Methods of graphene growth and related structures

14-05-2019 дата публикации

Номер:

US10290808B2

Автор: Chung-yen Hsieh, Miin-Jang Chen, Samuel C. Pan

Принадлежит: National Taiwan University NTU, Taiwan Semiconductor Manufacturing Co TSMC Ltd

Контакты:

Номер заявки:

Дата заявки:

CPC - классификация

H H0 H01 H01L H01L2 H01L21 H01L21/H01L21/0 H01L21/02 H01L21/024 H01L21/0243 H01L21/025 H01L21/0252 H01L21/02527 H01L21/026 H01L21/0262 H01L21/0266 H01L21/02664 H01L21/0267 H01L21/02672 H01L29 H01L29/H01L29/0 H01L29/06 H01L29/065 H01L29/0657 H01L29/1 H01L29/16 H01L29/160 H01L29/1606 H01L29/6 H01L29/66 H01L29/667 H01L29/6674 H01L29/66742 H01L5 H01L51 H01L51/H01L51/0 H01L51/00 H01L51/001 H01L51/0013 H01L51/004 H01L51/0045 H01L51/0048 H01L51/05 H01L51/054 H01L51/0541 H01L51/055 H01L51/0558 H1 H10 H10K H10K1 H10K10 H10K10/H10K10/4 H10K10/46 H10K10/464 H10K10/48 H10K10/484 H10K7 H10K71 H10K71/H10K71/1 H10K71/18 H10K8 H10K85 H10K85/H10K85/2 H10K85/20 H10K85/22 H10K85/221

IPC - классификация

C C3 C30 C30B C30B2 C30B25 C30B25/C30B25/0 C30B25/04 C30B25/2 C30B25/20 H H0 H01 H01L H01L2 H01L21 H01L21/H01L21/0 H01L21/02 H01L21/026 H01L21/0262

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