LITHOGRAPHY OPTICS ADJUSTMENT AND MONITORING

28-05-2021 дата публикации

Номер:

SG10202103723UA

Автор: BIBBY JR, ZURITA OMAR, SUBRAMANIAN ABHISHEK, DUFFEY THOMAS PATRICK, TAHBOUB KHALID KHULUSI, ROKITSKI ROSTISLAV, HARAN DONALD JAMES, THORNES JOSHUA JON, BIBBY, JR, ZURITA, Omar, SUBRAMANIAN, Abhishek, Duffey, Thomas Patrick, TAHBOUB, Khalid Khulusi, ROKITSKI, Rostislav, HARAN, Donald James, Thornes, Joshua Jon

Принадлежит: Cymer LLC

Контакты:

Номер заявки: 03-21-1020723U

Дата заявки: 29-06-2017

CPC - классификация

G G0 G01 G01J G01J1 G01J1/G01J1/4 G01J1/42 G01J1/425 G01J1/4257 G01J1/429 G01J2 G01J20 G01J200 G01J2001 G01J2001/G01J2001/4 G01J2001/42 G01J2001/424 G01J2001/4247 G03 G03F G03F7 G03F7/G03F7/2 G03F7/20 G03F7/200 G03F7/2004 G03F7/7 G03F7/70 G03F7/700 G03F7/7002 G03F7/70025 G03F7/701 G03F7/7015 G03F7/705 G03F7/7051 G03F7/70516 G03F7/7059 G03F7/70591 G03F7/708 G03F7/7085 H H0 H01 H01L H01L2 H01L21 H01L21/H01L21/0 H01L21/02 H01L21/027 H01L21/0275

IPC - классификация

G G0 G01 G01J G01J1 G01J1/G01J1/4 G01J1/42 H H0 H01 H01S H01S3 H01S3/H01S3/1 H01S3/10 H01S3/100 H01S3/1009 H01S3/10092 H01S3/2 H01S3/22 H01S3/225