Processing liquid mixing apparatus, substrate processing apparatus, processing liquid mixing method, and storage medium

10-10-2012 дата публикации

Номер:

JP5043696B2

Автор: 圭吾佐竹

Принадлежит: Tokyo Electron Ltd

Контакты:

Номер заявки:

Дата заявки:

CPC - классификация

B B0 B01 B01F B01F2 B01F21 B01F210 B01F2101 B01F2101/B01F2101/5 B01F2101/58 B01F3 B01F33 B01F33/B01F33/8 B01F33/84 B01F35 B01F35/B01F35/2 B01F35/22 B01F35/221 B01F35/2211 B01F35/8 B01F35/88 B01F35/883 H H0 H01 H01L H01L2 H01L21 H01L21/H01L21/0 H01L21/00 H01L21/3 H01L21/30 H01L21/302 H01L21/304 Y Y1 Y10 Y10T Y10T1 Y10T13 Y10T137 Y10T137/Y10T137/0 Y10T137/03 Y10T137/032 Y10T137/0329 Y10T137/8 Y10T137/87 Y10T137/876 Y10T137/8766 Y10T137/8768 Y10T137/87684

IPC - классификация

B B0 B01 B01F B01F2 B01F25 B01F25/B01F25/3 B01F25/31 B01F25/314 B01F3 B01F35 B01F35/B01F35/2 B01F35/22 B01F35/221 B01F35/2211 C C3 C30 C30B C30B3 C30B31 C30B31/C30B31/0 C30B31/04

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