Sulfonium salt and polymer compound having polymerizable anion, resist material and pattern forming method

05-06-2013 дата публикации

Номер:

JP5201363B2

Автор: 剛金生, 正樹大橋, 洋一大澤, 畠山　　潤, 誠一郎橘

Принадлежит: Shin Etsu Chemical Co Ltd

Контакты:

Номер заявки:

Дата заявки:

CPC - классификация

C C0 C07 C07C C07C2 C07C26 C07C260 C07C2601 C07C2601/C07C2601/1 C07C2601/14 C07C2602 C07C2602/C07C2602/4 C07C2602/42 C07C2603 C07C2603/C07C2603/7 C07C2603/74 C07C3 C07C30 C07C309 C07C309/C07C309/1 C07C309/12 C07C38 C07C381 C07C381/C07C381/1 C07C381/12 C07D C07D4 C07D49 C07D493 C07D493/C07D493/0 C07D493/08 C07D493/1 C07D493/18 C08 C08F C08F2 C08F20 C08F20/C08F20/2 C08F20/22 C08F20/3 C08F20/36 C08F20/38 C08F28 C08F28/C08F28/0 C08F28/02 G G0 G03 G03F G03F7 G03F7/G03F7/0 G03F7/00 G03F7/004 G03F7/0045 G03F7/0046 G03F7/03 G03F7/039 G03F7/0395 G03F7/0397 Y Y1 Y10 Y10S Y10S4 Y10S43 Y10S430 Y10S430/Y10S430/1 Y10S430/10 Y10S430/108 Y10S430/11 Y10S430/111 Y10S430/12 Y10S430/122 Y10S430/124 Y10S430/126 Y10S430/14 Y10S430/143

IPC - классификация

C C0 C07 C07C C07C3 C07C38 C07C381 C07C381/C07C381/1 C07C381/12 G G0 G03 G03F G03F7 G03F7/G03F7/0 G03F7/00 G03F7/004 G03F7/0046 G03F7/03 G03F7/039 G03F7/0392

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