31-12-2020 дата публикации
Номер: US20200411482A1
Принадлежит:
Systems and methods are described for improved heat dissipation of the stacked semiconductor dies by including metallic thermal pads between the dies in the stack. In one embodiment, the thermal pads may be in direct contact with the semiconductor dies. Heat dissipation of the semiconductor die stack can be improved by a relatively high thermal conductivity of the thermal pads that directly contact the adjacent silicon dies in the stack without the intervening layers of the low thermal conductivity materials (e.g., passivation materials). In some embodiments, the manufacturing yield of the stack can be improved by having generally coplanar top surfaces of the thermal pads and under-bump metallization (UBM) structures. 120-. (canceled)21. A stack of semiconductor dies , comprising: a substrate having a first side and a plurality of indentations at the first side, wherein each one of the indentations has a floor;', 'a plurality of interconnects extending at least partially through the substrate, wherein each one of the interconnects has an end portion projecting from the floor, the end portion having an upper surface facing away from the floor;', 'a plurality of metallization structures that each is connected to the upper surface of the end portion; and', 'a plurality of thermal pads on the first side of the substrate; and, 'a first semiconductor die including an active surface facing the first side of the substrate of the first semiconductor die, wherein the active surface includes one or more electrical circuits; and', 'a plurality of die pads on the active surface, wherein:', 'the active surface of the second semiconductor die is in contact with the plurality of thermal pads of the first semiconductor die; and', 'individual die pads of the second semiconductor die are in contact with corresponding metallization structures of the first semiconductor die., 'a second semiconductor die including22. The stack of semiconductor dies of claim 21 , wherein:the end portion ...
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