Apparatus and method for picking up semiconductor chip

21-12-2009 дата публикации

Номер:

TWI318781B

Автор: Kasai Teruaki, TERUAKI KASAI

Принадлежит: Panasonic Corp, PANASONIC CORP, PANASONIC CORPORATION

Контакты:

Номер заявки: 05-99-9310

Дата заявки: 09-04-2004

CPC - классификация

H H0 H01 H01L H01L2 H01L21 H01L21/H01L21/6 H01L21/67 H01L21/671 H01L21/6713 H01L21/67132 H01L21/68 H01L21/681 H01L21/683 H01L21/6838 Y Y1 Y10 Y10S Y10S4 Y10S43 Y10S438 Y10S438/Y10S438/9 Y10S438/97 Y10S438/976 Y10T Y10T1 Y10T15 Y10T156 Y10T156/Y10T156/1 Y10T156/11 Y10T156/110 Y10T156/1105 Y10T156/117 Y10T156/1179 Y10T156/19 Y10T156/190 Y10T156/1906 Y10T156/194 Y10T156/1944 Y10T156/197 Y10T156/1978 Y10T156/198 Y10T156/1983

IPC - классификация

H H0 H01 H01L H01L2 H01L21 H01L21/H01L21/0 H01L21/00 H01L21/5 H01L21/52 H01L21/6 H01L21/68 H01L21/683