03-02-2017 дата публикации
Номер: KR1020170012747A
Принадлежит:
The present invention relates to a deflector for a particle beam mass analyzer, which changes a direction of a particle beam, charged with positive ions, to a detector side, and in which only a plate disposed in the front thereof is formed to have a mesh structure and two metal plates disposed in the rear thereof are formed not to have a mesh structure, thereby enabling a homogeneous electric field to be generated. For this purpose, according to the present invention, the deflector for a particle beam mass analyzer, which is disposed on a rear side of a particle charging unit in a particle beam mass analyzer and which generates an electric field so that a propagation path of charged particles can be changed, comprises: a first plate which has a porous mesh form; a second plate which is spaced apart from the first plate by a predetermined distance, and which is made of a metal film; and a third plate which is spaced apart from the second metal plate by a predetermined distance so that the ...
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