Pure dry gas generator - providing steady controllable flow from reservoir of liq
Номер патента: FR2125683A5
Опубликовано: 29-09-1972
Автор(ы):
Принадлежит: Societe Europeenne de Semi Conducteurs de Microelectronique SA SESCOSEM
Опубликовано: 29-09-1972
Автор(ы):
Принадлежит: Societe Europeenne de Semi Conducteurs de Microelectronique SA SESCOSEM
Реферат: A steady stream of high purity gas, e.g. for use in semi-conductor processing, contng. 10-8 p.b.w. of water, from a standard industrial reservoir (e.g. type C25), contng. unrefined commercial gas esp. N2, is produced by providing an outlet pipe of stainless steel (which may be sheathed in copper) dipping below the surface of the liq. gas, so that solid impurities, floating or sedimented, are eliminated. Outlet pipe transfers heat of evaporation by conduction, and has a valve to regulate gas flow. Pressure in reservoir is controlled, pref. by a relief valve operating at a preset pressure level. No supplementary cryogenic or chemical traps are necessary, and short connecting pipes with low dead space may be used.
Gas generating systems with multi-rate charging feature
Номер патента: CA2347323A1. Автор: Tuan Q. Cao. Владелец: Litton Systems Inc. Дата публикации: 2001-11-16.