Universal service cart for semiconductor system maintenance

11-12-2020 дата публикации

Номер:

TWI712529B

Автор: 安東尼阮, 泰倫斯喬治伯尼爾, 魏鴻吉, BERNIER TERRENCE GEORGE, WEI JOSEPH, NGUYEN TONY, BERNIER, TERRENCE GEORGE, WEI, JOSEPH, NGUYEN, TONY

Принадлежит: 美商蘭姆研究公司, LAM RES CORP, LAM RESEARCH CORPORATION

Контакты:

Номер заявки: 68-04-10617

Дата заявки: 14-02-2017

CPC - классификация

B B6 B62 B62B B62B3 B62B3/B62B3/0 B62B3/00 B62B3/005 H H0 H01 H01L H01L2 H01L21 H01L21/H01L21/6 H01L21/67 H01L21/673 H01L21/6734 H01L21/67346 H01L21/6736 H01L21/67369 H01L21/6737 H01L21/67379 H01L21/6738 H01L21/67383 H01L21/677 H01L21/6772 H01L21/67724 H01L21/6773 H01L21/6776 H01L21/67769

IPC - классификация

B B6 B62 B62B B62B3 B62B3/B62B3/0 B62B3/00 H H0 H01 H01L H01L2 H01L21 H01L21/H01L21/6 H01L21/67 H01L21/673 H01L21/6736 H01L21/67369 H01L21/677 H01L21/6776 H01L21/67769 H05 H05K H05K1 H05K13 H05K13/H05K13/0 H05K13/00 H05K13/008 H05K13/0084

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