Nozzle tip adaptor, nozzle assembly and nozzle

The invention relates to a nozzle tip adapter for mounting a nozzle tip to a substrate processing apparatus, a nozzle assembly for a substrate processing apparatus and a nozzle for supplying a liquid to a substrate.

With known substrate processing devices for nano-- and it is necessary microfabrication, to give a liquid onto the substrate. The substrate can be a wafer or the like. The fluid may be developer, water, solvent or aqueous solution is supplied to the substrate via a nozzle and any. The liquid is supplied over a defined delivery period usually, so that a predetermined amount of liquid is dispensed. A radical of the liquid at the end of the delivery period but remains in the nozzle and uncontrolled manner on the substrate in a dripping.

In substrate processing devices of the prior art it is known, to prevent a drop of nozzle according to one delivery period, the liquid flow is reversed by, retract excess liquid from the nozzle.

This procedure due to air bubbles and the like can but a drop in the liquid not be completely prevented.

It is therefore the task of the invention to provide prevents, a nozzle tip adaptor, a nozzle arrangement and a nozzle for a substrate processing apparatus, the reliable a drop, after the liquid has been dispensed.

For this purpose a nozzle tip adapter for mounting a nozzle tip is provided at a substrate processing apparatus, comprising a suction channel, a supply channel and a basic body with a device end and a substrate end, wherein the suction channel and the supply channel are arranged in the base body. The base body has a recess at its nozzle tip substrate end for receiving the nozzle tip and a projecting portion, extending into the nozzle tip recess, wherein the suction channel extends through the projecting portion and the feed channel opens into the nozzle tip recess, wherein the suction channel is at least partially surrounded by the supply channel.

The substrate may be an uncoated substrate, such as a wafer, or can be a coated substrate. For example the liquid is developer, solvent, water or an aqueous solution. The substrate processing apparatus can be a nano-device for further - and microfabrication.

the direction of the general context of this invention "downstream" cm does flow of liquid, i.e. from device end towards the substrate end or towards the substrate itself. The axial direction of the nozzle tip adapter also extends in the downstream direction.

The substrate end and the device end can lie opposite each other.

For example the projecting portion has a needle shape or forms a hollow needle. Further can be provided with a thread for receiving a nozzle tip the nozzle tip recess.

The diameter of the suction channel and further may be between 0.7 and 4.0 mm of the projecting portion.

By providing two different channels of the channels of the nozzle tip adapter can be used therefor, the nozzle supplying the liquid, while the other channel can be used therefor, divert excess liquid as liquid delivery period from the opening of a nozzle tip. The projecting portion allows, the two channels that merge into one another very near the opening of the nozzle, such that any liquid can be deflected between the opening and the point, on the channels merge into one another, away from the nozzle. In other words, it is achieved a very reliable drip prevention.

The basic body and the projecting portion are fixedly secured together.

More precisely the basic body and the projecting portion are integrally formed.

This simplifies the handling of the nozzle tip adapter.

For example the suction channel extends through the axial length of the projecting portion and opens at the downstream end of the projecting portion. In this way the suction conduit and the delivery conduit go as far as possible into one another downstream.

So that the projecting portion can extend into the nozzle tip as far as possible the projecting portion can, extend in an axial direction of the basic body by the nozzle tip recess and with its downstream end of the nozzle tip recess may project. In this case is the downstream end of the most downstream portion of the nozzle tip projecting portion of the adapter.

In one embodiment of the invention the basic body comprises a device projection on the device end for securing the nozzle tip adapter to the substrate processing apparatus. The projection device may be provided with a thread. In this way the nozzle tip adapter is mounted between the nozzle tip and the substrate processing apparatus easily.

More specifically the nozzle tip recess and the device have the same size and/or a projection complementary shape. In this way can be ensured, that the nozzle tip adapter between the nozzle tip and the device can be mounted without changes to the nozzle tip or the device.

In another embodiment of the nozzle tip adapter has a suction ports, preferably on the peripheral surface or on the device end of the base member, and the suction channel is based on the suction ports. The nozzle has an inlet ports further, preferably on the peripheral surface or on the device end, and the feed channel is based on the inlet ports.

The peripheral surface is the surface between the two ends of the base body, and the feed channel may extend through the projection device. The suction ports further can be provided with a thread or a clutch. By providing a suction port excess liquid, could drop from the nozzle can, easily diverted away from the nozzle outlet. For example the inlet ports may be arranged on the device end, and the suction ports may be arranged on the circumferential surface, or vice versa. It is also possible, that both the suction port as the inlet ports are also arranged in the same surface of the base body, for example the peripheral surface or the end face of the device end.

The invention further provides a nozzle tip assembly for a substrate processing apparatus, comprising a nozzle tip adapter according to the invention and a nozzle tip. The nozzle tip comprises a nozzle body with a connecting end and an outlet end, a mounting projection, disposed on the connecting end, a liquid chamber, which is open in the direction of the connecting end and extending at least in the mounting projection into, and an outlet, the outlet end and with the liquid chamber has an opening at the preferably in flow communication, at the downstream end of the fluid chamber.

The mounting projection of the nozzle tip is received in the nozzle tip recess at the nozzle tip adaptor, wherein the projecting portion of the nozzle tip adapter extends into the liquid chamber of the nozzle tip. The nozzle tip can be a puddles - or a spray nozzle, in particular a fan spray nozzle. The nozzle assembly provides a channel for supplying the liquid and a further channel away for diverting the liquid from the liquid chamber and from the outlet prepared. In this way the liquid chamber on the substrate that fluid from the outlet or dropping, after a discharge period has ended can be prevented, .

For example the feed channel of the nozzle tip into the adapter opening to the liquid chamber, and the upstream end of the nozzle tip into the liquid chamber and/or the suction channel opens into the liquid chamber at the downstream end of the projecting portion adapter. In other words, the suction conduit and the delivery conduit at the downstream end of the projecting portion near the downstream end of the go over into the other liquid chamber, according to one delivery period to divert any liquid in a controlled manner reliably away from the nozzle.

In one embodiment the outlet has a diameter, wherein the distance between the downstream end of the projecting portion and the opening is at least 0.5 times the diameter of the outlet. For example the distance 5 times the diameter of the outlet is at maximum, preferably between 1 - 3 times the diameter of the and the. In this way the distance between the downstream end of the projecting portion and the opening is small enough, to ensure, that the entire liquid is diverted in the other channel in the outlet.

For improved performance in the projecting portion of the outlet and the suction channel are coaxial.

In a variation between the peripheral edge of the projecting portion of the nozzle tip a channel adapter and the inner walls of the liquid chamber is formed, and the feed channel opens into the channel of the nozzle tip adapter. The channel width between 0.25 mm and 1.0 mm and may have a may be an extension of the supply passage. In this way the feed channel is formed with minimal material usage.

For further improving the performance of the channel and the suction channel at the downstream end of the liquid chamber go via interleaved.

The invention provides further a nozzle for supplying a liquid to a substrate, comprising a main body having a device end and an outlet end, wherein the main body comprising: a suction channel, a supply channel, a liquid chamber, the sections of the feed channel forms, an outlet, having a smaller diameter than the liquid chamber, an opening at the outlet end and in fluid communication with the liquid chamber, preferably at the downstream end of the liquid chamber, and a projecting portion, extending into the liquid chamber. The suction channel extends through the projecting portion and opens into the liquid chamber at the downstream end of the liquid chamber and is connected to the supply channel upstream of the outlet with one another. The suction channel is at least partially surrounded by the supply channel.

The suction channel can extend through the axial length of the projecting portion at the downstream end of the projecting portion and can open. In this way the suction conduit and the delivery conduit go as far as possible into one another downstream.

The main body and the projecting portion are fixedly secured together.

More specifically the main body and the projecting portion are integrally formed.

The simplifies the handling of the nozzle.

For example the apparatus main body includes a projection on the device end for securing said nozzle to a substrate processing apparatus. The projection device may be provided with a thread. In this way the nozzle tip adapter is mounted between the nozzle tip and the substrate processing apparatus easily. The projection device may be provided with a thread.

In one embodiment of the invention the nozzle has a suction ports, preferably on the peripheral surface or the device end of the main body, and the suction channel is based on the suction ports. The nozzle also has an inlet ports, preferably on the peripheral surface or on the device end, and the feed channel is based on the inlet ports. The peripheral surface extending between the two ends of the main body. The feed channel may extend through the projection device. The suction ports further can be provided with a thread or a clutch. By providing a suction port in the nozzle outlet excess liquid, the dripping from the nozzle can, be easily deflected. For example the inlet ports may be arranged on the device end, and the suction ports may be arranged on the circumferential surface, or vice versa. It is also possible, that both the suction port as the inlet ports are also disposed on the same surface of the base body, for example the peripheral surface or the end face of the device end.

The distance between the downstream end of the projecting portion in a variation and the opening is at least 0.5 times the diameter of the outlet. For example the distance 5 times the diameter of the outlet is at maximum, preferably between 1 - 3 times the diameter of the and the. In this way the distance between the downstream end of the projecting portion and the opening is small enough, to ensure, that the entire liquid is diverted in the other channel in the outlet.

For improved performance in the projecting portion of the outlet and the suction channel are coaxial.

In another embodiment a channel between the peripheral edge of the projecting portion and the inner walls of the liquid chamber is formed. The channel between 0.25 mm and 1.0 mm may have a width. In other words, the space, required for providing the channel can, are minimized.

Further features and advantages of the invention emerge from the following description of the embodiments and the attached drawings, the reference is referred to. In the drawings the following is represented:

Figure 1 shows a cross-section of a nozzle tip assembly according to a first embodiment of the invention with a nozzle tip according to a first embodiment of the invention the adapter

Figure 2 shows a cross-section of the nozzle tip adapter of Figure 1,

Figure 3 shows a cross-section of the nozzle tip adapter of Figure 1 along line other III-III,

Figure 4 shows a nozzle according to another embodiment of the invention in a cross section,

Figure 5 shows a cross-section of a nozzle tip assembly according to a second embodiment of the invention with a nozzle tip according to a second embodiment of the invention the adapter

Figure 6 shows a cross-section of the nozzle tip adapter of Figure 5,

Figure 7 shows a cross-section of the nozzle tip adapter of Figure 5 along line other VII and VII, and

Figure 8 shows a nozzle according to another embodiment of the invention in a cross section.

Figure 1 shows a nozzle assembly 10, the adapter comprising a nozzle tip 12 and a nozzle tip 14.

The nozzle assembly 10 can be mounted in a substrate processing apparatus for dispensing liquid onto a substrate, such as a wafer, . The substrate processing apparatus can be a device for nano-- and microfabrication.

The nozzle tip 14 is a standard nozzle tip and a spray nozzle is, as a fan spray nozzle, shown in the first embodiment.

The nozzle tip 12 is shown in Figure 2 also comprises a base body and the adapter 16, the consisting of for example a plastic material. The basic body 16 can be produced by injection molding or 3d printing.

The basic body 16 has a device end 18 and an opposite substrate end 20 and a peripheral surface 22, extending between the device end 18 and the substrate end 20. The liquid flows from the device end 18 to the substrate end 20. Hereinafter the "downstream" direction is the direction of the device end for writing to the substrate end 18 by the nozzle tip 20 and further 14 used. In other words, "upstream" describes the opposite direction. The downstream direction agrees with the axial direction of the nozzle tip and the nozzle tip adapter 12 14 agree.

At the device end 18 of body 16 is provided with a projection device 24, which is provided on its radially outer surface with a thread.

At the substrate end a nozzle tip recess 26 is formed in the base body 20 16, having threaded walls.

The size of the device 24 and the size of the nozzle tip recess 26 are the same projection, which means, that the device could be threaded into the nozzle tip recess 26 24 projection. The size can be chosen, mate with standard substrate processing devices or standard nozzle tip 14. In other words, the nozzle tip adaptor 12 can easily be inserted into known devices between the substrate processing apparatus and a nozzle tip.

A bore 28 extends from the device end 18 by the device 24 in the nozzle tip in the longitudinal recess 26 - projection or axial direction of the basic body 16.

The upstream end of the bore 28, i.e. at its end device end 18, an inlet ports 29 forms. The inlet ports may be the receiving socket 29 provided with thread or a clutch. But it is also possible, that the inflow ports 29 is a hollow projection with an external thread or the connector forms a coupling. The inlet port is adapted in each case 29 therefor, to be connected to the substrate processing apparatus.

The adjacent portion of the bore 28, projection 24 extending through the device, forms a supply channel 36.

Further the base body 16 comprises a projecting portion 30, extending partially in the bore 28 in the axial direction of the basic body 16 and further into the nozzle tip 26 extends into the recess. The projecting portion 30 extending along the center axis of the bore 28, as shown in Figure 3, and is supported on the side wall of the bore 28.

The main body 16 and the projecting portion 30 are integrally formed and are fixed immovably together therefore.

The projecting portion 30 has a needle shape or is a hollow needle, nozzle tip recess 26 projecting through the through.

The projecting portion 30 extends further in the axial direction completely through the nozzle tip recess 26 and is projected from the nozzle tip recess 26 with a downstream end. In other words, the downstream end of the projecting portion 30 of the most downstream portion of the nozzle tip adapter 12 is.

At the peripheral surface 22 of the base body 16, in particular downstream the device projection 24, a suction port is arranged 32.

In the embodiment shown the suction ports 32 is formed as a recess, which extends radially inwardly. The recess can be provided with a thread or a coupling the receiving socket. But it is also possible, that the suction ports 32 is a hollow projection with an external thread or the connector forms a coupling. The suction port is adapted in each case 32 therefor, to be connected by means of a casing or the like with a vacuum pump or other low pressure source.

A suction channel 34 starts from the suction ports 32. The suction channel 34 extends in the downstream direction completely through the projecting portion 30 at the downstream end of the projecting portion 30 and opens.

The diameter of the suction channel 34 and of the projecting portion 30 may be between 0.7 mm and 4.0 mm.

The feed channel 36 is formed as part of the bore 28 in the region of the projecting portion 30.

The feed channel opens into the nozzle tip recess 26 at the upstream end 36 of the nozzle tip recess 26 and surrounds the projecting portion 30 and therefore the suction channel 34.

In other words, the suction channel 34 and the feed channel 36 are coaxial with one another.

In the shown in Figures 1 to 4 is the inlet port of the first embodiment shown 29 18 of the main body device end 16, for example at the end face of the jig end 18, and the suction ports 22 of the main body 32 is located on the peripheral surface 16.

We turn now from the nozzle tip 14, as shown in Figure 1. The nozzle tip 14 comprises a nozzle body 44, wherein a connecting end 46 facing the nozzle tip adaptor 12 and an outlet end is the downstream end of the nozzle tip and the nozzle assembly 14 48 10.

The nozzle body 44 can also be made of a plastic material and can be produced for example by injection molding or 3d printing.

The nozzle body comprises a mounting projection 50 44, 46 disposed on the connecting end and which can be arranged in the nozzle tip recess 26 of the nozzle tip adapter 12. To this end the mounting projection 50 can be provided with a thread.

A liquid chamber extends downstream from the junction end 46 in the mounting projection 50. Another channel, further referred to as outlet 54 extends, from the downstream end of the fluid chamber 52 to the outlet end 48 and opens at the outlet end 48, thereby forming an opening 56 is formed.

The liquid chamber 52 and the opening 56 are coaxial with each other and coaxial with the suction channel 34 and the supply channel 36 of the nozzle tip adapter 12. The diameter d of the outlet 54 is smaller than the diameter d of the liquid chamber 52, but can be greater than the diameter of the suction channel 34 and/or of the projecting portion 30.

The nozzle tip 14 is inserted in the recess 26 and the nozzle tip 50 Conventionon mounting projection nozzle tip adaptor 12.

In the shown in Figure 1 engaged position of the projecting portion of the nozzle tip adapter 30 extends into the compartment 12 52 14 of the nozzle tip.

Due to its length of the projecting portion 30 extends through most of the liquid chamber 52 in the downstream direction and terminates in a distance a from the opening 56 and the outlet end 48 of the nozzle tip 14.

The distance a is the distance between the downstream end of the projecting portion 30 thus 56 and the opening, i.e. the downstream end of the nozzle tip, and is at least 0.5 times the diameter of the outlet 54. The distance a is at maximum 5 times the diameter of the outlet and is preferably between 3 times the diameter of the outlet 1 a and the 54.

Because of the projecting portion 30 is formed between the outer walls of the projecting portion 30 and a channel 58 the inner walls of the fluid chamber 52.

The channel 58 around the protruding portion 30 is therefore an annular channel around the outer wall of the projecting portion 30 and has a width W of the inner wall of the liquid chamber to 52. The width is between 0.25 mm and 1.00 mm for example.

The feed channel 36 of the nozzle tip adapter 12 opens in the liquid chamber 52 on the upstream end of the fluid chamber 52. More specifically, the feed channel 36 opens into the channel 58. Therefore the channel 58 can be seen as an extension of the supply passage 36.

In other words, both the suction channel 34 and the feed channel opening in the fluid chamber 36 52. Due to the length of the projecting portion 30 of the suction channel and the supply channel 34 52 36 at the downstream end of the liquid chamber at the downstream end and go of the projecting portion 30 into one another.

During the operation of the nozzle tip 12 is installed on the device projection 24 of the nozzle tip adaptor adapter (not shown) 12 in a substrate processing apparatus. The inlet port is connected to adapter 29 of the nozzle tip 12 here with a channel in the substrate processing apparatus, which conveys the liquid, to be discharged onto the substrate.

The substrate an uncoated substrate, such as a wafer, or a coated substrate may be already. The liquid may be a developer, a solvent, water or any other aqueous solution. For example the substrate is a wafer, coated with a photosensitive resin, was already exposed, and the liquid is a developer for the exposed resin.

The suction ports 32 is connected by a suitable conduit (not shown) with a low pressure source, such as a vacuum pump, a vacuum can be applied to the suction channel 34 that.

The liquid is then applied over the duration of a defined delivery period.

The liquid is conducted from the substrate processing apparatus to inlet ports 29, flows through the supply channel 52 and the liquid chamber through the outlet 36 into the channel 58 54, where it is released through the opening 56 in the direction of the substrate (not shown). During the dispensing period the low pressure source is deactivated.

As soon as the supply of liquid has stopped, i.e. at the end of a delivery period or shortly thereafter, the low pressure source is activated. In other words, low pressure or a vacuum is applied to the suction ports 32.

The liquid by applying a vacuum, the 54 in the outlet and in the compartment 52 remains, passed into the suction channel and through the nozzle tip 34 sucked away the adapter from the nozzle tip 14 is 12. In other words, it does not have the liquid in the outlet 54, the substrate might drop unchecked.

The low pressure source may be permanently during active periods, where no liquid is dispensed onto the substrate, to divert any liquid, the nozzle tip adaptor 12 may unwittingly by the flow towards the outlet 54.

In other words, due to the short distance between the downstream end of the projecting portion 30, i.e. the point, at which the suction channel 34 and the feed channel 36 can merge a drop with certainty, be prevented.

Figures 4 to 8 show different embodiments of the invention, as shown in Figure 1 are substantially the same the nozzle tip adaptor 12th therefore be identical parts or parts with the same function using the like reference symbols described, and only the differences are hereinafter described.

Figure 4 shows a nozzle 60, a one-piece version of the nozzle tip adapter 12 substantially.

The nozzle 62 has a main body 60, than the basic body 16 is made of the nozzle tip 12 and the nozzle body of the nozzle tip 14 from a single adapter 44 conceivable part.

In other words, the main body 62 and the nozzle body 16 of the base body comprises all features 44, have been described above, but without the nozzle tip recess 26, the mounting projection 50, the substrate end 46 and the connecting end 20.

Of course the main body 62 and the outlet end 18 comprises only the device end 48.

The main body 62 and the projecting portion 30 are immovably secured together therefore. More specifically, the main body 62 and the projecting portion 30 are integrally formed.

The liquid chamber 28 is an extension of the bore 52 further.

The main body 62 can also be made of a plastic material and can be produced for example by injecting or 3d printing.

Figures 5 to 7 show another embodiment of the nozzle assembly 10 and the nozzle tip adapter 12.

In contrast to the in Figures 1 to 3 the first embodiment of the suction port 32 and the positions have been shown inlet port 29 interchanged.

In this embodiment the projecting portion 30 does not assume the bore 28, but extends from the edge of the downstream opening of the bore 28. Accordingly the suction channel 34 the bore 28 extended, and the suction ports 32 is located at the device end 18 therefore.

The inlet ports at the peripheral surface 22 of the base body 29 is now the feed channel 36 is designed as a recess 64 16th, extending from said inlet ports radially inwardly around the protruding portion 30 extends around and 29.

An annular channel around the suction channel 34 is formed by the recess 64 of the supply passage 36 around already within the nozzle tip adapter 12.

The recess 64 of the supply passage 36 opens in the downstream direction in the nozzle tip 26 into recess.

In this embodiment the nozzle tip 14 is a Pfützendüse. A spray nozzle in this embodiment but could also just as in the first embodiment, as a fan spray nozzle, are used and vice versa. Any other standard nozzle tip 14 is also important for the nozzle tip adaptor 12 and the nozzle assembly 10 into question.

Figure 8 shows another embodiment of the invention, a one-piece version of the in Figures 5 to 7 is shown nozzle assembly 10.

As the nozzle of Figure 4 with respect to the nozzle arrangement of Figures 1 to 3 has a one-piece main body 60 of Figure 8 the nozzle 62, the characteristics of the base body and of the nozzle body 44 comprises almost all 16, with the exceptions, with respect to the embodiment of Figure 4 have been explained.

The embodiment of Figure 8 in the nozzle 60 but the design of the suction channel 36 of the supply passage 34 and the design of the embodiments of Figure 5, 6 and 7 follows.

It is furthermore possible in both embodiments, both the suction ports 32 and the inlet ports 29 that at the device end 18 of the body 16 are located.

For example said ports 29 could, be realized in the end surface of the jig end 32 both 18. Of said ports 29, 32 32, for example the suction ports, the inner side wall can also be arranged in the bore 28.