Methods of forming intermetallic insulating layers in semiconductor devices

01-05-1996 дата публикации

Номер:

GB0009604622D0

Автор:

Принадлежит: Hyundai Electronics Industries Co Ltd

Контакты:

Номер заявки: 9604622

Дата заявки: 04-03-1996

CPC - классификация

C C2 C23 C23C C23C1 C23C16 C23C16/C23C16/4 C23C16/40 C23C16/402 H H0 H01 H01L H01L2 H01L21 H01L21/H01L21/0 H01L21/02 H01L21/021 H01L21/0216 H01L21/02164 H01L21/022 H01L21/0227 H01L21/02271 H01L21/02274 H01L21/3 H01L21/31 H01L21/316 H01L21/3160 H01L21/31608 H01L21/7 H01L21/76 H01L21/768 H01L21/7680 H01L21/76801

IPC - классификация

C C2 C23 C23C C23C1 C23C16 C23C16/C23C16/4 C23C16/40 H H0 H01 H01L H01L2 H01L21 H01L21/H01L21/3 H01L21/31 H01L21/316 H01L21/7 H01L21/76 H01L21/768 H01L23 H01L23/H01L23/5 H01L23/52 H01L23/522