磁性膜之離子束蝕刻方法及離子束蝕刻裝置

11-03-2016 дата публикации

Номер:

TWI525698B

Автор: Tomohiko Toyosato, Yoshimitsu Kodaira, KODAIRA YOSHIMITSU, TOYOSATO TOMOHIKO, KODAIRA, YOSHIMITSU, TOYOSATO, TOMOHIKO

Принадлежит: Canon Anelva Corp, CANON ANELVA CORP, CANON ANELVA CORPORATION

Контакты:

Номер заявки: 24-39-10117

Дата заявки: 24-10-2012

CPC - классификация

C C2 C23 C23F C23F1 C23F1/C23F1/0 C23F1/08 C23F4 C23F4/C23F4/0 C23F4/00 H H0 H01 H01F H01F1 H01F10 H01F10/H01F10/1 H01F10/16 H01F4 H01F41 H01F41/H01F41/3 H01F41/34 H01J H01J3 H01J37 H01J37/H01J37/3 H01J37/30 H01J37/305 H01J37/3056 H01J37/32 H01J37/327 H01J37/3279 H01J37/32798 H01J37/328 H01J37/3288 H01L H01L4 H01L43 H01L43/H01L43/0 H01L43/08 H01L43/1 H01L43/12 H1 H10 H10N H10N5 H10N50 H10N50/H10N50/0 H10N50/01 H10N50/1 H10N50/10

IPC - классификация

B B4 B41 B41N B41N1 B41N1/B41N1/1 B41N1/18 C C2 C23 C23F C23F1 C23F1/C23F1/0 C23F1/08 H H0 H01 H01F H01F4 H01F41 H01F41/H01F41/3 H01F41/34 H01L H01L2 H01L21 H01L21/H01L21/3 H01L21/30 H01L21/306 H01L21/3065 H01L27 H01L27/H01L27/2 H01L27/24

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