Laser processing apparatus
Реферат: Disclosed herein is a laser processing apparatus that includes a cassette table for placing thereon a cassette in which a plurality of workpieces are accommodated, a carrying-out unit for carrying out the workpiece from the cassette placed on the cassette table, an X-axis direction moving unit for processing feed of a chuck table in the X-axis direction, a Y-axis direction moving unit for indexing feed of the chuck table in a Y-axis direction orthogonal to the X-axis direction, and a laser beam applying unit having a focusing unit for applying a laser beam to the workpiece held on the chuck table.
Laser processing apparatus
Номер патента: SG10201709847QA. Автор: Nomura Hiroshi. Владелец: Disco Corp. Дата публикации: 2018-07-30.