Microelectromechanical and/or nanoelectromechanical structure with electrothermal actuation comprising at least two differently polarisable actuating beams

09-02-2021 дата публикации

Номер:

US10917026B2

Автор: Guillaume JOURDAN, Guillaume Lehee

Принадлежит: Commissariat a lEnergie Atomique et aux Energies Alternatives CEA, Safran Electronics and Defense SAS

Контакты:

Номер заявки:

Дата заявки:

CPC - классификация

B B8 B81 B81B B81B2 B81B22 B81B220 B81B2201 B81B2201/B81B2201/0 B81B2201/03 B81B2201/031 B81B3 B81B3/B81B3/0 B81B3/00 B81B3/002 B81B3/0024 H H0 H02 H02N H02N1 H02N10 H02N10/H02N10/0 H02N10/00

IPC - классификация

H H0 H01 H01H H01H6 H01H61 H01H61/H01H61/0 H01H61/04 H01L H01L3 H01L37 H01L37/H01L37/0 H01L37/04 H02 H02N H02N1 H02N10 H02N10/H02N10/0 H02N10/00

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