SUBSTRATE ALIGNING DEVICE
The present invention refers to processing of substrate for display device relates to search for, even though the position is provided for aligning a substrate fabricating substrates upon adsorption of the device are disclosed. A headset according to various electrical signal when a fixing element is located in a recently [...] information and display for displaying colors have the industrial power generation operation with male (display), and beryllium copper a light, thin, that consuming war potential reconciliation poly (Liquid Crystal Display device: LCD) liquid crystal display device, plasma display device (Plasma Display Panel device: PDP), field emission display device (Field Emission Display device: FED), electroluminescent display device (Electro Luminescence Display device: ELD) is introduced into a variety of display substrate rapidly replacing existing earth etc. (Cathode Ray Tube: CRT). Generally sandwiched between the pair of substrate for display within the vacuum chamber facing the transparent substrate after direct or polarization intrinsic fluorescence of a number is small, in particular cookies these display substrate such switching element arranged basic unit Image presentation matrix comparisons of which individual number plower active matrix type thin film transistor (active matrix type) is excellent in capability of fast motion picture etc. chromatic reproducibility widely used. On the other hand, the substrate surface is a thin film of the substrate for display formed of a predetermined number of positive pore-deposition process, said thin film selected exposing a portion shield case, said exposed thin film are formed by patterning a desired number included in a stand-alone form the repeated several times, in addition cleaning of cutting numerous process accompanied. And, these substrate for display various number unique number per each process of enhancing non-pore-forming seed and off, high processing accuracy is facilitated via a workpiece substrate wherein the delivery ratio number, each number between the mold substrate during this process to improve the accuracy delivery device for aligning a substrate include beadlets has a flat portion. Placed between the first and, in the case of adsorption process in an internal alignment of conventional substrate alignment device makes a failure state is adapted to grip the free since there is poor as well as aligned with the directly in its accuracy of fabricating number point at the door slowly pulled out. The present invention refers to the above-described number of the existing method for door number point and involved is provided which, in the present invention refers to adsorption to the probes can be poor to precisely ALIGN substrates to the substrate under public affairs pin is a device number. Number number into one or more of the present invention and number are pipeline and not, another and number are not mentioned below may be clearly understand one skilled from the substrate are disclosed. In order to achieve said purposes, the present invention refers to the T-square which transfer length digit line with plane of the table and substrate, said substrate table disposed in sticking section and located on the top of the table, said table seated structure and are fixed on said substrate and a plurality of camera photographing the absorption portion, and said table for moving the table alignment, said absorbing unit that ALIGN with alignment horizontally rotating the absorption portion; said absorbing unit coupled to an upper support section while a horizontal rotatable upper suction section; said absorbing unit alignment corresponding to edge of an upper support part of the absorbing unit fixed protrusion piece, said protrusion piece mounted on a rotational axis, said axis of rotation is arranged on the Y axial movement department and, said absorbing unit is arranged on the X axial movement department and, through said upper protrusion piece attraction part which moves relative to the upper X Y axial movement departmentaxial movement department and penetration holes are mobile with bracket a substrate alignment device number under public affairs substrate. Wherein, said plurality of camera unit said table seated in an internal imaging substrate lateral the line mark which will freeze photographing an upper camera and said longitudinal the line mark which will freeze imaging substrate table seated user by a pair of longitudinal photographing can be lower. In addition, by varying the substrate moving said table said table alignment Y axial movement department and, transfer robot transfers axial movement department and moving perpendicular to the direction X, at least one of said table part rotating with a rotating part can be. In addition, adsorbed on the adsorption units said substrate lateral the line mark which will freeze imaging a pair of transverse and the longitudinal direction of the substrate are fixed on said absorbing unit disposed in at least one imaging unit further comprises a pair of longitudinal photographing the line mark which will freeze upper camera can be. Back number Said substrate alignment device of the present invention configured such as one in the embodiment according to correct position even after adsorption onto the substrate prior the absorption while a further alignment of the next adsorption substrate fabricating very accurate state has the effect. The effect of the invention mentioned above are not one number to effects, they can be referred to another effects not unambiguously to one skilled in the range of from the substrate may be understanding are disclosed. Figure 1 shows a substrate alignment device of the present invention also one in the embodiment according to indicating sensors mounted thereon; Figure 2 shows a table of the present invention substrate alignment device and also one in the embodiment according to in, axial movement department X, Y axial movement department, to determine a peripheral region of visually representing a fixing plane; Figure 3 shows a device of the present invention substrate alignment in the embodiment according to one and also in table, indicating activation of the process determine the Chinese eastern part of fixing between the table and side; Figure 5 shows a substrate alignment device of the present invention indicating the relationship between major constituting also one in the embodiment according to block: Figure 5 shows a plane indicating said table part so movable and rotatable also are disclosed. The purpose of the invention a preferred embodiment hereinafter with reference to the appended drawing can be realized specifically described as follows. The in in the embodiment described, the same code is used according to the same configuration are identical in name and description which additional dispensed the on-sensors other. First, products on the attached drawing of the present invention preferred embodiment according to set up the on-sensors other. The attached drawing, Figure 1 shows a perspective view of the present invention indicating and also one in the embodiment according to substrate alignment device, one in the embodiment according to Figure 2 of the present invention substrate alignment device in table portion (172) on, X axial movement department (184), Y axial movement department (188), rotating part (182) to determine plane view indicating which chuck, one in the embodiment according to Figure 3 of the present invention substrate alignment device in table portion (172) on, chuck and table indicating activation of the process determine the Chinese between eastern side are disclosed. As shown, one in the embodiment according to of the present invention substrate alignment device (100) includes a table portion (172), eastern part of Chinese, table alignment and the absorption portion (110) having a predetermined wavelength. Wherein, said table portion (172) substrate is fed plane of the angularly configuration, but not shown, said table portion (172) separate and transferring a substrate in a substrate transfer unit (192:4 also reference) is combined with each other. Said substrate transfer unit (192) is said table portion (172) X axis or Y axis direction in addition said table part to improve such an outer substrate (172) to X axis and Y axis can be process are to be coated. And, said table portion (172) the lower portion of the lower support section (174) while, said table portion (172) on said lower support section (174) Z axes of a Chinese eastern part of said arranged on the upper (185) can be with. Chinese eastern part of said (185) is a ball screw module LM guide module or can be applied. The arrangement permits various form translation module LM guide module and ball and to one skilled in the reduced portion I so that its option details description dispensed the on-sensors other. In addition, said table alignment said table portion (172) of the X translation along X axis axial movement department (184) on, said table portion (172) a translation along the axis Y Y axial movement department (188) on, said table portion (172) to said table portion (172) rotates about the central portion and the rotatable portion (182) consists of at least one of. Wherein, said X axial movement department (184) on, Y axial movement department (188) LM guide module or ball module also can be applied. Said X axial movement department (184) on Y axial movement department (188) and rotating part (182) is said lower support section (174) to be connected to, said lower support section (174) and the table portion (172) X Y shaft and simultaneously the translation and said table part along an axis (172) central portion preferably reference rotational movement to the cells. And, said table portion (172) said predetermined spaced position above the absorption portion (110) is with, said absorbing unit (110) includes a top with an upper support section (120) rotatably coupled to a central reference horizontal lower and upper nozzle configuration. Wherein, said absorbing unit (110) to the substrate plane is made vacuum portion of the lower part, a plurality of adsorption holes (not shown) lower surface throughout the combined with each other. And, said module (not shown) of said adsorption hole is connected to the operation of the soft hole constituting the power supply module is equal to or higher vacuum inside. On the other hand, said camera unit (132a, 132b, 134a, 134b) includes said table portion (172) for seating module to state is provided, as shown, which plurality is applied into upper and lower, said table portion (172) fed into a set or pair of transverse photographing lower camera unit substrate lateral the line mark which will freeze (132a) a pair of lower longitudinal photographing camera photographing the longitudinal direction of the substrate the line mark which will freeze (132b) is received signals. I.e., said lower transverse photographing camera (132a) on lower longitudinal photographing camera (132b) is closed when using a transfer substrate in advance and lateral the line mark which will freeze different sheets substrate corresponding to the alignment mark position that has been, said lower camera unit (132a, 132b) X axis and the Y axis direction is to the substrate using either direction are installed at the correct it becomes and checks is equal to or higher. In addition, in the embodiment according to the substrate alignment device (100) includes said absorbing unit (110) which the upper substrate lateral the line mark which will freeze adsorbed on a pair of transverse photographing camera (134a) and said absorbing unit (110) which the longitudinal direction of the substrate fixed on a pair of longitudinal photographing the line mark which will freeze upper camera unit (134b) and further, said upper camera unit (134a, 134b) X axis and Y axis direction using adsorbed substrate has been adsorbed either direction is equal to grasp. In addition, in the embodiment according to the substrate alignment device (100) further comprises absorption device alignment. Said absorbing unit alignment said absorbing unit (110) is rotated so that the adsorbed on the substrate so as to expose a fine calibration which, to this end said absorbing unit alignment protrusion piece (122) and, mobile bracket (155) and, axial movement department upper X (151) on, upper Y axial movement department (152) having a predetermined wavelength. The SFC cited, such as in Figure 1, said absorbing unit alignment absorbing unit (110) corresponding to the edge of an upper support section (120) fixed on one side of the protruded (122) and, said protrusion piece (122) in the rotating (121) and, said axis of rotation (121) is arranged on the Y axial movement department (152) on, said absorbing unit (110) is arranged on the X axial movement department (151) on, axial movement department upper X (151) Y placed between axial movement department (152) through said protrusion piece (122) and the absorption portion (110) moves relative to the penetration holes are mobile bracket (155) consists of the. Wherein, upper X axial movement department (151) Y placed between axial movement department (152) is LM guide module or ball may be applied module are disclosed. Figure 4 shows a substrate alignment device of the present invention indicating the relationship between major constituting also one in the embodiment according to block are disclosed. In the embodiment according to the substrate alignment device (100) includes a number control unit (195) is further, said number control unit (195) electrically connected to said rotating part (182), a substrate transfer unit (192), eastern part of Chinese, table alignment is combined with each other. The, said each upper camera unit (134a, 134b) and lower camera unit (132a, 132b) in addition said number control unit (195) electrically is made lower and upper nozzle. Said substrate alignment device of the present invention configured such as one in the embodiment according to the substrate using the aligning method are described as follows. First, to vary said substrate transfer unit (192) substrate using said table portion (172) flows into other. After the, said table portion (172) located transverse photographing lower camera unit (132a) lower photographing or a vertical camera (132b) is said table portion (172) monitor substrate upper cross direction position of the oil passages that coincides to a predetermined position of the photographing unit checks the embodiment as follows. The, position of the substrate are formed in the case said X axial movement department locations (184) or Y axial movement department (188) or turns (182) in Figure 5 is like a table portion (172) to one end of the substrate is located a predetermined position corrected for substrate. Said substrate is Chinese eastern part of the harness element (185) through said absorbing unit (110) is moved on the lower, then said absorbing unit (110) is equal to adsorb the absorption substrate through the hole. And again after said upper transverse photographing camera (134a) or a vertical upper photographing camera (134b) is the absorption portion (110) adsorbed on the substrate is set to output the whole photographing again position has been adsorption, adsorption of the adsorption position of the substrate to a pre-determined position case absorbing unit (110) is arranged on the edge of X axial movement department (151) Y placed between axial movement department (152) operated simultaneously to rotate the position of center of gravity of the border not in fine substrate precisely equal to or higher than the calibration. Said substrate is adsorbed via steps for correct position are transferred to the next process. As described above, in the embodiment according to according to one of the present invention substrate alignment device, regardless of the direction of the correct position of roller can be aligning substrate. Further, correct position aligning the semiconductor substrate before adsorption adsorption capacity of a substrate fabricating obtain very fine precisely additional calibration can be performed. The present invention according to preferred embodiment than heat we shall, in the embodiment described the present invention in addition is made without deviating from the allowable prior or inserted into another particular are embodied in the form of one of these may be permitted reduced by having knowledge corresponding fact techniques are disclosed. Thus, in the embodiment described above is but number have to be exemplary rather than believed, description the present invention refers to the above-mentioned category of and changes in the appended claim without limit equivalent range disapproval. 100: substrate alignment device 110: absorbing unit 120: support 132a: transverse length lower camera unit 132b: lower longitudinal length camera 134a: transverse length upper camera unit 134b: upper longitudinal length camera 172: table unit 174: lower support section 182: rotating part 184: X 185 axial movement department: Chinese eastern part of 188:195 axial movement department Y: number control unit An objective of the present invention is to provide a substrate aligning device which can be efficiently controlled. To achieve the objective, the substrate aligning device comprises: a table unit having horizontal and vertical lengths different from each other, wherein a substrate of a rectangular plate shape is transported to be seated thereon; a suction unit positioned on an upper portion of the table unit to suck the substrate placed on the table unit; a plurality of camera units to photograph the substrate seated on the table unit and the substrate sucked on the suction unit; a table aligning unit to move the table unit; a suction unit aligning unit to horizontally rotate the suction unit to align the suction unit; an upper support unit mounted on an upper portion of the suction unit to horizontally rotate a center of the suction unit; a protruding part wherein the suction unit aligning unit is fixed on one side of the upper support unit corresponding to an edge of the suction unit; a rotary shaft installed on the protruding part; an upper Y-axis moving unit installed on the rotary shaft; an upper X-axis moving unit installed on the suction unit; and a moving bracket to be relatively moved with respect to the protruding part and the suction unit by the upper Y-axis moving unit and the upper X-axis moving unit. COPYRIGHT KIPO 2017 With the T-square which digit line length and substrate is fed plane of the table, said table disposed in a substrate sticking section and located on the top of the table, said table seated structure and are fixed on said substrate and a plurality of camera photographing the absorption portion, and said table for moving the table alignment, said absorbing unit that ALIGN with alignment horizontally rotating the absorption portion; said absorbing unit coupled to an upper support section while a horizontal rotatable upper suction section; said absorbing unit alignment corresponding to edge of an upper support part of the absorbing unit fixed protrusion piece, said protrusion piece mounted on a rotational axis, said axis of rotation is arranged on the Y axial movement department and, said absorbing unit is arranged on the X axial movement department and, through said upper protrusion piece attraction part which moves relative to the upper X Y axial movement departmentaxial movement department and penetration holes are mobile with bracket device characterized in that the substrate. According to Claim 1, said plurality of camera unit, said table seated in an internal imaging substrate lateral the line mark which will freeze photographing lower camera unit; and said pair of which the longitudinal direction of the substrate table seated the line mark which will freeze longitudinal photographing lower camera unit; characterized in that a device including the substrate. According to Claim 1, said table alignment said table the substrate is fed moved in the direction of the Y axial movement department and, movable in a vertical direction to the direction that the X axial movement department and transfer substrate, characterized in that said table part used as the substrate rotating device. According to Claim 1, said absorbing unit fixed on a pair of transverse photographing unit substrate lateral the line mark which will freeze upper camera unit; and said pair of longitudinal photographing the line mark which will freeze imaging material has adsorbed the longitudinal direction of the substrate upper camera unit; characterized in further including the substrate device. Back number
