Microfabrication tool pedestal and method of use
Опубликовано: 01-07-2004
Автор(ы): William D Strabel Iii
Принадлежит: Kinetic Systems Inc
Реферат: The present invention relates to equipment for supporting microfabrication tools, and in particular, to microfabrication tool pedestals including adjustable supports. According to one embodiment of the present invention, a pedestal (10) for a microfabrication tool is provided. The pedestal includes a frame constructed and arranged to support the microfabrication tool and a plurality of supports (30) movable along and connected to the frame. According to another embodiment of the present invention, a method of providing a supporting for a microfabrication tool is provided. The method includes providing a pedestal comprising a frame constructed and arranged to support the microfabrication tool and a plurality of supports connected to the frame, and laterally repositioning the supports relative to the frame.
Microfabrication tool pedestal and method of use
Номер патента: WO2004038275A1. Автор: William D. Strabel, Iii. Владелец: Kinetic Systems, Inc.. Дата публикации: 2004-05-06.