System for automatic diagnostics and monitoring of semiconductor defect die screening performance through correlation of defect and electrical test data
Номер патента: EP4385062A1
Опубликовано: 19-06-2024
Автор(ы): Chet V. Lenox, David W. Price, John Robinson, Justin LACH, Oreste Donzella, Robert J. Rathert
Принадлежит: KLA Corp
Опубликовано: 19-06-2024
Автор(ы): Chet V. Lenox, David W. Price, John Robinson, Justin LACH, Oreste Donzella, Robert J. Rathert
Принадлежит: KLA Corp
Реферат: Systems and methods for determining a diagnosis of a screening system are disclosed. Such systems and methods include identifying defect results based on inline characterization tool data, identifying electrical test results based on electrical test data, generating one or more correlation metrics based on the defect results and the electrical test results, and determining at least one diagnosis of the screening system based on the one or more correlation metrics, the diagnosis corresponding to a performance of the screening system.
Systems and methods for measuring physical characteristics of semiconductor device elements using structured light
Номер патента: US20150059957A1. Автор: Zhijie Wang,Deepak Sood,Thomas J. Colosimo, JR.,David A. Rauth,Shu-Guo Tang. Владелец: Kulicke and Soffa Industries Inc. Дата публикации: 2015-03-05.