High-brightness laser produced plasma source and methods for generating radiation and mitigating debris
Номер патента: US10638588B2
Опубликовано: 28-04-2020
Автор(ы): Aleksandr Andreevich LASH, Aleksandr Yurievich Vinokhodov, Konstantin Nikolaevich Koshelev, Mikhail Sergeyevich Krivokorytov, Oleg Feliksovich Yakushev, Vladimir Mikhailovich KRIVTSUN, Vladimir Vitalievich Ivanov, Vyacheslav Valerievich Medvedev, Yury Viktorovich Sidelnikov
Принадлежит: Isteq BV, Rnd ISAN Ltd
Получить PDF файл: Открыть в новом окне
Опубликовано: 28-04-2020
Автор(ы): Aleksandr Andreevich LASH, Aleksandr Yurievich Vinokhodov, Konstantin Nikolaevich Koshelev, Mikhail Sergeyevich Krivokorytov, Oleg Feliksovich Yakushev, Vladimir Mikhailovich KRIVTSUN, Vladimir Vitalievich Ivanov, Vyacheslav Valerievich Medvedev, Yury Viktorovich Sidelnikov
Принадлежит: Isteq BV, Rnd ISAN Ltd
Получить PDF файл: Открыть в новом окне
High-brightness laser produced plasma source and method of generating and collecting radiation
Номер патента: EP4427549A1. Автор: Konstantin Nikolaevich Koshelev,Vladimir Mikhailovich KRIVTSUN,Aleksandr Andreevich LASH,Aleksandr Yurievich Vinokhodov,Vladimir Vitalievich Ivanov,Mikhail Sergeyevich Krivokorytov,Vyacheslav Valerievich Medvedev,Denis Aleksandrovich GLUSHKOV,Samir Ellwi,Oleg Borisovich Khristoforov. Владелец: Isteq Group Holding BV. Дата публикации: 2024-09-11.