04-04-2019 дата публикации
Номер: US20190103374A1
Provided is a technique of improving joint strength between a joining layer and a resin. A power semiconductor device includes a wiring member, a semiconductor element, a joining layer joining the wiring member and the semiconductor element to each other, and a resin covering the wiring member, the semiconductor element, and the joining layer. The joining layer includes a first joining layer provided to be adjacent to the resin and having a void filled with the resin. A filler contained in the resin has a maximum width greater than a minimum diameter of the void in the first joining layer. 1. A power semiconductor device comprising:a wiring member;a semiconductor element;a joining layer joining the wiring member and the semiconductor element to each other; anda resin covering the wiring member, the semiconductor element, and the joining layer,wherein the joining layer comprises a first joining layer provided to be adjacent to the resin and comprising a void filled with the resin, anda filler contained in the resin has a maximum width greater than a minimum diameter of the void in the first joining layer.2. The power semiconductor device according to claim 1 , wherein the joining layer further comprises a second joining layer provided to be surrounded by the wiring member claim 1 , the semiconductor element claim 1 , and the first joining layer claim 1 , and having a smaller void rate than the first joining layer.3. The power semiconductor device according to claim 1 , wherein the first joining layer is disposed between the wiring member and the semiconductor element claim 1 , and is disposed outside the semiconductor element in plan view.4. The power semiconductor device according to claim 1 , wherein the first joining layer has a void rate of 5% or greater and 20% or smaller.5. The power semiconductor device according to claim 1 , wherein the joining layer contains silver claim 1 , gold claim 1 , copper claim 1 , or nickel.6. The power semiconductor device ...
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