Method and device for depositing single component or multicomponent layers and series of layers using non-continuous injection of liquid and dissolved starting material by a multi-channel injection unit
Номер патента: TW200513545A
Опубликовано: 16-04-2005
Автор(ы): Johannes Lindner, Marc Deschler, Markus Schumacher, Peter Baumann
Принадлежит: Aixtron Ag
Опубликовано: 16-04-2005
Автор(ы): Johannes Lindner, Marc Deschler, Markus Schumacher, Peter Baumann
Принадлежит: Aixtron Ag
Method and apparatus for depositing mono- or multi-component layers and layer sequences using non-continuous injection of liquid and dissolved starting substances via a multi-channel injection unit
Номер патента: DE102004021578A1. Автор: . Владелец: AIXTRON SE. Дата публикации: 2005-04-21.