Substrate support and baffle apparatus

16-11-2019 дата публикации

Номер:

TW0201944533A

Автор: 羅門寇克, 翰文陳, 史帝文維哈佛貝可, 琴德爾馬斯, GOUK ROMAN, CHEN HAN-WEN, VERHAVERBEKE STEVEN, DELMAS JEAN, GOUK, ROMAN, CHEN, HAN-WEN, VERHAVERBEKE, STEVEN, DELMAS, JEAN

Принадлежит: 美商應用材料股份有限公司

Контакты:

Номер заявки: 95-25-10810

Дата заявки: 29-09-2016

A substrate support apparatus is provided. The apparatus includes a circular base plate and one or more spacers disposed about a circumference of the base plate. The spacers may extend from a top surface of the base plate and a ring body may be coupled to the spacers. The ring body may be spaced from the base plate to define apertures between the base plate and the ring body. One or more support posts may be coupled to the base plate and extend therefrom. The support posts may be coupled to the base plate at positions radially inward from an inner surface of the ring body.

CPC - классификация

H H0 H01 H01L H01L2 H01L21 H01L21/H01L21/0 H01L21/02 H01L21/020 H01L21/0204 H01L21/02046 H01L21/0205 H01L21/02057 H01L21/021 H01L21/0210 H01L21/02101 H01L21/6 H01L21/67 H01L21/670 H01L21/6703 H01L21/67034 H01L21/6704 H01L21/671 H01L21/6719 H01L21/68 H01L21/683 H01L21/6835 H01L21/687 H01L21/6872 H01L21/68721 H01L21/68728 H01L21/6878 H01L21/68785

IPC - классификация

H H0 H01 H01L H01L2 H01L21 H01L21/H01L21/6 H01L21/68 H01L21/683

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