Annealing apparatus and method of operating the same.

Annealing apparatus and method of operating the same

Номер патента: US20230377914A1
Опубликовано: 23-11-2023
Автор(ы): Huicheng Chang, Sen-Hong Syue, Yee-Chia Yeo, Yi-Fan Chen
Принадлежит: Taiwan Semiconductor Manufacturing Co TSMC Ltd
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Рисунок 1. Взаимосвязь патентов (ближайшие 20).

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