A new or improved distance measuring device
Номер патента: GB543591A
Опубликовано: 04-03-1942
Автор(ы):
Принадлежит: EDWARD ALBERT JAMES TUNNICLIFF, Siemens Schuckert Great Britain Ltd
Опубликовано: 04-03-1942
Автор(ы):
Принадлежит: EDWARD ALBERT JAMES TUNNICLIFF, Siemens Schuckert Great Britain Ltd
Реферат: 543,591. Gauging apparatus. SIEMENSSCHUCKERT (GREAT BRITAIN), Ltd., and TUNNICLIFFE, E. A. J. Aug. 31, 1940, No. 13693. [Class 106 (ii)] [Also in Group XX ] A device for measuring distances comprises an optical system to project two beams of light from a predetermined base line and calibrated means to adjust the angle between the two beams so as to vary the distance 'from the base line to the point of intersection, or some other predetermined relationship, between the two beams. The particular application described is for measuring the distance between the target of an X-ray tube and the film. The device shown in Fig. 2 is secured to the bracket carrying the tube and comprises two spindles 2, 3 carrying reflectors 4, 5 in the path of a beam of light issuing from slits in discs 8, 9 at the ends of a housing 7 containing a lamp. Arms 10, 11 clamped to the spindles 2, 3 carry pins 10<SP>1</SP>, 11<SP>1</SP> engaging a groove 12 in an adjusting member screwed at 14 into a lug 15 on the frame 1. A handle may be secured to the spindle 16 to turn the screw and adjust the angle between the mirrors. A gear 17 meshes with a rack 18 on a slidable plate 19 carrying a scale co-operating with a pointer. The reflectors are adjusted so that the reflected beams intersect on the film holder and the scale is calibrated so that the required distance is read off. In a modification the reflectors are fixed at an angle at the ends of a flexible strip which may be deflected by moving a screw to adjust them.
Projection exposure apparatus for microlithography comprising an optical distance measurement system
Номер патента: US09759550B2. Автор: Toralf Gruner,Joachim Hartjes,Markus Schwab,Alexander Wolf. Владелец: CARL ZEISS SMT GMBH. Дата публикации: 2017-09-12.