07-02-2019 дата публикации
Номер: US20190040279A1
Принадлежит:
Si-containing film forming compositions are disclosed comprising a precursor having the formula [—NR—RRSi—(CH)—SiRR—]wherein n=2 to 400; R, R, R, R, and Rare independently H, a hydrocarbon group, or an alkylamino group, and provided that at least one of R, R, R, and Ris H; and R is independently H, a hydrocarbon group, or a silyl group. Exemplary precursors include, but are not limited to, [—NH—SiH—CH—SiH—], and [—N(SiH—CH—SiH)—SiH—CH—SiH—]. 1. A Si-containing film forming composition comprising a precursor containing a unit having the formula:{'br': None, 'sup': 4', '5', '2', '3, 'sub': 2', 't', 'n, '[—NR—RRSi—(CH)—SiRR—]\u2003\u2003(II)'}wherein t=1 to 4; n=2 to 400;{'sup': 2', '3', '4', '5, 'sub': 1', '6', '2', '1', '6', '6', '12', '2, 'R, R, R, and Rare independently H, a Cto Chydrocarbon, or an alkylamino group having the formula NR″and each R″ is independently H, a C-Chydrocarbon, a C-Caryl, or NR″forms a cyclic amine group,'}{'sup': 2', '3', '4', '5, 'and provided that at least one of R, R, R, and Ris H; and'}{'sub': 1', '6', '2x+1', '1', '6', '2', '1', '6', '6', '12', '2', '2', 'b', '1', '6', '6', '12', '2', '1', '6', '6', '12', '2, 'sup': 1′', '2′', '3′', '4′', '5′', '1′', '2′', '3′', '4′', '5′', '1′', '2′', '3′', '4′', '5′, 'R is H; a C-Chydrocarbon; a silyl group having the formula SixR′, with x=1 to 4 and each R′ independently ═H, a C-Chydrocarbon group, or an alkylamino group having the formula NR″and each R″ independently H, a C-Cgroup, a C-Caryl, or NR″forms a cyclic amine group; or a RRRSi—(CH)SiRR group, with b=1 to 2 and R, R, R, R, and R are independently a H, a C-Chydrocarbon, a C-Caryl, or an alkylamino group having the formula NR″and each R″ is independently H, a C-Cgroup, a C-Caryl, or NR″forms a cyclic amine group; and provided that at least one of R, R, R, R, and R is H.'}2. The Si-containing film forming composition of claim 1 , wherein the precursor contains a unit having the formula [—NH—SiH—(CH)—SiH—] claim 1 , with t=1-2.3. The Si- ...
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