评估多通道微和/或亚波长光学投影单元的质量的方法和测试系统.

评估多通道微和/或亚波长光学投影单元的质量的方法和测试系统

Номер патента: CN112525490A
Опубликовано: 19-03-2021
Автор(ы): 伊莎贝尔·阿格林, 卡特琳·辛德勒, 威尔弗里德·诺埃尔, 索菲安妮·图尔诺伊斯, 苏珊娜·韦斯特恩赫费尔
Принадлежит: Suess Microtec Lithography GmbH
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Рисунок 1. Взаимосвязь патентов (ближайшие 20).

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Auto White Balance Adjusting Method and Auto White Balance Adjusting System for Calibrating Images by Using Dual Color Spaces

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Methods and arrangements in a telecommunication system for sending feedback data and user data on a combined feedback and data channel

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Methods for Assessing a Patient's Response to Treatment of a Neurodegenerative Disease with Deuterated Arachidonic Acid

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Methods for assessing a patient's response to treatment of a neurodegenerative disease with deuterated arachidonic acid

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Methods for assessing a patient's response to treatment of a neurodegenerative disease with deuterated arachidonic acid

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Method and apparatus for a power system for phased-array radar

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Method and apparatus for a power system for phased-array radar

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Method and apparatus for a power system for phased-array radar

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Method and apparatus for detecting EMI signals using a common mode sense at the differential pins of a chip

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Method and apparatus for attaching a crushable carbon fiber reinforced polymer structure to the outer surface of a battery enclosure

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Image processing apparatus, image processing method, and storage medium for at least one of correcting and reducing at least one component of a color blur of an image

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Nozzle System for Cleaning a Vehicle Part, In Particular a Window of a Motor Vehicle, and Cleaning Method

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.a hollow punch for processing leather and a system for removably blocking the hollow punch to a shaft of a machine for processing leather

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Braking system for a vehicle, method for operating a braking system of a vehicle, and manufacturing method for a braking system for a vehicle

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Safety system for a child seat's seatbelt system, retention system for a child seat, seatbelt system, vehicle and use of a remote detector

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Plug-in system for holding at least one object in the interior of a motor vehicle

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Methods and systems for configuring voice over internet protocol network quality of service

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A fastening system for fastning a device to a planar body part of a vehicle

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Thermal management system for a motor vehicle, method for the thermal management of a motor vehicle, and motor vehicle having a thermal management system

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A communication system for providing instant messaging and presence services among users of a communication network

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System for detecting spring brake failure in a braking assembly of a vehicle

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Systems for facilitating low-level laser therapy on a head of a user

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Method for automatically assessing the near vision accommodative state of a non-presbyopic individual and associated device

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Control system for controlling collective and cyclic pitch of rotor blades of a multi-blade rotor in a rotary-wing aircraft

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System for mounting a lamp with respect to a surface of a vehicle

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System for reducing the dynamic behavior of the movable segment of a deployable nozzle for a rocket engine

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Wheelchair assembly and system for ingress/egress to a vehicle using a door of a vehicle as support

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Method and System for Determining a Safety Criterion during an Autonomous Manipulation of a Surgical Tool by a Robotic System to Treat an Anatomical Structure

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Method and a corresponding radiation treatment system for facilitating optimization of a multimodal radiation therapy plan

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Method and system for using IS-IS for SPB in the context of a service provider network

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Method and system for using is-is for spb in the context of a service provider network

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Methods and devices in a communication system for scheduling delivery of data

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Method and system for estimating a depth pressure and/or permeability profile of a geological formation having a well

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Method and emission control system for catalytically reducing nitrogen oxides in the exhaust gas of a combustion system

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Method and system for forwarding data packets in a service function path of a network

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Method and system for generating a set of values for respective ones of a set of parameters used in determining rotor blade profiles for a coaxial rotor system

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The method and apparatus of positioning based system for smart repeaters with adaptive beamforming capabilities

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Systems methods and computer readable storage media for a set of proximity markers disposed on opposite ends of a gap in dense regular connective tissue

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Method and system for adapting the visual and/or visual-motor behaviour of a person

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Method and system for using is-is for spb in the context of a service provider network

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A method and a system for removing hydrogen sulphide ions (hs-) from a liquor of a pulp mill process

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A method and a system for removing hydrogen sulphide ions (hs-) from a liquor of a pulp mill process

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A method and a system for removing hydrogen sulphide ions (hs-) from a liquor of a pulp mill process

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Method and system for feedback controlling/controlling a total air fuel ratio of a reformer

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Methods and systems for charging a plurality of users based on usage of a multi-part tariff resource

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Polymer producing method, and a flow-type reaction system for producing polymer

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Method and system for generating a set of values for respective ones of a set of parameters used in determining rotor blade profiles for a coaxial rotor system

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Connection system for attaching a blade access system to a nacelle of a wind turbine and method of using same

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System for actuating at least two consumer units by means of a hydraulic motor

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Delivery system for the effective and reliable delivery of controlled amounts of a medical fluid

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System for measuring cuttings and mud carryover during the drilling of a subterranean well

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Method and device in radio communication system for dtx support

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Method and system for determining a mass change at a rotating blade of a wind turbine

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A method and apparatus for controlling and monitoring of an apparatus for generating an aerosol during administration of a dose of a substance by way of inhalation

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Method and System for Notifying the Presence of Contacts in a Vicinity of a User

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Method and multi-queue packet scheduling system for managing network packet traffic with minimum performance guarantees and maximum service rate control

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System for supplying fuel to and cooling a fuel injector of a dual head combustion chamber

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Method and system for monitoring a hadron beam during hadron-therapy treatment of a subject

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Method and system for the automatic adjustment of an angle of inclination of a vehicle headlight

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Multi-channel FCR: method and system for providing control power for controlling a network frequency of a power network and power network

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Method and system for creating a virtual sip user agent by use of a webrtc enabled web browser

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Method and system for updating a virtual local area network (vlan) status of a node in a mesh network

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Method and system for providing adaptive statistical and time based quality of service over a network

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Multi-channel fcr: method and system for providing control power for controlling a network frequency of a power network and power network

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System for keeping afloat any type of boat in case of a leak

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Method and device to make a beverage where addition of water is indicated after the insertion of a beverage cartridge

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Method and device for controlling a carrier-envelope phase and/or an intensity of output pulses of a pulse laser device

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Method and arrangement for extracting an auxiliary data clock from theclock and/or the clock-phase of a synchronous or plesichronous digital signal

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A method and a machine for inserting a dip-tube connected to a valve into an aperture of a container

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Methods and apparatuses for generating information regarding spatial relationship between a lens and an image sensor of a digital imaging apparatus and related assembling methods

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Method and apparatus in a communication receiver for adjusting an operating attribute at a predetermined boundary of a protocol

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Method and device for the display of targets and/or target positions using data acquisition means of a weapons system

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Layer-by-layer manufacturing method and layer-by-layer manufacturing apparatus for the additive production of at least one region of a component

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Method and apparatus for uav and uav controller pairing and command and control (c2) quality of service provisioning

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Method and device for alternately applying hot and cold to an application surface, notably the epidermis of a user

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Method and drive control device for operating at least two electric drive machines in the event of a change in load and motor vehicle with a drive control device

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Method and device for convective heat transfer between a heat transfer medium and the front face of a wound metal strip in the form of a coil

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A device method and system for the application of content on to the surface of a beverage

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A device method and system for the application of content on to the surface of a beverage

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Method and multi-ejector type of system for purifying the polluted poisonous exhaust gas

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Method and system of providing burst timing for high-speed data transmission in a base station of a mobile communication system

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Printing apparatus, printing method and recording medium for recording programs to determine a base coated region from an image of a nail and a design printing region in order to generate print data to perform printing on a nail using a print head

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A method and a corresponding radiation treatment system for generating a radiation treatment plan

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System for charging the battery and operating the electrical accessories of a sail-boat

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Sterilization system for a water-intake finger and an air space of a bottle for a water dispenser

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Liquid circulation system for an apparatus for disintegrating calculi in the body of a life form and method of operation

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Optical system for connecting customer premises networks to a switching center of a telecommunication network providing interactive and non-interactive services

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Wearring parts system for detachable fitting of wearing parts for the tool of a cultivating machine

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Sterilization system for a water-intake finger and an air space of a bottle for a water dispenser

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A control system for controlling collective and cyclic pitch of rotor blades of a multi-blade rotor in a rotary-wing aircraft

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A quick release system for a wheel to be held between two blades of a fork

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Air treatment system for a closable room, in particular for a cabin, of a vehicle

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A quick release system for a wheel to be held between two blades of a fork

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Method for controlling a slave device, controlled by a master device in a robotic system for medical or surgical teleoperation, taking into account limits of a field of view, and related robotic system

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Perimeter protection system for a horizontal formwork system, and method of assembly of a perimeter protection system

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Braking system for a vehicle, method for operating a braking system of a vehicle, and manufacturing method for a braking system for a vehicle

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Anti-roll wheel suspension system for vehicles, and a method for performing anti-roll of a vehicle with an anti-roll wheel suspension system

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Adjustment system for adjusting the draught of at least one hull of a vessel, and vessel comprising said adjustment system

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Nozzle System for Cleaning a Vehicle Part, In Particular a Window of a Motor Vehicle, and Cleaning Method

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System for mounting a transducer on an interior trim panel of a motor vehicle

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System for controlling an argon flow rate at the outlet of a distillation column

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System for and method of managing and controlling the speed of a vehicle, particularly for medium to long journeys

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System for assisting a driver to get in and out of a vehicle

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A system for monitoring, evaluating and providing feedback of physical movements of a user

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Air treatment system for a closable room, in particular for a cabin, of a vehicle

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Trim system for a watercraft and method for controlling a trim of a watercraft

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Device, method and automatic hauling and stowing system for fishing equipment

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System for keeping afloat any type of boat in case of a leak

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Connection system for attaching a blade access system to a nacelle of a wind turbine and method of using same

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METHOD AND APPARATUS FOR ASSESSING VoIP PACKET PRODUCTION AND PACKET TRANSMISSION AND INDICATION AT THE END POINTS INVOLVED IN THE VoIP COMMUNICATION

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Methods for assessing the severity of, and for inhibiting, pro-inflammatory responses with total cell-free dna

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Method for assessing clinical and laboratory data

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Quality of service flow transmission method and apparatus, base station, terminal, and storage medium

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Method and apparatus for adaptively compressing streaming video

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Method and apparatus for decoding data in communication or broadcasting system

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Method and device for performing uplink status report for low latency in next-generation mobile communication system

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Methods and compositions for identifying undifferentiated stem cells and assessing cell health

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Method, Apparatus and System for Limiting Lightning Overvoltage of Direct-current Power Transmission Line, and Medium

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Method and system for monitoring a heartbeat and determining a heartbeat chaoticity index

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Resource allocation method and device for supporting vehicle communication in next generation mobile communication system

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Method and apparatus for transmitting PDSCH in wireless communication system

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Method and apparatus for decoding data in communication or broadcasting system

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Methods and compositions for identifying undifferentiated stem cells and assessing cell health

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Method and apparatus for transmitting and receiving low power signals

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Secure quality of service

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Secure quality of service

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Methods and systems for determining when to apply an adaptative thermal compensation in an operating region of a motor

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Method and system in a telephone exchange system

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Method and apparatus for uplink data information transmission in wireless communication system

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Method and device for performing improved communication in wireless communication system

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A method and a modular system for onboard treatment of ballast water

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Mobile communication method and device for broadband system

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Method and apparatus for reporting channel state information for network cooperative communication

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Method and device for simultaneously using network slices

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Method and device for re-establishing pdcp in wireless communication system

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Methods and systems for updating renderings of three-dimensional (3d) objects

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Communication method and communications apparatus

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Service transmission method in an optical transport network and device and system for implementing the method

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Method and system for operating broadcast system components with different portions of an allocation database

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Method and device for performing improved communication in wireless communication system

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Method and system for controlling the operation of a system for storing and injecting an additive into the exhaust gases of an engine

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Method and apparatus for recovering profile in case of device change failure

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Uplink transmission power control method and device in wireless cellular communication system

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Processing time determination method and device of terminal in wireless vehicle communication system

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System, method and flange device for fastening a saw blade to a drive spindle of a sawing device

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Method and apparatus for managing dormant bandwidth part in next-generation mobile communication system

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Service indication method and apparatus

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Method and system for decoding data in the horizontal overscan portion of a video signal

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Method and apparatus for recovering profile in case of device change failure

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Method and device for network design in wireless communication system

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Method and apparatus for triggering power headroom report for supporting dynamic power sharing

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Refurbishing system for reusable child-safe containers

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Method and device for grant-free data transmission in wireless communication system

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Method and device for accelerating data processing of double connection in next generation mobile communication system

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Method and device for accelerating data processing of double connection in next generation mobile communication system

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Method and apparatus for driving PDCP during data decompression failure in next-generation mobile communication system

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Methods and systems for transmitting data between devices worn by swimmers

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Method and device for uplink channel transmission in wireless communication system

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A method and system for recovering waste oil

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Method and device for operating wireless-core converged control plane in wireless communication system

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Sunshade production method and production system

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Method and device for indicating harq process in wireless communication system

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Method and system for forming material within a gap

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Method and device for performing relaxed radio resource management (rrm) measurement in wireless communication system

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Method and apparatus for implementing wireless protocol configurable according to services and devices

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Method and device for transmitting user data through two-stage random access process in mobile communication system

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Uplink control information rate matching method and apparatus in wireless communication system

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Method and apparatus for performing pdcch repetitive transmission through plurality of transmission and reception points (trps) in next-generation mobile communication system

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Method and apparatus for measurement based on a low power signal in a wireless communication system

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Method and apparatus for determining beam for transmission and reception of downlink control information in wireless communication system

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Method and device for terminal attaching and creating home-routed PDU session in roaming environment supporting network slice

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Method and device for measuring and reporting channel state in sidelink communication

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Method for assigning logical addresses to the connection ports of devices of a server cluster, and corresponding computer program and server cluster

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Method and apparatus for establishing Wi-Fi session in wireless communication system

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Method and system of reducing load on a downlink control channel

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Method, related device, and system for crosstalk cancellation processing on port line of access device

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Methods and systems for providing multiple access within a network

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Timer operating method and device according to harq activation

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Methods and systems for streaming media content on multiple devices

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