IMAGE SENSOR AND ELECTRONIC DEVICE INCLUDING SAME

19-01-2018 дата публикации
Номер:
KR1020180006704A
Принадлежит:
Контакты:
Номер заявки: 00-16-102087401
Дата заявки: 11-07-2016

[1]

Image sensor and electronic device including the same are disclosed.

[2]

Digital camera, lens for, PC camera, camcorder with by a camera Image sensor is used and a storing electrical signals, Image sensor light incident resolved first and each component into an electric signal converter.

[3]

A method capable of day Image sensor etc. is required. Recently, in order to reduce the size of Image sensor Image sensor etc. inside the laminated structure. The laminated structure of the existing method when delivery of light sensing elements form the sensor Image charges accumulated in each element must be optimized arrangement of Image sensor scheme should shift.

[4]

Certain embodiments include pixel numbers the sensitivity of the pixel rubbed novel laminate structure comprising the DC Image sensor number [...] substrate.

[5]

Other embodiments of odd pixels electrically, improved optical crosstalk Image sensor number [...] substrate.

[6]

In another embodiment Image sensor with improved fill factor number [...] substrate.

[7]

According to an exemplary embodiment, the pixel electrodes including in Image sensor,

[8]

Said pixel light sensing elements number 1, number 2 and number 3 may be formed by optical sensing device 3 is light sensing elements are sequentially stacked optical sensing element structure, said 3 extended from said number 1 may be formed by light sensing elements formed over the read circuit forming face is connected to the light sensing elements said number 1 through via transferring said read circuit charge of light sensing elements, and said read circuit to charge said number 2 light sensing elements transferred along the vertical transfer plower number, said through via and said 3 may be formed by an outer circumferential surface of said vertical transmission gate consisting of light sensing elements arranged in a light receiving region, said vertical transfer gates are in the form of either L-shaped or through via and 1 disposed thereon.

[9]

According to another embodiment, the pixel electrodes including in Image sensor, said pixel light sensing elements number 1, number 2 and number 3 may be formed by optical sensing device 3 is light sensing elements are sequentially stacked optical sensing element structure, said 3 extended from said number 1 may be formed by light sensing elements formed over the read circuit forming face is connected to the light sensing elements transferring said read circuit charge of the light sensing elements said number 1 number 1 through via, and said read circuit forming face extended from said number 2 number 2 through via and said read circuit to transfer the charge of light sensing elements, said number 1 through via and said 3 may be formed by an outer circumferential surface of the through via said number 2 consisting of light sensing elements arranged in a light receiving region, said number 1 in the form of L-shaped or 1 through via and said number 2 through via respectively one-shaped disposed thereon.

[10]

According to another embodiment, the pixel electrodes including in Image sensor, said pixel light sensing elements number 1, number 2 and number 3 may be formed by optical sensing device 3 is light sensing elements are sequentially stacked optical sensing element structure, said 3 extended from said number 1 may be formed by light sensing elements formed over the read circuit forming face is connected to said circuit for delivering a charge of light sensing elements sensing elements said number 1 through via, said read circuit to said number 2 and number plower delivered charge light sensing elements along the vertical transmission, said insulation and said vertical transmission through via the inner wall of upper channel the pixels adjacent to each is electrically isolation encoded.

[11]

According to another embodiment, the pixel electrodes including in Image sensor, said pixel light sensing elements number 1, number 2 and number 3 may be formed by optical sensing device 3 is light sensing elements are sequentially stacked optical sensing element structure, said 3 extended from said number 1 may be formed by light sensing elements formed over the read circuit forming face is connected to the light sensing elements transferring said read circuit charge of the light sensing elements said number 1 number 1 through via, and said read circuit forming face extended from said number 2 number 2 through via and said read circuit to transfer the charge of light sensing elements, said number 1 through via the inner wall adjacent said insulation layer is polished through via and said number 2 formed by encoded pixel is electrically isolation

[12]

Image sensor pixel numbers of the photo-sensing element structure laminated structure by implementing the DC rubbed the sensitivity of the pixel Image sensor number can be [...] novel laminated structure.

[13]

Through via vertical transmission gate or a plurality of through vias formed using deep trench isolation method and, an amorphous silicon layer for shielding light from the inner wall surface of the insulating layer is formed to expansion by removing material being interposed between the light each pixel constituting a pixel number billion optical cross talk between pixels of charge flow adjacent electrical crosstalk can be billion accuracy of difference number are guaranteed.

[14]

Through via vertical transmission gate or a plurality of through via outer peripheral surface a light receiving region deep trench isolation function of increasing an occupying area cross arranged light receiving region can be can be to improve fill factor.

[15]

Figure 1 shows a schematic diagram of the Image processing device according to examples implementation on and, Figure 2 shows a device Image processing according to the pixel values of pixels equivalent circuit and also in one implementation, Figure 3 shows a cross-section also in one implementation according to Image sensor pixel represents, Figure 7 shows a 4 to 3 also illustrated Image sensor pixel layout also various representing, Figure 8 shows a cross-section of another pixel Image sensor according to embodiments represents, Figure 9 shows a pixel Image sensor according to another embodiments equivalent circuit that, Figure 10 shows a pixel Image sensor according to another embodiments also equivalent circuit that, 4 Image sensor pixel structure may be formed by light sensing elements is also 11a and 11b also including cross-sectional drawing representing, Figure 12 shows a cross-section of another pixel Image sensor according to embodiments and also counter charge well including, Figure 14 shows a layout of pixels representing 12 and 13 also also illustrated Image sensor, Image sensor pixel equivalent circuit diagram is also another implementations according to 15a and 15b also easy, Figure 16 shows a cross-section of Image sensor pixel represents also illustrated 15b also 15a and also, Figure 20 shows a 16 to 17 also illustrated Image sensor pixel values of pixels also 15a also to effectively achieve isolation represents layout, Equivalent circuit diagram according to another embodiments 21a and 21b also pixel Image sensor is also easy, Figure 22 shows a cross-section of Image sensor pixel 21a and 21b also exhibits also also illustrated.

[16]

Hereinafter, the embodiments detailed embodiment is hereinafter for the person with skill in the art in the art to to each other. However several different defined embodiments which can be embodied in the form does not taught herein, the present invention is defined with respect to a particular disclosure form be but is, all changing range of idea and techniques of the present invention, including the water to replacement should understood to evenly. Each drawing while similar references in a similar components are described used for substrate. In the attached drawing, the dimensions of the structures of the present invention can be higher than the virtualization of clarity or shown is reduced by reducing the thread number are disclosed.

[17]

The term used to account for example using only that particular embodiment, the present invention intending to be define is endured. It is apparent that a single representation of the differently in order not providing language translators, comprising plurality of representation. In the application, the term "comprising" or "having disclosed" specification of articles feature, number, step, operation, component, piece or specify a combination not present included, another aspect of one or more moveable number, step, operation, component, piece or a combination of pre-times the number should not understood to presence or additional possibility.

[18]

Not defined differently, scientific or technical terms so that all terms in the present invention thus is provided to the person with skill in the art is a device generally by the same meanings. Generally dictionary used for providing language translators such as defined terms have the meanings associated technology must be consistent semantics and having interprets, the application manifest in defined present for, or overly formal sense interpreted not ideal.

[19]

Figure 1 shows a device according to implementations of the present invention also Image processing (1) is the schematic diagram of the. Image processing device (1) includes a CMOS type Image sensor implementation being including device. Image processing device (1) comprises a plurality of pixels (12) b is arranged in a pixel region (11) and a peripheral circuit etc.. Image processing device (1) peripheral circuit vertical driving circuit (13), column processing circuit (14), a horizontal drive circuit (15), output circuit (16) and driving number the circuit (17) etc. with.

[20]

A vertical drive circuit (13) comprises a plurality of pixels (12) are successively selected row unit are disclosed. Column processing circuit (14) the vertical driving circuit (13) each pixel row selected by (12) pixel signals output with respect to the correlated double sampling (Correlated Double Sampling: CDS) embodiment processing are disclosed. Column processing circuit (14) is further provided by a CDS processing embodiment, extracting the signal level of a pixel, each pixel (12) light receiving amount according to pixel data are disclosed. A horizontal drive circuit (15) comprises a column processing circuit (14) is supported by the pixel data sequentially output circuit (16) quality by are disclosed. Output circuit (16) is for example input pixel data to generate a, an external signal processing circuit is outputted. Number driving circuitry (17) is further provided in a peripheral circuit for each block of the (vertical driving circuit (13), column processing circuit (14), a horizontal drive circuit (15) and output circuit (16)) driving plower number are disclosed.

[21]

Figure 2 shows a device according to implementations of the present invention also Image processing (1) pixel (12) of equivalent circuit are disclosed. Pixel (12) are each connected in parallel to the optical sensing element (PD1, PD2, PD3) 3 has disclosed. One of the optical sensing element (PD2, PD3) 2 formed on a silicon substrate and an inorganic optical sensing elements, optical sensing element 1 (PD1) is be a organic light sensing elements. 3 Optical sensing element (PD1, PD2, PD3) may also be used but is with each read circuit, 2 as also shown on the transfer transistor and a read circuit (readout circuit, 12A) (Tr12, Tr13) number [...] share Image processing device can be advantageous in maximizing the area of light receiving section. Read circuit (12A) extension (FD) which is connected to a reset transistor (Tr2) is on (Tr3) (Tr4) on selection transistor amplifying transistor having a predetermined wavelength. Transfer transistor (Tr12, Tr13) and reset transistor (Tr2) on selection transistor is n channel MOS transistor amplifying transistor (Tr4) on (Tr3) can be.

[22]

Each inorganic light sensing elements (PD2, PD3) to a photoelectric converter by excitation and charges accumulated (for example. , Electronic) corresponding to each transfer transistors (Tr12, Tr13) transmitted pulses of the gate and connected floating diffusion (FD) (Tr4) amplifying transistor given accumulated unit is transferred to the substrate. Organic light sensing elements (PD1) charges accumulated (for example. , Electronic) (FD) is the extension of the gate and connected to transistor amplifying transistor (Tr4) be directly connected thereto.

[23]

A reset transistor (Tr2) that a potential of the power line (VDD) is reached wherein motion estimation (FD) reset with each other. Selection transistor (Tr3) is read out circuit (12A) decodes the output pixel signals timing number. (Tr4) amplifying transistor comprises a source it sells the low style amplifier (PD1, PD2, PD3) constitutes the charge occurring in each light sensing elements according to the level of voltage outputs a pixel signal. The selected transistor amplifying transistor (Tr4) (Tr3) is reached (FD) amplifies the potential that a extension, its potential according to voltage outputs to column processing circuit (of Figure 1 14).

[24]

In Figure 2 inorganic light sensing elements formed on the upper won (PD2) represents the vertical transmission gate (VTG) gate (TR12), organic light sensing elements (PD1) lower won for charge transmission exhibits through via (TV). Hereinafter reference 3 and 4 and cross section structure also disposed to the end of these also through a browser substrate.

[25]

Figure 3 shows a cross-section according to one implementation of the present invention also exhibits Image sensor pixel. Figure 7 shows a 4 to 3 also presents various layouts also illustrated Image sensor pixel.

[26]

The reference also 3, recent pixel region (11) as well as integration of a unit pixel according to (12) is number 1 to number 3 (PD1, PD2, PD3) light sensing elements is 1.0 to light sensing elements may be formed by sequentially arranged 3.

[27]

3 Optical sensing device structure may be formed by Si substrate (101) 2 (PD2, PD3) stacked disposed on optical sensing element itself including organic light sensing elements (PD1) organic 0.001 selectivity by depositing JPO. The optical sensing device structure 3 may be formed by employing planar light sensing elements array pixel contrast can be increasing the number of the existing method. In addition delivers the desired pixel of the existing method than when integrated road can form a pixel with pixel can be can be to improve sensitivity. Organic light sensing elements for selectively absorbing a light of specified wavelength of visible light and converting the same apparatus and method for forming organic electronic material hereinafter since the number of output can be easily laminated structure.

[28]

3 Structure may be formed by employing the Image sensor includes an optical sensing device (101) read the surface (110) on the read circuit (115) is formed at the opposite light receiving region (125) disposed back-illuminated (BSI, Back provided Side Illumination) preferably formed as Image sensor. In addition to reading nonvolatile semiconductor memory for integrated optical pixel portion (115) by using a different wafer after, two wafer bonding can be formed in a laminated structure. In addition TSV (Through Silicon Via, TSV) wafer bonding method using multi layered in addition as well as vertical transfer are disclosed.

[29]

Different wafer after wafer bonding portion [...] pixel number there is a high pressure liquid coolant such as hereinafter TSV wafer handling for thermally processing and eliminate the need for a deep via hole...copyright 2001.

[30]

Organic light sensing elements (PD1, 130) is organic photoelectric conversion layer (132) and double-sided number 1 electrode (134) and number 2 electrode (136) comprises. Organic photoelectric conversion layer (132) is p type semiconductor and a n-type semiconductor can be, n-type semiconductor includes a pn p type semiconductor junction (pn junction) can be formed. Organic photoelectric conversion layer (132) for selectively absorbing certain wavelengths of visible light by the OLEDs (exciton) generated exciton formed holes serving as the common electrode and the electrons separated into separate electrode number 1 (134) to, electrons serving as a pixel electrode separated electrode number 2 (136) to move the photoelectric effect can then be mixed. The electrode number 1 (134) throughout a predetermined region over one or Image sensor directly connected to the electrode and, number 2 electrode (136) is patterned electrode separation pixel regions are disclosed.

[31]

500 Nm to 600 nm is in organic light sensing elements (PD1) maximum absorption wavelength (λMax ) Can absorb selectively green light with the photo-sensing element number 2 500 nm or more in less than about 400 nm when light sensing elements (PD2) maximum absorption wavelength (λMax ) Blank having blue light sensing elements and, substrate (101) rear (112) can be formed about approximately 1 micro m depth. Light sensing elements (PD3) exceeds maximum absorption wavelength in about about 600 nm 700 nm hereinafter number 3 (λMax ) Blank having red light sensing elements and, substrate (101) rear (112) can be formed about approximately 6 micro m depth. (PD1) green light organic light sensing elements for selectively absorbing a light sensing logic circuit can be applied to the mold as they are existing...copyright 2001.

[32]

The, change of logic circuit if available, light sensing elements can be arranged to be capable of absorbing order wavelength at short wavelengths. The, light sensing elements (PD1) light sensing elements and blue blank is number 1, number 2 is blank green light sensing elements and light sensing elements (PD2), (PD3) red number 3 is blank optical sensing device be a light sensing elements. In this case number 2 light sensing elements (PD2) substrate (101) rear (112) can be formed about approximately 3 micro m depth, light sensing elements (PD3) number 3 substrate (101) rear (112) can be formed about approximately 6 micro m depth.

[33]

Organic light sensing elements (PD1) of the charge read out circuit forming face (110) connected to extend from the organic light sensing elements (PD1) through via (140, TV) via a read circuit (115) delivers to. Through via (140) of the substrate (101) formed through the via hole (142) at the inner wall insulation (144) and the insulating layer (144) are formed on the via hole (142) as an layer (146) consists of the.

[34]

Through via (140) of the substrate (100) through organic light sensing elements (PD1) of pixel electrodes serving as a number 2 electrode (136) coupled with each other.

[35]

Light sensing elements (PD2) number 2 charge a vertical transfer transistor (Tr12) (FD) then transferred through the extension. Specifically vertical transmission transistor (Tr12) vertical transmission gate (150, VTG) substrate (101) is injected to the light sensing elements (PD2) number 2 on trench (152) inside walls and bottom surface of the gate insulating layer (154) on a gate insulating film (154) is formed on said trench (152) is embedded in a vertical transfer gate electrode (156) comprises. Vertical transmission gate electrode (156) when an on signal is applied to the vertical transfer gate electrode (156) on a gate insulating film (154) respectively via a substrate (101) (not shown) on the surface of the channel region formed therein. Channel regions of the light sensing elements (PD2) number 2 (not shown) along the charge transferred to the extension (FD).

[36]

According embodiment of the present invention, the pixels adjacent to the through via (140) insulating film (144) and vertical transmission gate (150) forming gate insulating layer (154) by deep trench isolation (DTI, Deep Trench Isolation) with each other. The pixels adjacent to effectively achieve isolation layer of various layout 4 to 7 also auditory canal illustrated the nanometer range.

[37]

With reference also to the 7 also 4, 3 (PD1, PD2, PD3) laminated stack of light sensing elements in a light receiving region (125) of the circumference of the through via (140) and vertical transmission gate (150) has a flat portion.

[38]

Figure 4 through via (140) and vertical transmission gate (150) is a light receiving region (125) exhibits an outer circumferential surface of each L-shaped pattern when the cover is disposed. Figure 5 through via (140) is shaped pattern 1 vertical transfer gate (150) is L-shaped pattern exhibits when the cover is disposed. Figure 6 through via (140) is L-shaped pattern vertical transmission gate (150) is shaped pattern exhibits 1 when the cover is disposed. Figure 7 through via (140) and vertical transmission gate (150) 1 shaped pattern exhibits both when the cover is disposed.

[39]

4 To 7 also as illustrated to also, a light receiving region (125) through via area 1/2 hereinafter the outer periphery surfaces (140) and vertical transmission gate (150) which is positioned terminals of a light receiving region (125) can be DTI between optimizing. Preferably a light receiving region (125) over the whole of the area of the outer circumferential surface of 1/2 through via (140) and vertical transmission gate (150) pixel of a light receiving region (125) between which a time in an effective DTI DTI can be achieve.

[40]

In addition, through via (140) and vertical transmission gate (150) receive region (125) by external to the light receiving region (125) of increasing an occupying area can be fill factor (fill factor) can be improve.

[41]

In addition, through via (140) and vertical transmission gate (150) can be designed so that a L-shaped ice maker are 1-shaped or can be improve fairness in addition.

[42]

Again, the reference again also 3, through via (140) constituting the insulating layer (144) and vertical (Tr12) formed on the gate insulating layer (154) substrate (101) rate than that of the materials comprising the optical crosstalk can be formed to improve. For example, a refractive index lower than the refractive index of silicon oxide, nitride and the like can be. In addition, insulating film (144) on a gate insulating film (154) formed of the same material can be formed simultaneously.

[43]

Through via (140) constituting the insulating layer (144) and vertical transmission gate insulating film (154) substrate (101) rate than that of the materials comprising the insulating layer surface, through via (140) and vertical transmission gate (150) incident into the light (100) (incidence angle) the critical angle (critical angle) at angles of incidence greater than the, due to total reflection (total reflection) through via (140) and vertical transmission gate (150) can be reflected. The, liquid crystal light from outside (100) can be the introduction, each pixel light to expansion (100) being interposed between the adjacent pixel block in, in addition optical crosstalk can be improved.

[44]

Through via (140) includes a conductive layer (146) and a gate electrode (156) includes a tungsten, aluminum, copper or doped silicon or metal doped silicon material can be used in combination.

[45]

Figure 8 shows a cross-section according to other embodiments of the present invention also exhibits Image sensor pixel. 8 Also reference surface, the light sensing elements (PD2) Image sensors also illustrated 3 with number 2 silicon substrate (101) is formed number 3 light sensing elements (PD3) an epitaxial layer (101E) in a transfer liquid. The, through via (140) is an epitaxial layer (101E) and the positive electrode (101) is formed through the, vertical transmission gate (150) are formed trench (152) is an epitaxial layer (101E) through the silicon substrate (101) extending up.

[46]

Epitaxial layer (101E) in - situ doped epitaxial crystal growth when forming process have a concentration distribution in the thickness direction by forming a potential process from inclination. The, transfer transistor (Tr12) of channels that are formed along the inclination potential, charge transfer transistors because the channel number of the fixed billion (Tr12) charge transferring characteristics can be improved.

[47]

Figure 9 shows a Image sensor pixel equivalent circuit according to other embodiments are disclosed.

[48]

The equivalent circuit diagram illustrated 2 on organic light sensing elements (PD1) also unlike charges accumulated in the extension by transmission transistor (Tr11) (FD) consists of a convenience to a user.

[49]

In which case organic light sensing elements (PD1) transfer transistors (Tr11) on connecting via is formed in the form of transfer transistors through via (TV, 140) (not shown) of the substrate (of Figure 3 101) read out circuit (Tr11) (of Figure 3 115) can be included in, wherein the read circuit forming face (of Figure 3 110) (FD) (of Figure 3 101) or epitaxial layer (of Figure 8 101E) can be formed on an underlying substrate

[50]

Figure 10 shows a Image sensor pixel equivalent circuit according to another embodiments also are disclosed.

[51]

Image sensor pixel number 1 (PD1) organic light sensing elements illustrated 2 also alternatively selectively sensing infrared radiation of infrared light sensing elements (PD (IR)) organic layer laminate structure further comprises light sensing elements 4 should difference in flow tides.

[52]

The, as illustrated also 11a to 11b and also through via (140a) and vertical transmission gate (150) organic light sensing elements (PD (IR)) in addition to the transmitting system for delivering additional charges accumulated through via (140b) further comprises.

[53]

Infrared detecting organic light sensing elements (PD (IR)) detecting infra-the organic photoelectric conversion layer (132b) and double-sided number 1 electrode (134b) on number 2 electrode (136b) comprising in addition through via (140b) is organic infrared light sensing elements (PD (IR)) of pixel electrodes serving as a number 2 electrode (136b) coupled with each other.

[54]

Number 2 11a also includes light sensing elements (PD2) number 3 (PD3) light sensing elements on a silicon substrate (101) to a moment when a light sensing elements (PD2) number 2 is also 11b both formed silicon substrate (101) number 3 to light sensing elements (PD3) is an epitaxial layer (101E) when formed and each.

[55]

Additional through via (140b) 11a as illustrated also includes a silicon substrate (101) and number 1 organic light sensing elements (130a) formed or through, to also 11b as illustrated, epitaxial layer (101E), silicon substrate (101) number 1 organic light sensing elements (130a) can be formed through.

[56]

Example layout but not separately, through via (140a), vertical transmission gate (150), further through via (140b) is also 4 to 7 also illustrated by deforming the light receiving region are arranged in a layout region hereinafter can be 1/2 the outer periphery surfaces.

[57]

The illustrated pixel structure 3 also to vertical transmission gate (150) according to the channel regions when the second electrode is connected with the corresponding pixel formed only but the pixels adjacent to each adjacent pixel can be generated even at 1.0 to draw charge can be. Thus, the pixels adjacent to each vertical transfer gate region (150) be between reflector each Internet Company. I.e., a light receiving region (125) nonaqueous lights other than (128) that could attract the interval or greater size of charge supplied without disconnection substrate.

[58]

While, 12 also illustrated another embodiment opposite counter charge well (counter charge well) according channel (160) can be formed by noise generation number billion.

[59]

Counter charge well (160) also 13 as illustrated to the vertical transfer gate (150) may be formed along its entire outer peripheral surface, to an amorphous silicon layer on the top as illustrated also 14 opposing disapproval.

[60]

The, pixel vertical transmission gate (150) can be minimize the distance between the light-receiving area (125) aqueous outside lights (128) can be provided to reduce the area of.

[61]

According to Image sensor pixel equivalent circuit diagram is also 15a and 15b also another implementations are disclosed. 3 15A and 15b is also also constituting light sensing elements (PD1) may be formed by light sensing elements structure number 1 number 2 and number 3 on organic optical sensing light sensing elements (PD2) light sensing elements (PD3) an inorganic optical sensing point also consists of only 2 or 9 is also illustrated implementation coping difference disclosed. 15A also includes organic light sensing elements (PD1, PD2) charges accumulated in the amplifying transistor (Tr4) (FD) directly connected to a floating gate of the transistor is transmitted without the extension 15b also organic light sensing elements (PD1, PD2) with conventional pressure to the charges accumulated in the extension transmission transistor (Tr11, Tr12) (FD) when transmitted through each of.

[62]

15A and 15b also representing the reference pixel also illustrated Image sensor 16 also cross-sectional drawing, number 1 of organic light sensing elements (PD1) charge number 1 through via (140a) via a read circuit (115) and transferred to an, organic light sensing elements (PD2) charge of number 2 number 2 through via (140b) through read out circuit (115) transferred to.

[63]

Number 1 through via (140a) of the substrate (101), number 2 organic light sensing elements (PD2) and insulting layer (180) organic light sensing elements (PD1) number 1 through number 2 electrode serving as a pixel electrode (136a) and connected thereto.

[64]

Number 2 through via (140b) substrate (101) number 2 through number 2 electrode serving as a pixel electrode of organic light sensing elements (PD2) (136b) and connected thereto.

[65]

Number 1 organic light sensing elements (130a, PD1) number 1 is selectively absorbing visible light organic photoelectric conversion layer (132a) and double-sided number 1 electrode (134a) and number 2 electrode (136a) can be comprising, number 2 organic light sensing elements (130b, PD2) number 2 is selectively absorbing visible light organic photoelectric conversion layer (132b) and double-sided number 1 electrode (134b) and number 2 electrode (136b) can be comprising.

[66]

3 Layer is laminated structure (PD1/PD2/PD3) 1) blue organic light sensing elements (OPD (b)) red/green organic light sensing elements (OPD (g))/inorganic optical sensing element (PD (r)), 2) blue organic light sensing elements (OPD (b))/green/red organic light sensing elements (OPD (g)) for inorganic light sensing elements (PD (r)), or 3) organic infrared light sensing elements (OPD (ir))/organic red and blue/green light sensing elements (OPD (g)) for an inorganic optical element array (PD & PD (r) (b) array) can be various combinations such as possible.

[67]

According to another embodiment of the present invention, adjacent pattern is number 1 through via (140a) on number 2 through via (140b) by deep trench isolation (DTI) with each other.

[68]

Figure 20 shows a 16 to 17 also illustrated Image sensor pixel values of pixels also 15a also to effectively achieve isolation layout by a goniophotometer.

[69]

With reference also to the 20 also 17, 3 (PD1, PD2, PD3) laminated stack of light sensing elements in a light receiving region (125) of the circumference of the through via number 1 (140a) on number 2 through via (140b) is disposed thereon.

[70]

Figure 17 number 1 through via (140a) and number 2 through via (140b) is a light receiving region (125) exhibits an outer circumferential surface of each L-shaped pattern when the cover is disposed. Figure 18 number 1 through via (140a) is shaped pattern 1 number 2 through via (140b) is L-shaped pattern exhibits when the cover is disposed. Figure 19 number 1 through via (140a) is L-shaped pattern number 2 through via (140b) is shaped pattern exhibits 1 when the cover is disposed. Figure 20 number 1 through via (140a) on number 2 through via (140b) 1 shaped pattern exhibits both when the cover is disposed.

[71]

17 Also as illustrated to also to 20, a light receiving region (125) 1/2 region number 1 through via maximum the outer periphery surfaces (140a) on number 2 through via (140b) which is positioned terminals of a light receiving region (125) can be DTI between optimizing. Preferably a light receiving region (125) over the whole of the area of outer circumferential surface of the through via number 1 1/2 (140a) on number 2 through via (140b) pixel of a light receiving region (125) between which a time in an effective DTI DTI can be achieve.

[72]

In addition, number 1 through via (140a) on number 2 through via (140b) receive region (125) by external to the light receiving region (125) can be to improve fill factor of increasing an occupying area can be.

[73]

In addition, number 1 through via (140a) on number 2 through via (140b) so that the ice maker are L-shaped or 1 a in addition can be improve fairness can design the shape.

[74]

Again, with reference to the 16 also, number 1 through via (140a) constituting the insulating layer (144a) and number 2 through via (140b) constituting the insulating layer (144b) materials comprising the substrate (101) rate than that of the materials comprising the optical crosstalk can be formed to improve. For example, a refractive index lower than the refractive index of silicon oxide, nitride and the like can be.

[75]

Another equivalent circuit diagram according to Image sensor pixel is also 21a and 21b also embodiments are disclosed.

[76]

4 Structure and the lower structure light sensing elements may be formed by light sensing elements 3 that it consists of organic optical sensing is described embodiments in front with difference disclosed.

[77]

Thus, the equivalent circuit diagram of Figure 22 cross-sectional drawing as illustrated also 21a and 21b and also each organic light sensing elements (PD1, PD2, PD3) number 1 to number 3 is via (140a, 140b, 140c) each accumulation through charge read circuit (115) components in the.

[78]

Layout but not separately example, number 1 to number 3 via (140a, 140b, 140c) 17 to 20 by deforming the layout also is also illustrated hereinafter can be 1/2 region are arranged in the outer circumferential surface of a light receiving region.

[79]

4 Layer laminated structure organic light sensing elements (OPD (b))/(PD1/PD2/PD3/PD4) is blue organic light sensing elements (OPD (g)) red/green organic light sensing elements (OPD (r))/infrared weapon light sensing elements (PD (IR)) but the one consisting of the number and not the.

[80]

The optical sensing elements 3 laminated structure of the mold for further light sensing elements in addition to infrared, infrared light is commanded infrared light sensing elements for selective absorption tire be the same distance. When the infrared light sensing elements is further performs photoelectric conversion function in addition for other secure recognition function can be sensitivity m bits when a second output signal.

[81]

In the embodiment of the present invention description is a more intimate intermixing of the understanding of said for example and the output of the reference to the drawing, the present invention must not be interpreted as defining the meanings will. In addition, the present invention is in the field of basic principles of the present invention is provided to a person with skill in the art from a heavy vertical ms. an unmodified variety of changes within a range that will.



[1]

Provided are an image sensor and an image processing device. The image sensor includes multiple pixels. Each of the pixels includes: a three-layer laminate light sensing element structure formed by laminating first to third light sensing elements sequentially; through via units which are extended from a read circuit forming surface of the three-layer laminate light sensing element structure to be connected to the first light sensing element to transmit the charge of the first light sensing element to the read circuit; and a vertical transmission gate which controls the transmission of the charge of the second light sensing elements to the read circuit. The through via units and the vertical transmission gate are arranged on the outer peripheral surface of a light receiving area of the three-layer laminate light sensing element while being arranged in a linear or L-shaped form individually.

[2]

COPYRIGHT KIPO 2018

[3]



In Image sensor including a plurality of pixels, said pixel light sensing elements number 1, number 2 and number 3 may be formed by optical sensing device 3 is light sensing elements are sequentially stacked optical sensing element structure, said 3 extended from said number 1 may be formed by light sensing elements formed over the read circuit forming face layer is interposed said read circuit to transfer the charge of the light sensing elements connected to said number 1 through via, said read circuit to said number 2 and number plower delivered charge light sensing elements along the vertical transmission, said through via and said 3 may be formed by an outer circumferential surface of said vertical transmission gate consisting of light sensing elements arranged in a light receiving region, said vertical transfer gates are one of L-shaped or through via and 1 are arranged in a Image sensor.

According to Claim 1, said light receiving region of said outer circumferential surface of the through via and vertical transmission gate arranged 1/2 region hereinafter Image sensors.

According to Claim 1, said read circuit forming surface located opposite each other and said light receiving region, said number 1 organic light sensing elements Image sensor optical sensing device.

According to Claim 1, said vertical transfer transistor is coupled to the light sensing said number 2 trench, said trench inside walls and bottom surface and said gate insulating layer on the gate insulating film is formed on said vertical transfer gate electrode trench including Image sensor.

According to Claim 4, exposing said substrate through said light sensing elements said number 1 through via the via hole, said via hole passes through said via holes and an insulating film and a conductive layer, said insulating layer than said gate insulating layer is said low rate material Image sensor.

According to Claim 1, said organic light sensing elements said number 1 photoelectric conversion layer organic photoelectric conversion layer including organic light sensing elements and both faces the pixel electrode and the common electrode, said through vias are extended in said Image sensor.

According to Claim 1, said vertical transfer transistor belongs the adjacent pixel region situated opposite the vertical transfer transistor further including opposite counter charge well channel generated by said Image sensor.

According to Claim 1, said number 1 of light sensing elements can absorb selectively infrared sensing organic light sensing elements, and said read circuit forming face extended from said infrared detecting organic light sensing elements delivered through via additional charge of said read out circuit further includes, said through via, said vertical transmission gate, said light receiving region in the area of the outer circumferential surface of the through via said additional Image sensors arranged 1/2 region hereinafter.

In Image sensor including a plurality of pixels, said pixel light sensing elements number 1, number 2 and number 3 may be formed by optical sensing device 3 is light sensing elements are sequentially stacked optical sensing element structure, said 3 extended from said number 1 may be formed by light sensing elements formed over the read circuit forming face is connected to the light sensing elements transferring said read circuit charge of the light sensing elements said number 1 number 1 through via, and said read circuit forming face extended from said number 2 number 2 through via and said read circuit to transfer the charge of light sensing elements, said number 1 through via and said 3 may be formed by an outer circumferential surface of the through via said number 2 consisting of light sensing elements arranged in a light receiving region, each one of said number 1 through via and said number 2 are arranged in a Image sensor 1 through via-shaped or L-shaped.

According to Claim 9, through via said number 1 and number 2 through via the light receiving region of said outer circumferential surface of the Image sensors arranged 1/2 region hereinafter.

According to Claim 9, said read circuit forming surface located opposite each other and said light receiving region, the light sensing elements said number 1 number 1 number 1 organic light sensing elements and other optical sensing, other optical sensing of the light sensing elements said number 2 number 2 and number 2 organic light sensing elements, said number 1 through via the via hole exposing said substrate through said number 1 light sensing elements, passes through said via hole includes a conductive layer and an insulating film and said via holes, said number 2 through via the via hole exposing light sensing elements said number 2 through said substrate, said via hole passes through said via holes and an insulating film and a conductive layer, said insulating layer than said low rate material Image sensor.

According to Claim 11, said 3 layer stacks blue organic light sensing elements (OPD (b)) red/green organic light sensing elements (OPD (g))/((r) PD) an inorganic optical sensing elements laminated structure, blue organic light sensing elements (OPD (b))/green/red organic light sensing elements (OPD (g)) for inorganic light sensing elements (PD (r)) laminated structure, or 3) organic infrared light sensing elements (OPD (ir))/organic red and blue/green light sensing elements (OPD (g)) for an inorganic optical element array (PD & PD (r) (b) array) Image sensor disclosed is a multilayer structure.

According to Claim 11, said number 1 of light sensing elements further comprises 4 added to organic light sensing elements may be formed by adhesively bonded onto a light sensing elements, said said read circuit forming face extend from said additional organic light sensing elements and transferring said read circuit further charge of the through via, said number 1 through via, said number 2 through via, and said outer circumferential surface of the through via the light receiving region of said additional Image sensors arranged 1/2 region hereinafter.

According to Claim 13, said 4 light sensing elements may be formed by organic light sensing elements (OPD (b)) green/blue structure organic red light sensing elements (OPD (g))/organic light sensing elements (OPD (r))/infrared weapon light sensing elements (PD (IR)) Image sensor disclosed is a multilayer structure.

In Image sensor including a plurality of pixels, said pixel light sensing elements number 1, number 2 and number 3 may be formed by optical sensing device 3 is light sensing elements are sequentially stacked optical sensing element structure, said 3 extended from said number 1 may be formed by light sensing elements formed over the read circuit forming face is connected to said circuit for delivering a charge of light sensing elements sensing elements said number 1 through via, said read circuit to said number 2 and number plower delivered charge light sensing elements along the vertical transmission, said insulation and said vertical transmission through via the inner wall of upper channel the pixels adjacent to each Image sensor which is electrically isolation

According to Claim 15, said said L-shaped shape of the one of the gate of the transfer transistor through via and vertical or disposed at each 1, Image sensors arranged in a light receiving region of said outer circumferential surface of the 1/2 region hereinafter.

According to Claim 15, said read circuit forming surface located opposite each other and said light receiving region, said photoelectric conversion layer organic light sensing elements said number 1 organic photoelectric conversion layer including organic light sensing elements and common electrodes on both sides respectively, said through vias are extended in said Image sensor.

According to Claim 15, said insulating layer and said low rate than said gate insulating layer is made of material Image sensor.

According to Claim 15, said vertical transfer transistor belongs the adjacent pixel generated by said vertical transmission transistor channel region situated opposite the opposite counter further including Image sensor charge well.

According to Claim 15, said number 1 of light sensing elements can absorb selectively infrared sensing organic light sensing elements, and said read circuit forming face extended from said infrared detecting organic light sensing elements delivered through via additional charge of said read out circuit further includes, said number 1 through via, said vertical transmission gate, said light receiving region in the area of the outer circumferential surface of the through via said additional Image sensors arranged 1/2 region hereinafter.

In Image sensor including a plurality of pixels, said pixel light sensing elements number 1, number 2 and number 3 may be formed by optical sensing device 3 is light sensing elements are sequentially stacked optical sensing element structure, said 3 extended from said number 1 may be formed by light sensing elements formed over the read circuit forming face is connected to the light sensing elements transferring said read circuit charge of the light sensing elements said number 1 number 1 through via, and said read circuit forming face extended from said number 2 number 2 through via and said read circuit to transfer the charge of light sensing elements, said number 1 passes through via and said number 2 through via of said adjacent pixel is electrically isolation insulation layer is polished by which Image sensor.

According to Claim 21, each L-shaped shape of the one of said number 1 through via and said number 1 through via 1 or disposed, Image sensors arranged in a light receiving region of said outer circumferential surface of the 1/2 region hereinafter.

According to Claim 21, said read circuit forming surface located opposite each other and said light receiving region, the light sensing elements said number 1 number 1 number 1 organic light sensing elements and other optical sensing, other optical sensing of the light sensing elements said number 2 number 2 and number 2 organic light sensing elements, said number 1 through via the via hole exposing said substrate through said number 1 light sensing elements, passes through said via hole includes a conductive layer and an insulating film and said via holes, said number 2 through via the via hole exposing light sensing elements said number 2 through said substrate, said via hole passes through said via holes and an insulating film and a conductive layer, said insulating layer than said low rate material Image sensor.

According to Claim 23, said number 1 of light sensing elements further comprises 4 added to organic light sensing elements may be formed by adhesively bonded onto a light sensing elements, said said read circuit forming face extend from said additional organic light sensing elements and transferring said read circuit further charge of the through via, said number 1 through via, said number 2 through via, and said inner wall adjacent said upper channel formed through via additional pixel is electrically isolation which Image sensor.