Sputtered Piezoelectric Material
Номер патента: US20120177815A1. Автор: Jeffrey Birkmeyer, Youming Li. Владелец: Fujifilm Corp. Дата публикации: 12-07-2012.Piezoelectric actuators having a composition of Pb 1.00+x (Zr 0.52 Ti 0.48 ) 1.00−y O 3 Nb y , where x>−0.02 and y>0 are described. The piezoelectric material can have a Perovskite, which can enable good bending action when a bias is applied across the actuator.