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Polishing System and Method of Its Use

Номер патента: KR100590664B1
Опубликовано: 19-06-2006
Автор(ы): 렌지 조우, 블라스타 브루식카우프만, 슈민 왕, 스티븐 케이. 그럼빈, 이삭 케이 체리안
Принадлежит: 캐보트 마이크로일렉트로닉스 코포레이션
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