CAPACITIVE MICROMACHINED ULTRASONIC TRANSDUCER AND METHOD OF FABRICATING THE SAME.

CAPACITIVE MICROMACHINED ULTRASONIC TRANSDUCER AND METHOD OF FABRICATING THE SAME

Номер патента: US20180201501A1
Опубликовано: 19-07-2018
Автор(ы): CHUNG Seok-whan, HONG Seog-woo, KIM Chang-jung, SHIM Dong-sik
Принадлежит: SAMSUNG ELECTRONICS CO., LTD.
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Рисунок 1. Взаимосвязь патентов (ближайшие 20).

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