Apparatus, hybrid laminated body, method and materials for temporary substrate support

10-11-2015 дата публикации

Номер:

US9184083B2

Автор: Rajdeep S. Kalgutkar, Wayne S. Mahoney

Принадлежит: 3M Innovative Properties Co

Контакты:

Номер заявки:

Дата заявки:

CPC - классификация

H H0 H01 H01L H01L2 H01L21 H01L21/H01L21/3 H01L21/30 H01L21/304 H01L21/6 H01L21/68 H01L21/683 H01L21/6835 H01L21/6836 H01L22 H01L222 H01L2221 H01L2221/H01L2221/6 H01L2221/68 H01L2221/683 H01L2221/6831 H01L2221/68318 H01L2221/6832 H01L2221/68327 H01L2221/6834 H01L2221/6838 H01L2221/68381 H01L2221/68386 Y Y1 Y10 Y10T Y10T4 Y10T42 Y10T428 Y10T428/Y10T428/3 Y10T428/31 Y10T428/316 Y10T428/3162 Y10T428/31623

IPC - классификация

H H0 H01 H01L H01L2 H01L21 H01L21/H01L21/6 H01L21/68 H01L21/683 H01L21/6831 H01L21/6835 H01L21/7 H01L21/78

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