Release chemical protection for integrated complementary metal-oxide-semiconductor (cmos) and micro-electro-mechanical (mems) devices

01-08-2019 дата публикации

Номер:

TWI667188B

Автор: 法利柏亞薩德拉吉, 麥可Ｊ達奈門, DANEMAN MICHAEL J, ASSADERAGHI FARIBORZ, DANEMAN, MICHAEL J., ASSADERAGHI, FARIBORZ

Принадлежит: 美商伊凡聖斯股份有限公司, INVENSENSE INC, INVENSENSE, INC.

Контакты:

Номер заявки: 13-29-10411

Дата заявки: 03-09-2015

CPC - классификация

B B8 B81 B81B B81B2 B81B22 B81B220 B81B2207 B81B2207/B81B2207/0 B81B2207/01 B81B2207/015 B81B7 B81B7/B81B7/0 B81B7/00 B81B7/002 B81B7/0025 B81B7/007 B81C B81C1 B81C1/B81C1/0 B81C1/00 B81C1/002 B81C1/0024 B81C1/00246 B81C1/005 B81C1/0053 B81C1/00531 B81C1/00539 B81C1/008 B81C1/0080 B81C1/00801 B81C2 B81C22 B81C220 B81C2201 B81C2201/B81C2201/0 B81C2201/01 B81C2201/013 B81C2201/0132 B81C2201/0133 B81C2201/05 B81C2201/053 B81C2203 B81C2203/B81C2203/0 B81C2203/07 B81C2203/073 B81C2203/0735

IPC - классификация

B B8 B81 B81B B81B7 B81B7/B81B7/0 B81B7/00 B81B7/007 B81C B81C1 B81C1/B81C1/0 B81C1/00

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