26-03-2020 дата публикации
Номер: US20200094375A1
Принадлежит:
A pad conditioning disk configured to condition a polishing pad of a chemical mechanical polishing tool including a plurality of zones comprising cutting elements that selectively engage the polishing pad based on a positioning of the plurality of zones, is provided. An associated chemical mechanical polishing (CMP) tool and method for conditioning a polishing pad during a chemical mechanical polishing process is also provided. 1. A pad conditioning disk configured to condition a polishing pad of a chemical mechanical polishing tool , comprising:a plurality of zones comprising cutting elements that selectively engage the polishing pad based on a positioning of the plurality of zones.2. The pad condition disk of claim 1 , wherein the plurality of zones are moveable with respect to each other.3. The pad condition disk of claim 1 , wherein the plurality of zones are moveable with respect to each other so that cutting elements of a first zone of the plurality of zones engage the polishing pad during a chemical mechanical polishing process while cutting elements of a second zone of the plurality of zones do not engage the polishing pad.4. The pad conditioning disk of claim 1 , wherein the cutting elements are diamonds or diamond-like films of a same or a different shape claim 1 , size claim 1 , distribution claim 1 , density claim 1 , and/or configuration.5. The pad conditioning disk of claim 1 , wherein at least one cutting element is a brush.6. The pad conditioning disk of claim 1 , wherein a first zone of the plurality of zones comprise grit diamonds of a certain shape claim 1 , size claim 1 , distribution and density claim 1 , and a second zone of the plurality of zones comprises chemical vapor deposition (CVD) diamond film coated on a textured surface.7. The pad conditioning disk of claim 1 , wherein the pad conditioning disk is connected to a pad conditioner arm of the chemical mechanical polishing tool by a moveable connector claim 1 , and an actuator facilitates ...
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