MICROWAVE POWER DELIVERY SYSTEM FOR PLASMA REACTORS

19-12-2013 дата публикации

Номер:

US20130334964A1

Автор: Christopher John Howard Wort, John Robert Brandon

Принадлежит: Element Six Ltd

Контакты:

Номер заявки:

Дата заявки:

CPC - классификация

C C2 C23 C23C C23C1 C23C16 C23C16/C23C16/2 C23C16/27 C23C16/274 C23C16/5 C23C16/51 C23C16/511 C23C16/54 H H0 H01 H01J H01J2 H01J22 H01J223 H01J2237 H01J2237/H01J2237/3 H01J2237/33 H01J2237/332 H01J2237/3321 H01J3 H01J37 H01J37/H01J37/3 H01J37/32 H01J37/321 H01J37/3219 H01J37/32192 H01J37/322 H01J37/3222 H01J37/32229 H01J37/3225 H01J37/32256 H01J37/3226 H01J37/32266 H01P H01P5 H01P5/H01P5/0 H01P5/04 H01P5/1 H01P5/19 H01P5/2 H01P5/20 H01P5/22 H01P5/222 H05 H05H H05H1 H05H1/H05H1/4 H05H1/46

IPC - классификация

C C2 C23 C23C C23C1 C23C16 C23C16/C23C16/5 C23C16/51 C23C16/511 H H0 H01 H01P H01P5 H01P5/H01P5/0 H01P5/04 H01P5/2 H01P5/20

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