding to the same sector angle form a capacitor. Two annular coplanar capacitance measuring heads are arranged on two round insulating substrates, the two round insulating substrates are used as two bottom surfaces of a cylindrical container, the cylindrical container is transversely arranged, and an insulating liquid equal to ½ volume of the cylindrical container is injected into the cylindrical container in a sealing manner. Potential leads extract potentials of the sixteen metal plates and are connected to an input end of a capacitance measuring unit, and the capacitance measuring unit is connected to a dip measuring unit. When the cylindrical container tilts, the relative positions of the two annular coplanar capacitance measuring heads and the insulating liquid are changed, and a dip angle value can be calculated by measuring the change of a capacitance value. Also disclosed is a device for measuring a dip angle of oppositely crossly placed paired quartered ring-quartered circle nested polar plates. 1. A method for measuring dip angle by way of oppositely crossly placed paired quartered ring-quartered circle nested polar plates , wherein the method comprises the following steps:(1) One round metal plate and one outer circular-ring-shaped metal plate are placed coplanar and concentric with one another, and the round metal plate and the outer circular-ring-shaped metal plate are quartered in the radial direction respectively to obtain four quarter round metal plates and four quarter circular-ring-shaped metal plates, and a quarter ...

ANALOG FLOATING-GATE INCLINOMETER

An analog floating-gate (AFG) inclinometer where a plurality of AFG sensors are provided to detect the presence of a discharge caused by settling of a conductive liquid droplet contained in a sealed microchannel under gravity. A plurality of sensor port electrodes associated with the AFG sensors are placed along the length of a curved sealed microchannel of the inclinometer at specific positions calibrated to corresponding angular inclinations. Discharge detected at a specific AFG sensor port during measurement due to the movement of the conductive liquid droplet under gravity is used in determining a surface inclination being measured. 1. An inclinometer , comprising:a semiconductor substrate;a dielectric layer over the semiconductor substrate, the dielectric layer defining a sealed arcuate microchannel containing a conductive liquid droplet;access port electrodes in the sealed arcuate microchannel, each of the access port electrodes associated with a reference electrode within a proximity of the respective access port electrode and disposed along a curvature of the sealed arcuate microchannel, the access port electrodes spaced from one another with an arc length that is calibrated to an angular inclination resolution; andanalog floating-gate (AFG) devices in the semiconductor substrate, each corresponding to one or access port electrodes, wherein each of the AFG devices comprises a first conductor electrically coupled to the corresponding access port electrode and a second conductor electrically coupled to the reference electrode associated with the corresponding access port electrode.2. The inclinometer as recited in claim 1 , further comprising a control circuit coupled to each of the AFG devices claim 1 , the control circuit configured to (i) detect a discharge current in at least one of the AFG devices along a conductive path between the corresponding access port electrode and the associated reference electrode interposed by the conductive liquid droplet claim ...

Precision Inclinometer with Parallel Dipole Line Trap System

Inclinometers with a parallel dipole line (PDL) trap system are provided. In one aspect, an inclinometer includes: a PDL trap having a pair of dipole line magnets, a transparent tube in between the dipole line magnets, and a diamagnetic object within the transparent tube, wherein the diamagnetic object is levitating in between the dipole line magnets; and a sensing system for determining a position z of the diamagnetic object in the PDL trap and for determining an inclination angle θ using the position z of the diamagnetic object in the PDL trap. Techniques to detect the diamagnetic object position using optical, capacitive and manual methods are described. A method for determining an inclination angle θ using the present inclinometers is also provided.

Inclination derivation device and method

An inclination derivation device of a pointer of a pen shape, is discussed with the pointer including a first electrode installed at an end of an axis and a second electrode installed around the axis. The inclination derivation device includes a sensor of a plane shape that detects a position of the first electrode and a position of the second electrode, and a control portion. The control portion includes a look-up table (LUT) in which a corresponding relation of a value based on a difference between the position of the first electrode and the position of the second electrode, and a compensation value that becomes a base of an inclination of the axis of the pointer is registered; an input value calculation portion that calculates and inputs the value based on the difference to the LUT; and an inclination derivation portion that derives the inclination from the compensation value output from the LUT.

Liquid level detector

A liquid level detector for use in a pump control system comprises a chamber 20 for liquid, a liquid inlet 6 to the chamber 20, a liquid outlet 7 from the chamber and connectable to a pump, and a capacitive sensor comprising mutually spaced capacitive sensor elements (21, 22; 22, 23) forming a capacitance which is sensitive to permittivity within a region of the chamber proximate the capacitive sensor. The chamber is defined at least partially by a barrier member 25 and the capacitive sensor elements are provided on the barrier member outside the chamber.

Position indicator, position indicating device, and detection method of tilt of position indicator

A position indicator includes a housing and a first electrode and a second electrode disposed on a side of one end of the housing and a signal generating circuit which, in operation, generates a signal supplied to at least the first electrode. A capacitive interaction between the first electrode and a sensor of a position detecting device formed through supply of the signal to the first electrode. The second electrode surrounds the first electrode and the first electrode is partially exposed from the second electrode in an axial direction of the housing. The position indicator includes a signal transmission control circuit that is coupled to the second electrode and that, in operation, controls the second electrode to change the capacitive interaction between the first electrode and the sensor formed through supply of the signal from the signal generating circuit to the first electrode.

Low cost position sensor and mobility device using the same

A low cost position sensor and a mobility device using the same are provided. The low cost position sensor comprises a rollable object, a container and a control circuit. The rollable object comprises a specific material. The container has a non-planar inner bottom portion. At least one sensor for detecting coordinates is disposed inside the container. The rollable object is disposed in the container. The sensor can detect the specific material. The control circuit is coupled to the sensor. The sensor detects the specific material to determine a coordinate position of the rollable object, and sends the coordinate position of the rollable object back to the control circuit. The control circuit determines a tilt angle of the container according to the coordinate position of the rollable object.

MEMS SENSOR

The present invention relates to A MEMS sensor with movable and fixed components for measuring linear acceleration. The MEMS sensor includes at least two mutually independent differential sensor elements disposed inside a common frame structure providing walls for hermetic sealing of the MEMS sensor. The mutually independent differential sensor elements are pairwise configured to perform double differential detection of linear acceleration. The MEMS sensor includes a common anchoring area to which the at least two differential sensor elements are anchored. The common anchoring area is located at the centroid of the pairwise configured differential sensor elements. A self-test capability of the MEMS sensor is also provided. 1. A MEMS sensor with movable and fixed components for measuring linear acceleration , said sensor comprising:at least two mutually independent differential sensor elements disposed inside a common frame structure, the frame structure providing walls for hermetic sealing of the MEMS sensor, wherein the at least two mutually independent differential sensor elements are pairwise configured to perform double differential detection of the linear acceleration; anda common anchoring area to which rotor masses and stator structures of the pairwise configured differential sensor elements are anchored, the common anchoring area being located at the centroid of the pairwise configured differential sensor elements.2. A MEMS sensor according to claim 1 , wherein each differential sensor element of the at least two pairwise configured mutually independent differential sensor elements includes:a movable rotor mass suspended with a spring to an anchor structure within the common anchoring area,the spring allowing the rotor mass to move within a plane of the device; andtwo immovable stator structures rigidly anchored to one or more anchor structures within the common anchoring area,wherein two sensing electrode pairs each formed by a defined number of rotor ...

Inclination angle sensor for measuing angle displacement

본 발명은 정전용량을 이용한 각도 변위 검출 센서의 구조에 기술적 특징이 있는 각도 변위 측정을 위한 경사각 센서에 관한 것이다. 이러한 본 발명의 기술적 특징을 구현하기 위해 본 발명은 고정전극의 역할을 하는 상부하우징; 상기 상부하우징 내에 수용되어 중력 변화에 의해 유동하는 유전체; 상기 유전체의 유동에 의해 정전용량이 변하는 다수의 구동전극; 및 상기 상부하우징과 구동전극에 체결되는 하부하우징; 을 포함하는 것을 특징으로 한다. 상기 특징으로 인하여 분해도와 선형성이 우수한 경사각 센서를 제공하는 효과가 있다. 또한 상기 유전체를 기존의 벤젠계열이 아닌 메틸 알콜계열로 대체하여 안전성이 높은 제작환경을 제공하는 효과가 있다. The present invention relates to an inclination angle sensor for angular displacement measurement having technical features in the structure of the angular displacement detection sensor using capacitance. In order to implement the technical features of the present invention, the present invention comprises: an upper housing serving as a fixed electrode; A dielectric contained in the upper housing and flowing by gravity change; A plurality of driving electrodes whose capacitance changes due to the flow of the dielectric; A lower housing coupled to the upper housing and a driving electrode; And a control unit. Due to the above characteristics, there is an effect of providing an inclination angle sensor having excellent resolution and linearity. In addition, there is an effect of providing a safe manufacturing environment by replacing the dielectric with a methyl alcohol series rather than the existing benzene series.

Paired trisection ring-third cyclotomy nesting pole plate is staggeredly placed formula inclination angle measurement method and device in opposite directions

成对三等分环-三等分圆嵌套极板相向交错放置式倾角测量方法与装置属于角度测量技术，其中传感器单元的环形共面电容测头由三个三分之一圆形金属板和三个三分之一圆环形金属板组成，六块金属板共面同心，同一扇形角所对的三分之一圆形金属板和三分之一圆环形金属板形成电容，将两个上述环形共面电容测头安置于两个圆形绝缘基板上，两个圆形绝缘基板作为圆柱体容器的两底面，并将圆柱体容器横置，容器中密封注入体积1/2的绝缘性液体，电位引线将十二块金属板的电位取出并与电容测量单元的输入端相连，电容测量单元与倾角计算单元连接；容器发生倾斜时，两个环形共面电容测头与绝缘性液体的相对位置发生变化，通过测量电容容值的变化，可求得倾角值。

A kind of high-precision pendulum condenser type inclination measurement system and method for being used to monitor

本发明公开了一种用于监测的高精度摆锤电容式测斜系统和方法，该系统包括有第一、第二固定极板、动极板、固定点和电源模块；动极板可以以固定点作为枢轴点往复摆动；该测斜系统竖直放置时，所述动极板平行设置于第一、第二固定极板的中间位置且垂直于水平面；所述电源模块分别在动极板与第一、第二固定极板之间施加相同的电压。本发明通过三个电容极板相对间距随倾角的改变得到倾斜角度的具体值，系统结构简单，测量精度高；同时还可通过对动极板的软线吊装减少动极板摆动的阻力对测量精度的影响，将极板浸入绝缘液体减少震动误差、增加测量的灵敏度。本发明作为一种用于监测的高精度摆锤电容式测斜系统和方法可广泛应用于工程检测领域。

Paired trisectional annular-trisectional circular nested pole plate staggered arrangement type inclination angle measuring method and apparatus thereof

成对三等分环-三等分圆嵌套极板相向交错放置式倾角测量方法与装置属于角度测量技术，其中传感器单元的环形共面电容测头由三个三分之一圆形金属板和三个三分之一圆环形金属板组成，六块金属板共面同心，同一扇形角所对的三分之一圆形金属板和三分之一圆环形金属板形成电容，将两个上述环形共面电容测头安置于两个圆形绝缘基板上，两个圆形绝缘基板作为圆柱体容器的两底面，并将圆柱体容器横置，容器中密封注入体积1/2的绝缘性液体，电位引线将十二块金属板的电位取出并与电容测量单元的输入端相连，电容测量单元与倾角计算单元连接；容器发生倾斜时，两个环形共面电容测头与绝缘性液体的相对位置发生变化，通过测量电容容值的变化，可求得倾角值。

Paired trisectional annular-circular nested pole plate staggered arrangement type inclination angle measuring method and apparatus thereof

成对三等分环-圆嵌套极板相向交错放置式倾角测量方法与装置属于角度测量技术，其中传感器单元的环形共面电容测头由一个圆形金属板和三个三分之一圆环形金属板组成，四块金属板共面同心，三个三分之一圆环形金属板沿周向均匀分布，每一块与圆形金属板形成电容，将两个上述环形共面电容测头分别安置于两个圆形绝缘基板上，两个圆形绝缘基板作为圆柱体容器的两个底面，并将此圆柱体容器横置，在容器中密封注入体积1/2的绝缘性液体，电位引线将八块金属板的电位取出并与电容测量单元的输入端相连，电容测量单元与倾角计算单元连接；容器发生倾斜时，两个环形共面电容测头与绝缘性液体的相对位置发生变化，通过测量电容容值的变化，可求得倾角值。

Capacitive sensor

A capacitive sensor includes a fixed board provided with a fixed electrode unit consisting of one or more electrodes, a movable member provided with a movable electrode unit consisting of one or more electrodes which faces the fixed electrode unit with a gap therebetween, the movable member being rotatable with respect to the fixed board, a weight provided on the movable member, and a retaining element which is disposed between the fixed plate and the weight and retains the movable member in a rotatable manner. At least one of the movable electrode unit and the fixed electrode unit includes a plurality of electrodes.

Method for manufacturing a strain gauge device, a strain gauge device and the use of the device

A method for manufacturing a strain gauge device and a strain gauge device (20) are presented. The method comprises obtaining (11) a first substrate (21A), preferably a first formable substrate film (21A) for accommodating electronic components, printing (12) by a printed electronics method, such as by screen printing or inkjet printing, a strain gauge (22) on the first substrate (21A), and molding (14), preferably by utilizing injection molding, a molded material layer (23) embedding the strain gauge (22). The strain gauge device (20) may comprise two, preferably formable, substrate films between which the strain gauge (22) and the molded material layer (23) may be arranged.

A kind of obliquity sensor based on capacitance principle

本发明属于传感器技术领域，公开了一种基于电容原理的倾角传感器，包括：填充有导电溶液的密封腔，设置在所述密封腔上的第一电极和第二电极，数据线缆以及外壳体；所述第一电极和所述第二电极关于所述密封腔对称设置，位于所述导电溶液两侧；所述第一电极和所述第二电极分别与所述数据线缆相连；所述密封腔固定在所述外壳体内。本发明提供的基于电容原理的倾角传感器，达到了提升对地底环境的适应性，简化数据处理操作，提升响应频率，降低成本的技术效果。

Fluctuating fluid level and tilt detection probe device

Variable fluid and tilt level sensing probe system

Digital tilt level sensing probe system comprising a set of multiple capacitor elements in a fluid container arranged along an axis of measurement where each multiple capacitor element represents a discrete level increment in dielectric material fluid to be measured. Individual capacitors in each element are horizontally spaced to reflect a level differential upon tilting of the fluid container from its normal attitude. In the case of a probe for sensing tilting in a single plane, a one-piece body is employed to include integral capacitor elements, mounting pad, connector, custom IC pad, and circuitry molded into such body. Alternative references may be employed for comparison with each capacitor assigned a unique time slot in a switching sequence.

Capacitive sensor

A capacitive sensor includes a fixed board provided with a fixed electrode unit consisting of one or more electrodes, a movable member provided with a movable electrode unit consisting of one or more electrodes which faces the fixed electrode unit with a gap therebetween, the movable member being rotatable with respect to the fixed board, a weight provided on the movable member, and a retaining element which is disposed between the fixed plate and the weight and retains the movable member in a rotatable manner. At least one of the movable electrode unit and the fixed electrode unit includes a plurality of electrodes.

A collimator for golf club

본 발명은 골프채용 시준장치에 관한 것으로, 상기 경사각 감지수단을 통해 감지되는 경사각에 따라 골프채의 경사 정도를 표시하기 위한 제어신호를 발생하는 제어부와, 상기 제어부로부터의 제어신호에 의해 골프채의 경사 정도를 표시하는 표시부를 포함하여 구성된다. 이러한 본 발명은, 골프채에 구비되어 골프채가 위치한 골프 그린의 경사 정도를 정확하게 측정하여 표시함으로써, 퍼팅을 연습하는 사용자에게 그린의 상태를 읽는 능력을 향상시킬 수 있도록 도움을 줄 수 있다. The present invention relates to a golf recruiting collimation device, the control unit for generating a control signal for displaying the inclination degree of the golf club according to the inclination angle detected by the inclination angle detection means, and the degree of inclination of the golf club by the control signal from the control unit It is configured to include a display unit for displaying. The present invention, by providing a golf club to accurately measure and display the degree of inclination of the golf green golf club is located, it can help to improve the ability to read the state of the green to the user practicing putting.

Displayer inclination angle indication system

一种显示器倾斜角度指示系统，用来指示一显示器的倾斜角度，所述显示器倾斜角度指示系统包括一频率信号产生器、一电容传感器、一频率电压变换器及一倾斜角度显示装置，所述频率信号产生器输出一频率信号给所述频率电压变换器，所述电容传感器设置于所述显示器上，且其电容值随着所述显示器的倾斜角度的变化而变化，所述电容传感器连接到所述频率电压变换器而将其电容值传输给所述频率电压变换器，所述频率电压变换器根据接收到的频率信号和电容值而转换得到一与所述电容值成正比的输出电压，所述倾斜角度显示装置接收所述输出电压，并根据所述输出电压得到所述显示器的一倾斜角度并显示出来。

Electronic circuit for acousto-optoelectronic angle indication and level gauge thereof

The present invention discloses an electronic circuit for acousto-optoelectronic angle indication and a level gauge thereof. The electronic circuit for acousto-optoelectronic angle indication comprises a main control circuit (a), a power circuit (b), a key circuit (c), a sensor module circuit (d), an LED indicator module circuit (e), a buzzer module circuit (f) and a data storage module (g). The control circuit (a) comprises a microcontroller (U 2 ), a capacitor (C 2 ), a capacitor (C 3 ), a capacitor (C 4 ), a capacitor (C 5 ), a capacitor (C 6 ), a capacitor (C 8 ), an electrolytic capacitor (E 1 ), a resistor (R 11 ), a resistor (R 12 ) and a resistor (R 20 ). The invention realizes an acousto-optoelectronically indicated design circuit device with high precision, so that the current angular value state can be accurately displayed through acoustic and photoelectric changes by simply placing a measuring device on a test plane.

Measuring system for horizontality and pressure of collet using capacitive sensor array panel

PURPOSE: A system using capacitance sensors array for measuring the horizontality and the pressure of a cullet is provided to measure the horizontal pressure of the cullet by using the capacitance sensor array automatically on a real time basis, thereby improving yield as a bonding process is not stopped. CONSTITUTION: A system using capacitance sensors array for measuring the horizontality and the pressure of a cullet(34) comprises a wafer stage(10), a bonding stage(20), a capacitance sensor array panel(40), a bonding head(33), and a controller. A wafer(11) having a plurality of semiconductor chips is formed on the wafer stage. A substrate for bonding the semiconductor chips is loaded on the wafer stage. The capacitance sensor array panel is arranged between the wafer stage and the bonding stage and includes a plurality of the capacitance sensors The bonding head adsorbs the surfaces of the semiconductor chips with the cullet, moves the semiconductor chips to a bonding position, bonds the semiconductor chips on a substrate, and presses the capacitance sensor array panel by using the cullet at a constant cycle.

Electrostatic capacity type liquid sensor

本发明涉及一种静电电容式液体传感器，其利用液体表面始终维持水平面这一事实来检测物体的倾斜角及加速度。其中，电绝缘体制的筒状密闭容器(6)具有平行的两个侧面(2、3)，在该两个侧面上设置开口(13、14)，至少在板状主电极(4、5)的单面上形成有硅氧化覆盖膜，将氧化覆盖膜设为容器的内侧使上述板状主电极抵接于上述侧面以将该开口阻塞。密封剂(28)液密地介在于板状主电极和侧面的间隙，在容器中密封入内容积的大致1/2量的导电性液体(27)。将与该导电性液体电接触的副电极(8)设置在容器内。

System and method of tilt sensor tide and inland water level gauge

A method of measuring tides and inland water levels is provided. The method comprises a computer receiving a first measurement of an angle formed by a first ray comprising a vertical fixed piling and a second ray formed by a downward sloping ramp of known length, a lower end of the ramp contacting a surface of a dock float and the surface representing a plane contacting the fixed piling at a 90-degree angle at a first meeting point. The computer then calculates, based on the first measurement, based on the ramp length, and based on the 90-degree angle, a first distance from the first meeting point to a vertex of the angle. The computer later receives a second measurement of the angle, wherein the plane meets the piling at a second meeting point. The computer calculates a second distance and expressing a difference between two distances as tidal change.

A kind of balance of plant on-line measurement device

本发明涉及小倾角测量技术领域，特别涉及物体各个平面倾斜度以及倾斜方向的测量技术，具体是一种设备平衡在线测量装置。一种设备平衡在线测量装置，包括外壳、电源、垂直布置的两个水准泡水平仪、安装在外壳上表面的显示器、安装在外壳内部的处理芯片、安装在外壳内部的传感器电容，所述传感器电容为一个充有高介电常数的液体的前、后、左、右安装有电容极板的容器，前后两块电容极板构成第一电容传感器，左右两块电容极板构成第二电容传感器。本发明结构简单，不仅能够准备快速地测量出物体表面的倾角，而且同时能测量出倾向角。

Force balance feedback type quartz horizontal pendulum ground inclination measuring device and method

本发明公开了一种力平衡反馈式石英水平摆地倾斜测量装置及方法。地倾斜测量装置包括底板，底板上固定有塔形石英支架。石英摆杆通过两根石英吊丝悬挂在支架上，呈近乎水平状态。摆杆一端插装有摆锤，竖直设置的摆锤两侧分别设有第一、第二平行金属板。摆锤与第一、第二平行金属板之间互相平行，三者构成差动式平板电容，其中摆锤用作动片，第一和第二平行金属板用作定片。第一、第二平行金属板与固定直流电压生成单元、正弦波波形生成单元的输出端相连，摆锤与地倾斜测量电路的输入端相连，地倾斜测量电路的输出端经由反馈单元与摆锤相连。本发明在地面发生微小倾斜时可实现地倾斜角的精准测量，且构建出了闭环反馈系统，解决了现有石英水平摆倾斜仪存在的问题。

Integrated tilt sensor

A tilt sensor having a printed circuit board disposed in a direction normal to a reference plane for measuring a tilt angle with a pair of electrodes formed on a first surface of the printed circuit board. A cover is affixed to the printed circuit board and creates a cavity between the cover and the printed circuit board with a predetermined gap between the cover and the pair of electrodes, the cover acting as a common electrode to the pair of electrodes to create a pair of capacitors. An inert liquid is contained in the cavity, the surface level of the inert fluid varying according to the tilt angle of the reference plane. A signal processing circuit is formed on a second surface of the printed circuit board that produces an output signal corresponding to a difference in capacitance between the two capacitors as a tilt angle detection output.

Measuring system for horizontality and pressure of collet using capacitive sensor array panel

本發明涉及一種利用能夠通過設置在晶片承載台與接合台之間的電容感測器陣列面板即時檢查夾頭水平度及壓力狀態的靜電式面板的夾頭水平度及壓力測定系統。為此，本發明利用電容感測器陣列面板的夾頭水平度及壓力測定系統包括：晶片承載台，裝載帶有多個半導體晶片的晶片；接合台，裝載有用於半導體晶片接合的基板；電容感測器陣列面板，設置在晶片承載台與接合台之間並由多個電容感測器陣列構成；接合頭，通過夾頭將半導體晶片表面吸附後將其向接合位置移送使半導體晶片與基板接合，並按一定的週期利用夾頭向上述電容感測器陣列面板加壓；控制器，檢測出電容感測器陣列面板各陣列的電容變化後，根據檢測結果對夾頭的水平度與壓力狀態進行檢查。

Detection device including circuit component

A detection sensor includes a detector unit which is provided on an insulating board at a first side of the board, a circuit component which is provided on the board at a second side of the board and which processes a signal detected by the detector unit, and a wiring unit which penetrates through the board in the thickness direction of the board and connects the detector unit and the circuit component.

Motion sensor

A motion sensor having an outer tubular member closed at both ends thereof and an inner tubular member, concentrically disposed within the outer tubular member, forming therein an inner chamber and with the outer tubular member forming an outer chamber surrounding the inner chamber, the inner tubular member being provided with one or more apertures in walls thereof allowing fluid flow between the inner and outer chambers. A liquid at least partially fills the inner and outer chambers providing a liquid interface therein. Operatively connected to at least one of the tubular members are devices for determining the position of the liquid interface of the liquid.

Inclinometer and inclinometer network

An electronic inclinometer and a centrally controlled network of inclinometers are disclosed. A resistive or capacitive inclinometer sensor measures inclination in two orthogonal axes. Measuring electrodes can be provided on the exterior of a dielectric sensor cell isolated from a sensor fluid. In another embodiment, measuring electrodes comprise pins partially immersed in a cell fluid contained in a metal housing and reference electrodes are provided to compensate for temperature and electrochemical changes in the sensor. Sensor signals are converted to frequency signals that are processed by a microprocessor having a unique logical address and preferably having an external solid state memory. A plurality of inclinometers can be arranged in multiple logical branches to be centrally controlled. The controller operates the network in real time or in a programmable timed autonomous mode. Network data can be presented in a graphical 3D format using software provided on the controller.

Tilt sensor

A tilt angle sensor is disclosed that is capable of detecting whether a tilt angle of a reference plane exceeds a predetermined value by means of only one threshold value. Although only one threshold value is used, the tilt angle can be measured with respect to either a clockwise or a counterclockwise direction from the untilted state. A pair of differential electrodes electrically independent of each other are formed in a shape symmetric with respect to upper and lower sections of a printed circuit board. A common electrode plate is mounted opposed to the pair of differential electrodes with a predetermined gap therebetween. The pair of differential electrodes and the common electrode is stored in a closed space formed by the printed circuit board and an oil case. A dielectric liquid is filled into the closed space in such a way that the level of the liquid varies according to the tilt of the reference plane. An output signal corresponding to the difference in capacity between two capacitors formed by associated components is produced as a tilt detection output.

Low cost position sensor and mobility device using the same

本發明關於一種低成本位置感應裝置以及使用其之移動設備。此低成本位置感應裝置包括一可滾動物件、一容器以及一控制電路。上述可滾動物件包括一特定材質。上述容器的底部為非平面，其中，容器內部配置至少一可檢測座標之感測裝置，其中，可滾動物件配置於上述容器中，其中，上述可檢測座標之感測裝置可檢測上述特定材質。控制電路耦接上述可檢測座標之感測裝置，其中，上述可檢測座標之感測裝置檢測上述特定材質，以判斷上述可滾動物件的座標位置，並回傳上述可滾動物件的座標位置給控制電路。控制電路根據上述可滾動物件的位置，判斷容器的傾斜角度。

Tilt sensor

A tilt angle sensor is disclosed that is capable of detecting whether a tilt angle of a reference plane exceeds a predetermined value by means of only one threshold value. Although only one threshold value is used, the tilt angle can be measured with respect to either a clockwise or a counterclockwise direction from the untilted state. A pair of differential electrodes electrically independent of each other are formed in a shape symmetric with respect to upper and lower sections of a printed circuit board. A common electrode plate is mounted opposed to the pair of differential electrodes with a predetermined gap therebetween. The pair of differential electrodes and the common electrode is stored in a closed space formed by the printed circuit board and an oil case. A dielectric liquid is filled into the closed space in such a way that the level of the liquid varies according to the tilt of the reference plane. An output signal corresponding to the difference in capacity between two capacitors formed by associated components is produced as a tilt detection output.

Liquid level detector

A liquid level detector for use in a pump control system comprises a chamber (20) for liquid, a liquid inlet (6) to the chamber (20), a liquid outlet (7) from the chamber and connectable to a pump, and a capacitive sensor comprising mutually spaced capacitive sensor elements (21, 22; 22, 23) forming a capacitance which is sensitive to permittivity within a region of the chamber proximate the capacitive sensor. The chamber is defined at least partially by a barrier member 25 and the capacitive sensor elements are provided on the barrier member outside the chamber.

Method and device for diagnosing trouble with sensor function

A SENSOR (12) FOR CONVERTING A PHYSICAL QUANTITY INTO AN ELECTRIC SIGNAL (S13) AND ISSUING THE OUTPUT IS DRIVEN BY A DRIVE CIRCUIT (11) WHICH IS DRIVEN BY A DRIVE SIGNAL (S16) ISSUED FROM A 1-CHIP MICROCOMPUTER (14). THE 1-CHIP MICROCOMPUTER (14) JUDGES FAULT OF SENSOR FUNCTION WHEN THE SENSOR (12) OUTPUT SIGNAL (SI 2) IS OUT OF A SPECIFIED OUTPUT RANGE. FURTHER, WHEN STOPPING THE OPERATION OF THE DRIVE CIRCUIT (II), IF THE SENSOR (12) OUTPUT SIGNAL (S12) DOES NOT COINCIDE WITH A SPECIFIC VALUE, THE 1-CHIP MICROCOMPUTER (14) ALSO JUDGES FAULT OF SENSOR FUNCTION. ACCORDING TO THE INVENTION, IN THE EVENT OF A TROUBLE OF SENSOR FUNCTION ALLOWING THE SENSOR (12) OUTPUT SIGNAL (S 12) TO SETTLE WITHIN AN OUTPUT RANGE, SUCH TROUBLE CAN BE DETECTED.(FIG. 1)

METHOD AND DEVICE FOR DIAGNOSING A PROBLEM IN A DETECTION FUNCTION.

Un método de diagnosis de avería de una función de detección, para llevar a cabo la diagnosis en base a un valor específico de CC, predeterminado, en un aparato para controlar una salida mediante el uso de un microordenador de un solo chip (14) que recibe una señal eléctrica procedente de un sensor (12), para convertir una cantidad física en la señal eléctrica, en el que un circuito de excitación (11) para excitar el sensor, es excitado por una señal de excitación emitida desde el microordenador de un solo chip (14); y el mencionado microordenador de un solo chip (14) recibe una señal eléctrica, en base al sensor (12) en funcionamiento normal emitiendo una señal de excitación, estando el mencionado método caracterizado porque: el mencionado microordenador de un solo chip recibe una señal eléctrica en base al sensor (12) en el valor de CC específico determinado, cuando la señal de excitación de funcionamiento normal se detiene, fija en un nivel alto (H) o bajo (L); y se diagnostica una avería de la función de detección cuando la señal eléctrica del valor de CC específico no se recibe estando detenida la señal de excitación en funcionamiento normal, fija en un nivel alto (H) o bajo (L). A fault diagnosis method of a detection function, to carry out the diagnosis based on a specific, predetermined DC value, in an apparatus for controlling an output by using a single chip microcomputer (14) that receives an electrical signal from a sensor (12), to convert a physical quantity into the electrical signal, in which an excitation circuit (11) to excite the sensor, is excited by an excitation signal emitted from the microcomputer of a single chip (14); and said single-chip microcomputer (14) receives an electrical signal, based on the sensor (12) in normal operation emitting an excitation signal, said method being characterized in that: said single-chip microcomputer receives an electrical signal based on the sensor (12) at the specific DC value determined, when the normal ...

Analog floating gate inclinometer

本发明涉及一种模拟浮动栅极AFG测斜仪(102)，其中提供多个AFG传感器(110(N))以检测由容纳于密封微沟道(104)中的导电液滴(118)在重力下沉降导致的放电的存在。与所述AFG传感器(110(N))相关联的多个传感器端口电极(106(N)、108(N))沿着所述测斜仪(102)的弯曲密封微沟道(104)的长度放置于按对应角度倾斜校准的特定位置处。在测量期间在特定AFG传感器端口(110(i))处检测到的由于所述导电液滴(118)在重力下的移动导致的放电用于确定所测量的表面倾斜。

Inclination sensor

提供一种根据一个临界值,无论从无倾斜状态向顺时针方向倾斜或是向反时针方向倾斜,都能与该倾斜方向无关地检测倾斜角是否达到规定值之上的倾斜传感器。在印刷电路基板21上由平行于基准面的平面和印刷电路基板21的交叉线L2所划分的(区域内,以将交叉线L2作为对称轴相互线对称的形状且以将垂直于基准面的平面和印刷电路基板21的交叉线L1作为对称轴线对称形状,分别相互电独立地设置着一对差动电极22a,22b。此外,相对于该一对差动电极,隔着规定空隙地设置对置的通用电极板23。并将一对差动电极和通用电极板收藏在由印刷电路基板和罩体所形成的密闭空间内。该密闭空间内以液面根据基准面的倾斜而变化的状态封装有导电性液体27。并将根据由通用电极23和一对差动电极22a、22b构成的2个电容器的电容量值的差分的输出信号作为倾斜检测输出而输出。

Method and device for diagnosing trouble with sensor function

Low cost position sensor and mobility device using the same

本發明關於一種低成本位置感應裝置以及使用其之移動設備。此低成本位置感應裝置包括一可滾動物件、一容器以及一控制電路。上述可滾動物件包括一特定材質。上述容器的底部為非平面，其中，容器內部配置至少一可檢測座標之感測裝置，其中，可滾動物件配置於上述容器中，其中，上述可檢測座標之感測裝置可檢測上述特定材質。控制電路耦接上述可檢測座標之感測裝置，其中，上述可檢測座標之感測裝置檢測上述特定材質，以判斷上述可滾動物件的座標位置，並回傳上述可滾動物件的座標位置給控制電路。控制電路根據上述可滾動物件的位置，判斷容器的傾斜角度。

Device for inclination measurement comprising a vial containing a bubble and a capacitive means for detecting the position of the bubble inside the vial

The device has a printed circuit board (2), and a bulb (12) fixed to the board by bonding, where the bulb contains liquid and bubble (13). A determination unit determines horizontality of an apparatus around axes in a plane of the board. The board comprises metal pads (8, 9) located opposite to distinct regions of the bulb. Electrically conductive tracks (3) are connected to the pads to determine electric capacities associated with the pads, where the capacities depend on a position of the bubble in the bulb. A pair of distinct metal pads (6, 7) is located opposite to an oblong bulb.

Flüssigkeitspegelzustand-Erfassungsvorrichtung und Brennstoffzellensystem

Flüssigkeitspegelzustand-Erfassungsvorrichtung (10), umfassend:einen Schwimmerabschnitt (20), welcher in einer vertikalen Richtung durch einen Führungsstab (45) bewegbar geführt ist, welcher in einem Tank (1) zum Speichern einer Flüssigkeit (2) aufgerichtet ist, wobei ein unterer Abschnitt des Führungsstabs (45) mit einem Anschlag (46) versehen ist; undein Paar von Elektrodenabschnitten (30, 50, 60), welche integral an dem Schwimmerabschnitt (20) befestigt sind, und welche in der vertikalen Richtung einander gegenüberliegend angeordnet sind,wobei die Flüssigkeitspegelzustand- Erfassungsvorrichtung (10) auf Grundlage einer Kapazität zwischen dem Paar von Elektrodenabschnitten (30, 50, 60), welche sich entsprechend einer Permittivität eines zwischen das Paar von Elektrodenabschnitten (30) eingefügten Isoliermaterials ändert, detektiert, ob ein Pegel (R) einer Flüssigkeit (2) in dem Tank (1) niedriger als der Anschlag (46) ist oder nicht, und eine Neigung des Tanks (1) auf der Grundlage der Kapazität zwischen dem Paar von Elektrodenabschnitten (30, 50, 60) erfasst.

具有减小的振动校正误差的mems测斜仪

一种具有减小的振动校正误差的MEMS测斜仪。该MEMS测斜仪包括基底、第一移动质量块和传感单元。传感单元包括第二移动质量块、多个弹性元件，弹性元件被插入在第二移动质量块与基底之间并且在与第一轴线平行的方向是柔顺的，以及多个弹性结构，多个弹性结构中的每个弹性结构被插入在第一移动质量块与第二移动质量块之间并且在与第一轴线和第二轴线平行的方向是柔顺的。传感单元进一步包括相对于基底固定的固定电极以及相对于第二移动质量块固定的移动电极，这形成了可变电容器。

기울기 도출 장치 및 기울기 도출 방법

본 발명은, 지시기의 기울기를, 낮은 계산량으로 정밀하게 도출 가능한 기울기 도출 장치 및 기울기 도출 방법을 제공하는 것을 과제로 한다. 펜 형상의 지시기에 의해 지시된 위치를 검출하는 기울기 도출 장치로서, 상기 지시기는, 축 방향의 일단에 설치된 제 1 전극과, 상기 축 주위에 설치된 제 2 전극을 구비하고, 상기 제 1 전극의 위치와 상기 제 2 전극의 위치를 검출하는 평면상의 센서와, 제어부(10)를 구비하고, 상기 제어부(10)는, 상기 제 1 및 제 2 전극 각각의 상기 위치의 차분을 바탕으로 한 값과, 상기 지시기의 상기 축의 기울기의 바탕이 되는 보정값의 대응 관계가 등록된 룩업 테이블(15: 15A, 15B, 15C)과, 상기 차분을 바탕으로 한 값을 계산하여 상기 룩업 테이블(15)에 입력하는 입력값 계산부(14: 14A, 14B)와, 상기 룩업 테이블(15)로부터 출력된 상기 기울기의 바탕이 되는 보정값으로부터 상기 기울기를 도출하는 기울기 도출부(16)를 구비하는 기울기 도출 장치를 제공한다.

Nivelliereinrichtung für ein haushaltsgerät, haushaltsgerät und nivellierverfahren für ein haushaltsgerät

Parallel plate capacitor-based inclinometer and method

A sensor for determining an angle of tilt includes a housing that defines a chamber, and a parallel plate capacitor having a moving plate located inside the chamber and a fixed plate fixedly attached to a first external side of the housing. The fixed plate has a width W that varies, and the moving plate is configured to freely rotate about an axis.

Nivelliereinrichtung für ein haushaltsgerät, haushaltsgerät und nivellierverfahren für ein haushaltsgerät

一种微波天线控制系统

本发明揭示了一种微波天线控制系统，用于对微波天线的角度进行自动调节。其包括第一驱动装置、第二驱动装置、角度传感器、控制单元，第一驱动装置、第二驱动装置、角度传感器与微波天线均相连，且这三者与控制单元也均相连，角度传感器监测微波天线的角度信息，控制单元根据该角度信息控制第一驱动装置和/或第二驱动装置对微波天线的角度进行精准、自动调节，且结构简单、易操作。

位置指示器、方法及系统

能够以低消耗电流检测位置指示器的倾斜。一种位置指示器，具有笔形状的壳体，具备配置于所述壳体的一端侧的第一电极及第二电极和至少产生向所述第一电极供给的信号的信号产生电路，与位置检测装置的传感器之间以静电方式相互作用。第二电极以第一电极在壳体的轴心方向上局部地露出的方式包围第一电极而配置，并且第二电极由至少1个电极构成。具备信号送出控制电路，该信号送出控制电路以对通过来自信号产生电路的信号被向第一电极供给而形成的第一电极与传感器之间的静电相互作用赋予变化的方式，结合于第二电极而控制第二电极。

一种一体式垌室地倾斜观测仪器

本发明提供了一种一体式垌室地倾斜观测仪器，包括摆体和前置电器盒。所述摆体用于感知两分向地面倾斜量，由对称结构的摆系、五极板两分向电容位移传感器、调零机构、电控锁摆机构、仪器底板及摆体外壳构成。所述前置电器盒用于产生供给所述五极板两分向电容位移传感器的激励信号，并放大、解调出两路与地面倾斜呈线性关系的模拟电压输出信号，以及用于对所述摆体内的调零机构和锁摆电机进行本地和远程操控。所述摆系包括摆筒、悬挂簧片、摆杆和摆锤，所述摆筒为对称结构的构成摆系的支撑件，所述悬挂簧片为正交两自由度簧片组，所述簧片组的一端与所述摆筒相连，所述簧片组的另一端与所述摆杆相连，所述摆杆与所述摆锤互相连接。

倾斜度导出装置和方法

一种笔状指点器的倾斜度导出装置和方法，指点器包括安装在指点器的轴的一端的第一电极和绕指点器的轴安装的第二电极，该装置包括检测第一电极的位置和第二电极的位置的平面状传感器以及控制部，其中，控制部包括：查找表(LUT)，在LUT中登记了基于第一电极的位置与第二电极的位置之间的差的值与成为指点器的轴的倾斜度的基础的补偿值的对应关系；输入值计算部，输入值计算部计算基于所述差的值并将基于所述差的值输入至LUT；以及倾斜度导出部，倾斜度导出部根据从LUT输出的补偿值导出倾斜度。

기울기 측정 장치

본 발명은 기울기 측정 장치에 관한 것으로, 해결하고자 하는 기술적 과제는 빌딩의 골조 시공부터 준공 이후까지도 빌딩의 기울기를 지속적으로 모니터링 할 수 있는 기울기 측정 장치를 제공하는 데 있다. 상기한 기술적 과제를 달성하기 위한 본 발명의 기울기 측정 장치는 내측에 중공부가 형성되는 케이스; 상단이 상기 케이스의 내측면 상단에 연결되는 연결체; 상기 케이스의 내측에 수용되며 상기 연결체의 하부에 연결되어 중력 방향으로 늘어지는 무게추; 및, 상기 케이스의 주변에 설치되어 상기 무게추의 측부 거리를 측정하되 복수 개로 구성되어 상기 무게추의 사방 거리를 측정하는 변위센서; 를 포함한다.

기울기 측정 장치

본 발명은 기울기 측정 장치에 관한 것으로, 해결하고자 하는 기술적 과제는 빌딩의 골조 시공부터 준공 이후까지도 빌딩의 기울기를 지속적으로 모니터링 할 수 있는 기울기 측정 장치를 제공하는 데 있다. 상기한 기술적 과제를 달성하기 위한 본 발명의 기울기 측정 장치는 내측에 중공부가 형성되는 케이스; 상단이 상기 케이스의 내측면 상단에 연결되는 와이어; 상기 케이스의 내측에 수용되며 상기 와이어의 하부에 연결되어 중력 방향으로 늘어지는 무게추; 및, 상기 케이스의 주변에 설치되어 상기 무게추의 측부 거리를 측정하되 복수 개로 구성되어 상기 무게추의 사방 거리를 측정하는 변위센서; 를 포함한다.

Sensore di inclinazione.

一种一体式垌室地倾斜观测仪器

本发明提供了一种一体式垌室地倾斜观测仪器，包括摆体和前置电器盒。所述摆体用于感知两分向地面倾斜量，由对称结构的摆系、五极板两分向电容位移传感器、调零机构、电控锁摆机构、仪器底板及摆体外壳构成。所述前置电器盒用于产生供给所述五极板两分向电容位移传感器的激励信号，并放大、解调出两路与地面倾斜呈线性关系的模拟电压输出信号，以及用于对所述摆体内的调零机构和锁摆电机进行本地和远程操控。所述摆系包括摆筒、悬挂簧片、摆杆和摆锤，所述摆筒为对称结构的构成摆系的支撑件，所述悬挂簧片为正交两自由度簧片组，所述簧片组的一端与所述摆筒相连，所述簧片组的另一端与所述摆杆相连，所述摆杆与所述摆锤互相连接。

MEMS inclinometer having a reduced vibration rectification error

A MEMS inclinometer includes a substrate, a first mobile mass and a sensing unit. The sensing unit includes a second mobile mass, a number of elastic elements, which are interposed between the second mobile mass and the substrate and are compliant in a direction parallel to a first axis, and a number of elastic structures, each of which is interposed between the first and second mobile masses and is compliant in a direction parallel to the first axis and to a second axis. The sensing unit further includes a fixed electrode that is fixed with respect to the substrate and a mobile electrode fixed with respect to the second mobile mass, which form a variable capacitor.

微机电系统测斜仪

实施例公开了微机电系统测斜仪。该微机电系统测斜仪包括基底、第一移动质量块和传感单元。传感单元包括第二移动质量块、多个弹性元件，弹性元件被插入在第二移动质量块与基底之间并且在与第一轴线平行的方向是柔顺的，以及多个弹性结构，多个弹性结构中的每个弹性结构被插入在第一移动质量块与第二移动质量块之间并且在与第一轴线和第二轴线平行的方向是柔顺的。传感单元进一步包括相对于基底固定的固定电极以及相对于第二移动质量块固定的移动电极，这形成了可变电容器。该MEMS测斜仪能够减小振动校正误差。

具有减小的振动校正误差的mems测斜仪

一种具有减小的振动校正误差的MEMS测斜仪。该MEMS测斜仪包括基底、第一移动质量块和传感单元。传感单元包括第二移动质量块、多个弹性元件，弹性元件被插入在第二移动质量块与基底之间并且在与第一轴线平行的方向是柔顺的，以及多个弹性结构，多个弹性结构中的每个弹性结构被插入在第一移动质量块与第二移动质量块之间并且在与第一轴线和第二轴线平行的方向是柔顺的。传感单元进一步包括相对于基底固定的固定电极以及相对于第二移动质量块固定的移动电极，这形成了可变电容器。

자기식 엔코더를 이용한 각도 측정 시스템, 그 측정 방법 및 그 각도 측정 시스템의 파라미터 설정 방법

제 1 트랙 및 제 2 트랙의 자화띠를 구비한 자석을 이용한 각도 측정 시스템은, 각도 측정 장치를 포함하되, 상기 각도 측정 장치는, 상기 제 1 트랙의 자기장의 크기를 측정하는 제 1 홀 센서의 출력으로부터, 상기 제 1 트랙의 상기 제 2 트랙에 대한 자기장의 간섭 신호 성분을 제거한 제 1 보정 각도값을 산출하는 제 1 보정 각도값 산출기; 상기 제 2 트랙의 자기장의 크기를 측정하는 제 2 홀 센서의 출력으로부터, 상기 제 2 트랙의 상기 제 1 트랙에 대한 자기장의 간섭 신호 성분을 제거한 제 2 보정 각도값을 산출하는 제 2 보정 각도값 산출기; 및상기 제 1 보정 각도값과 상기 제 2 보정 각도값을 이용하여, 상기 자석의 회전 각도값을 산출하는 절대 각도값 산출기;를 포함한다.

位置指示器及び位置指示装置並びに位置指示器の傾きの検出方法

位置指示器の傾きを、低消費電流で検出することができる。ペン形状の筐体を有し、前記筐体の一端の側に配置された第１の電極と第２の電極と、少なくとも前記第１の電極に供給する信号を発生する信号発生回路を備えており、位置検出装置のセンサとの間で静電的にインタラクションする位置指示器である。第２の電極は第１の電極が筐体の軸心方向に部分的に露出するように第１の電極を囲んで配置されているとともに、第２の電極は少なくとも1つの電極で構成されている。信号発生回路からの信号が第１の電極に供給されて形成される第１の電極とセンサとの間の静電的インタラクションに対して変化を与えるように、第２の電極に結合されて第２の電極を制御する信号送出制御回路を備えている。

Position indicator, position indication device, and method for detecting inclination of position indicator

The tilt of a position indicator can be detected with low current consumption. There is provided a position indicator that has a pen-shaped chassis and includes a first electrode and a second electrode disposed on the side of one end of the chassis and a signal generating circuit that generates a signal supplied to at least the first electrode and carries out capacitive interaction with a sensor of a position detecting device. The second electrode is disposed to surround the first electrode in such a manner that the first electrode is partly exposed in the axis-center direction of the chassis and the second electrode is composed of at least one electrode. The position indicator includes a signal sending control circuit that is coupled to the second electrode and controls the second electrode to give change to the capacitive interaction between the first electrode and the sensor formed through supply of a signal from the signal generating circuit to the first electrode.

静電容量式傾斜センサ

(57)【要約】 【課題】 ゼロ点調整や温度補償等の調整が不要な静電 容量式傾斜センサを提供する。 【解決手段】 半円状の一対の差動電極２１ａ，２１ｂ が垂直方向に隣接配置され、これと対向するように、共 通電極２２が一定の間隙を設けて配置されている。前記 一対の差動電極２１ａ，２１ｂおよび共通電極２２は、 密閉容器（図示省略）内に収容され、密閉容器内には誘 電性液体（図示省略）が封入される。上側の差動電極２ １ａおよび共通電極２２は上側可変コンデンサＣ１を構 成し、下側の差動電極２１ｂおよび共通電極２２は下側 可変コンデンサＣ２を構成する。

静電容量式傾斜角センサ

【課題】性能の低下を防止しつつ小型化することができる静電容量式傾斜角センサを提供する。 【解決手段】傾斜角センサ１は、液状の静電容量媒体２３と、その静電容量媒体２３を収容するケース１１と、該ケース１１の対向内壁面に対向して設けられ、静電容量媒体２３によって浸漬された部分によりコンデンサを構成する差動電極１６ａ，１６ｂ及び共通電極１５ａとを備えている。静電容量媒体２３は、絶縁体からなる液状の基剤に、その基剤よりも高い誘電率の微粒子が混入されることにより構成されている。そして、傾斜角センサ１は、ケース１１の傾きに応じて変化するコンデンサの静電容量の変化量に基づいて傾きを検出する。 【選択図】 図１

Ｍｅｍｓセンサ

Liquid metal sensor

Described herein is a sensor including a sensing electrode structure and a motion-responsive structure in capacitive communication with the sensing electrode structure, the sensing electrode structure and the motion-responsive structure being separated by a first dielectric layer, the motion-responsive structure comprising a liquid metal mass within a matrix in which the liquid metal mass is movable based upon movement of the sensor, and the sensing electrode structure comprising a first electrode, and a second electrode spaced from the first electrode to form a capacitor.

기판처리장치

본 발명은 기판처리장치에 대한 것으로서, 보다 상세하게는 초임계유체를 이용하여 기판에 대한 건조공정 등의 처리공정을 진행하는 경우에 챔버 내부에서 기판의 수직방향 및/또는 수평방향에 대한 틸팅을 감지할 수 있는 기판처리장치에 대한 것이다.

Mems sensor

The present invention relates to A MEMS sensor with movable and fixed components for measuring linear acceleration. The MEMS sensor includes at least two mutually independent differential sensor elements disposed inside a common frame structure providing walls for hermetic sealing of the MEMS sensor. The mutually independent differential sensor elements are pairwise configured to perform double differential detection of linear acceleration. The MEMS sensor comprises a common anchoring area to which the at least two pairwise arranged differential sensor elements are anchored. The common anchoring area is located at the centroid of the pairwise configured differential sensor elements. A self-test capability of the MEMS sensor is also provided.

기판처리장치

본 발명은 기판처리장치에 대한 것으로서, 보다 상세하게는 초임계유체를 이용하여 기판에 대한 건조공정 등의 처리공정을 진행하는 경우에 챔버 내부에서 기판의 수직방향 및/또는 수평방향에 대한 틸팅을 감지할 수 있는 기판처리장치에 대한 것이다.

Tilt indicator

A tilt indicator includes a tilt detection assembly including a mass movable from a first position to a second position in response to a tilt event. A capacitance sensor circuit is disposed proximate the first position. The capacitance sensor circuit is configured to output a capacitance value based on the mass being in the first position. A module and logic integrated with and/or executable by the module is coupled to the capacitance sensor circuit, the module configured to output, when energized, an indication of an actuation state of the tilt indicator based on the capacitance value. The capacitance sensor circuit may be energized from by a wireless communication module, such as an RFID chip, by a remote reader device.

一种基于电容变化的可调节角度的建筑用测量卡钳

一种基于电容变化的可调节角度的建筑用测量卡钳，涉及建筑技术领域，包括固定盘，所述固定盘的中部固定连接有转轴，转轴的外侧转动连接有卡钳，固定盘的内壁开设有均匀分布的卡槽。该基于电容变化的可调节角度的建筑用测量卡钳，通过重力块与定心块的配合使用，利用重力的方向使用竖直向下的特性，来使重力块转动至竖直状态，当重力块倾斜时，重力块会使定心块有不同程度的伸缩，这时伸出的定心块带动电介质板伸出，使电路电流可以连通，这时指示灯亮起，表示重力块未处于竖直状态，当指示灯不亮时，表示重力块处于竖直状态，从而达到了准确定位的效果，有效保证了卡钳与孔内壁互相垂直，保证了测量结果的准确性。

기울기 측정 장치 및 그 제조방법, 그리고 기울기 측정 방법

기울기 측정 장치가 제공된다. 상기 기울기 측정 장치는 내부 경사면에 대상 전극이 배치된 하우징, 및 상기 하우징과 결합되고, 상기 하우징의 내부에서 상기 대상 전극과 이격도록 배치되는 전도성 필러를 포함하되, 대상체의 기울기가 변화되는 경우, 상기 대상 전극과 상기 전도성 필러 사이의 커패시턴스(capacitance) 변화를 통해 상기 대상체의 기울어진 방향 및 기울어진 각도를 측정할 수 있다.

Hessonde für verschiedene flüssigkeiten und geneigte flüssigkeitsspiegel

Liquid metal sensor

Described herein is a sensor including a sensing electrode structure and a motion-responsive structure in capacitive communication with the sensing electrode structure, the sensing electrode structure and the motion-responsive structure being separated by a first dielectric layer, the motion-responsive structure comprising a liquid metal mass within a matrix in which the liquid metal mass is movable based upon movement of the sensor, and the sensing electrode structure comprising a first electrode, and a second electrode spaced from the first electrode to form a capacitor.