Roller for transporting a flexible substrate, vacuum processing apparatus, and method ofcooling a roller
Номер патента: EP4337805A1
Опубликовано: 20-03-2024
Автор(ы): Stefan Bangert, Thomas Deppisch, Wolfgang Buschbeck
Принадлежит: Applied Materials Inc
Опубликовано: 20-03-2024
Автор(ы): Stefan Bangert, Thomas Deppisch, Wolfgang Buschbeck
Принадлежит: Applied Materials Inc
Реферат: A roller (100) for transporting a flexible substrate is described. The roller (100) includes a first coolant supply (110) for cooling a first part (101) of the roller (100) and a second coolant supply (120) for cooling a second part (102) and a third part (103) of the roller (100). The first part (101) is provided between the second part (102) and the third part (103). Additionally, a vacuum processing apparatus including a roller and a method of cooling a roller are described.
Roller for transporting a flexible substrate, vacuum processing apparatus, and method of cooling a roller
Номер патента: US12060634B2. Автор: Stefan Bangert,Wolfgang Buschbeck,Thomas Deppisch. Владелец: Applied Materials Inc. Дата публикации: 2024-08-13.