Device for atomic layer deposition

28-04-2020 дата публикации

Номер:

US10633737B2

Автор: Keisuke Washio, Tatsuya Matsumoto

Принадлежит: Japan Steel Works Ltd

Контакты:

Номер заявки:

Дата заявки:

CPC - классификация

C C2 C23 C23C C23C1 C23C14 C23C14/C23C14/5 C23C14/56 C23C14/564 C23C16 C23C16/C23C16/0 C23C16/04 C23C16/042 C23C16/3 C23C16/30 C23C16/308 C23C16/4 C23C16/44 C23C16/440 C23C16/4405 C23C16/441 C23C16/4412 C23C16/45 C23C16/455 C23C16/4552 C23C16/45521 C23C16/4553 C23C16/45536 C23C16/4554 C23C16/45544 C23C16/4556 C23C16/45565 C23C16/4557 C23C16/4558 C23C16/458 C23C16/4585 C23C16/5 C23C16/50 C23C16/509 H H0 H01 H01L H01L2 H01L21 H01L21/H01L21/0 H01L21/02 H01L21/021 H01L21/0217 H01L21/02178 H01L21/022 H01L21/0220 H01L21/02208 H01L21/0227 H01L21/02274 H01L21/0228 H01L21/6 H01L21/68 H01L21/687 H01L21/6873 H01L21/68735 H01L21/6874 H01L21/68742

IPC - классификация

C C0 C01 C01B C01B2 C01B21 C01B21/C01B21/0 C01B21/08 C01B21/088 C2 C23 C23C C23C1 C23C16 C23C16/C23C16/3 C23C16/30 C23C16/5 C23C16/50 C23C16/509

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