18-02-2021 дата публикации
Номер: US20210050281A1
Принадлежит:
A surface treatment and an apparatus for semiconductor packaging are provided. A surface of a conductive layer is treated to create a roughened surface. In one example, nanowires are formed on a surface of the conductive layer. In the case of a copper conductive layer, the nanowires may include a CuO layer. In another example, a complex compound is formed on a surface of the conductive layer. The complex compound may be formed using, for example, thiol and trimethyl phosphite. 1. A device comprising:a substrate; and{'sub': 2', '2', '3', '2', '2', '3, 'a conductive layer on the substrate, a surface of the conductive layer comprising nanowires, the nanowires comprising Cu, CuO, CuO, Cu(OH)and CuCO, wherein an amount of CuO in the nanowires is greater than an amount of CuOin the nanowires, wherein the amount of CuO in the nanowires is greater than an amount of Cu in the nanowires, and wherein a combined amount of Cu(OH)and CuCOin the nanowires is greater than the amount of CuO in the nanowires.'}2. The device of claim 1 , further comprising an integrated circuit die attached to the substrate claim 1 , the conductive layer being interposed between the integrated circuit die and the substrate.3. The device of claim 2 , further comprising a molding compound extending along a top surface claim 2 , a bottom surface claim 2 , and sidewalls of the integrated circuit die claim 2 , wherein the molding compound is in physical contact with the nanowires.4. The device of claim 3 , further comprising an electrical connection on the substrate claim 3 , wherein the integrated circuit die is boned to the electrical connection using a conductive bump.5. The device of claim 4 , wherein the conductive layer and the electrical connection comprises copper.6. The device of claim 4 , wherein the molding compound is in physical contact with the electrical connection and the conductive bump.7. The device of claim 1 , wherein the conductive layer is configured as a ground shield.8. A device ...
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