06-01-2022 дата публикации
Номер: US20220004032A1
A multilayer film includes a single-crystal silicon layer, a first layer containing Zr, a second layer containing ZrO, and a third layer containing a perovskite oxide having an electrooptic effect. The first layer, the second layer, and the third layer are provided in this order above the single-crystal silicon layer, and the multilayer film is transparent to a wavelength to be used. 1. A multilayer film comprising:a single-crystal silicon layer;a first layer containing Zr;{'sub': '2', 'a second layer containing ZrO; and'}a third layer containing a perovskite oxide having an electrooptic effect, the first layer, the second layer, and the third layer being provided in this order above the single-crystal silicon layer,wherein the multilayer film is transparent to a wavelength to be used.2. The multilayer film as claimed in claim 1 ,{'sub': 3', '3', '3', '3', '3, 'wherein the perovskite oxide is selected from the group consisting of (Pb)(Zr, Ti)O, (Pb, La) (Zr, Ti)O, K(Ta, Nb)O, (Sr, Ba)TiO, and BaTiO.'}3. The multilayer film as claimed in claim 1 , comprising:{'sub': '2', 'a layer containing SrTiOor MgO provided between the second layer and the third layer,'}{'sub': 3', '3, 'wherein the perovskite oxide is (Pb)(Zr, Ti)Oor (Pb, La)(Zr, Ti)O.'}4. The multilayer film as claimed in claim 1 , wherein the single-crystal silicon layer is provided on a silicon oxide layer.5. An optical device comprising:a substrate;a slot electrode having a slot between a pair of conductors provided over the substrate; anda multilayer film provided in the slot;{'sub': '2', 'wherein the- multilayer film includes a single-crystal silicon layer, a first layer containing Zr, a second layer containing ZrO, and a third layer containing a perovskite oxide, the first layer, the second layer, and the third layer being epitaxially grown in this order above the single-crystal silicon layer, and'}wherein a waveguide is formed of the third layer inside the slot.6. The optical device as claimed in claim 5 ...
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