High throughput inspection system and method for generating transmitted and/or reflected images
Номер патента: AU2003259708A8
Опубликовано: 25-02-2004
Автор(ы): Eitan Lahat, Emanuel Elyasaf, Haim Feldman, Simon Yalov
Принадлежит: Applied Materials Inc, Applied Materials Israel Ltd
Опубликовано: 25-02-2004
Автор(ы): Eitan Lahat, Emanuel Elyasaf, Haim Feldman, Simon Yalov
Принадлежит: Applied Materials Inc, Applied Materials Israel Ltd
Optical inspection system, illumination apparatus and method for imaging specular objects based on illumination gradients
Номер патента: EP1604193A2. Автор: Richard L. Baer,Dietrich W. Vook,Xuemei Zhang. Владелец: AGILENT TECHNOLOGIES INC. Дата публикации: 2005-12-14.