Systems and methods for annealing semiconductor structures

08-09-2015 дата публикации

Номер:

US9129918B2

Автор: Chao-Hsiung Wang, Chun-Hsiung Tsai, Zi-Wei FANG

Принадлежит: Taiwan Semiconductor Manufacturing Co TSMC Ltd

Контакты:

Номер заявки:

Дата заявки:

CPC - классификация

H H0 H01 H01L H01L2 H01L21 H01L21/H01L21/3 H01L21/32 H01L21/324 H01L21/6 H01L21/67 H01L21/671 H01L21/6711 H01L21/67115 H05 H05B H05B6 H05B6/H05B6/6 H05B6/64 H05B6/648 H05B6/6482 H05B6/649 H05B6/6491 H05B6/8 H05B6/80 H05B6/806

IPC - классификация

C C3 C30 C30B C30B3 C30B31 C30B31/C30B31/1 C30B31/12 H H0 H01 H01L H01L2 H01L21 H01L21/H01L21/3 H01L21/32 H01L21/324 H01L21/6 H01L21/67 H01L21/671 H01L21/6711 H01L21/67115

Получить PDF