Ink composition for plasma processing detection, and indicator for plasma processing detection using said ink composition

15-01-2019 дата публикации

Номер:

US10180413B2

Автор: Kazuhiro Uneyama, Keita Hishikawa

Принадлежит: Sakura Color Products Corp

Контакты:

Номер заявки:

Дата заявки:

CPC - классификация

C C0 C01 C01G C01G2 C01G29 C01G29/C01G29/0 C01G29/00 C01G3 C01G31 C01G31/C01G31/0 C01G31/02 C01G39 C01G39/C01G39/0 C01G39/02 C01G4 C01G41 C01G41/C01G41/0 C01G41/02 C09 C09D C09D1 C09D11 C09D11/C09D11/0 C09D11/03 C09D11/037 C09D11/1 C09D11/10 C09D11/5 C09D11/50 C2 C23 C23C C23C2 C23C24 C23C24/C23C24/0 C23C24/08 C23C24/085 C23C28 C23C28/C23C28/3 C23C28/32 C23C28/322 C23C28/34 C23C28/345 G G0 G01 G01N G01N2 G01N20 G01N202 G01N2021 G01N2021/G01N2021/7 G01N2021/75 G01N2021/751 G01N21 G01N21/G01N21/7 G01N21/75 G01N21/78 G01N21/783 G01N3 G01N31 G01N31/G01N31/2 G01N31/22 G01N31/223 G01N31/226 H H0 H01 H01J H01J3 H01J37 H01J37/H01J37/2 H01J37/24 H01J37/244 H01L H01L2 H01L21 H01L21/H01L21/3 H01L21/30 H01L21/306 H01L21/3065 H01L21/32 H01L21/321 H01L21/3213 H01L21/32136 H01L21/6 H01L21/67 H01L21/670 H01L21/6706 H01L21/67069 H01L21/672 H01L21/6724 H01L21/67242 H05 H05H H05H1 H05H1/H05H1/0 H05H1/00

IPC - классификация

A A6 A61 A61L A61L2 A61L2/A61L2/2 A61L2/28 C C0 C09 C09B C09B6 C09B62 C09B62/C09B62/5 C09B62/50 C09B62/503 C09B62/5036 C09D C09D1 C09D11 C09D11/C09D11/5 C09D11/50

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