High aspect ratio microstructure and method of fabricating the same and high aspect ratio microstructure array and method of fabricating the same

23-02-2011 дата публикации

Номер:

KR101016007B1

Автор: 이석우, 이승섭, 이정아

Принадлежит: 한국과학기술원

Контакты:

Номер заявки:

Дата заявки:

CPC - классификация

B B8 B81 B81B B81B2 B81B22 B81B220 B81B2203 B81B2203/B81B2203/0 B81B2203/03 B81B2203/036 B81B2203/0361 B81B2207 B81B2207/B81B2207/0 B81B2207/05 B81B2207/056 B81C B81C1 B81C1/B81C1/0 B81C1/00 B81C1/001 B81C1/0011 B81C1/00111 B81C2 B81C22 B81C220 B81C2201 B81C2201/B81C2201/0 B81C2201/01 B81C2201/015 B81C2201/0159 B82 B82B B82B3 B82B3/B82B3/0 B82B3/00 B82Y B82Y4 B82Y40 B82Y40/B82Y40/0 B82Y40/00 G G0 G03 G03F G03F7 G03F7/G03F7/0 G03F7/00 G03F7/2 G03F7/20 G03F7/201 G03F7/2014

IPC - классификация

B B8 B82 B82Y B82Y2 B82Y25 B82Y25/B82Y25/0 B82Y25/00 B82Y3 B82Y30 B82Y30/B82Y30/0 B82Y30/00 G G0 G03 G03F G03F1 G03F1/G03F1/2 G03F1/24

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