21-03-2019 дата публикации
Номер: US20190090358A1
Принадлежит:
An electrical assembly which has a multi-layer conformal coating on at least one surface of the electrical assembly, wherein each layer of the multi-layer coating is obtainable by plasma deposition of a precursor mixture comprising (a) one or more organosilicon compounds, (b) optionally O, NO, NO, H, NH, N, SiFand/or hexafluoropropylene (HFP), and (c) optionally He, Ar and/or Kr. The chemistry of the resulting plasma-deposited material chemistry can be described by the general formula: SiOHCFN. The properties of the conformal coating are tailored by tuning the values of x, y, z, a and b. 120.-. (canceled)21. An electrical assembly which has a multi-layer conformal coating on at least one surface of the electrical assembly , wherein the multi-layer conformal coating is obtained by:{'sub': 2', '2', '2, 'contacting the electrical assembly with a first precursor mixture comprising at least one organosilicon compound, under plasma deposition conditions suitable to form a first layer of the multi-layer conformal coating in contact with the electrical assembly, wherein the first layer is organic and hydrophobic, and wherein the first precursor mixture contains no, or substantially no, O, NO or NO; and'}{'sub': 2', '2', '2, 'contacting the electrical assembly with a second precursor mixture comprising at least one organosilicon compound, under plasma deposition conditions suitable to form a second layer of the multi-layer conformal coating, wherein the second layer is organic and hydrophobic, and wherein the second precursor mixture contains no, or substantially no, O, NO or NO.'}22. The electrical assembly according to claim 21 , wherein the multi-layer conformal coating has two to ten layers.23. The electrical assembly according to claim 21 , wherein the plasma deposition is plasma enhanced chemical vapour deposition (PECVD).24. The electrical assembly according to claim 21 , wherein the plasma deposition occurs at a pressure of 0.001 to 10 mbar.25. The electrical ...
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