METHOD FOR CONSTANT CONCENTRATION EVAPORATION AND DEVICE USING THE SAME

PROBLEM TO BE SOLVED: To provide a device and method for evaporating metal-containing precursors for chemical vapor deposition (CVD) at a constant concentration.

SOLUTION: The device for constant concentration evaporation comprises: an evaporator 100 and a heat exchanger 304 being in fluid communication at a constant temperature with the evaporator having an outer casing 102 and an inner casing 110. The inner casing consists of a first conduit 210, a second conduit 214 which removes carrier fluid entrained with a precursor and a first precursor conduit 306 that is operative to introduce the precursor into the evaporator from the heat exchanger. The heat exchanger is disposed proximate to evaporator at a distance effective to supply a new precursor to the evaporator at the same temperature as that of the precursor in the evaporator, thus maintaining the precursor in the evaporator at a substantially constant temperature.

COPYRIGHT: (C)2011,JPO&INPIT