Waveguide integration with optical coupling structures on light detection device
Номер патента: EP3997454A1
Опубликовано: 18-05-2022
Автор(ы): Aathavan KARUNAKARAN, Ali Agah, Arnaud Rival, Arvin Emadi, Craig Ciesla, Fabien ABEILLE
Принадлежит: Illumina Inc
Опубликовано: 18-05-2022
Автор(ы): Aathavan KARUNAKARAN, Ali Agah, Arnaud Rival, Arvin Emadi, Craig Ciesla, Fabien ABEILLE
Принадлежит: Illumina Inc
Реферат: Provided herein include various examples of an apparatus, flow cells that include these examples of the apparatus, and methods of making these examples of the apparatus. The apparatus can include a molding layer over a substrate and covering sides of a light detection device. The molding layer comprises a first region and a second region, which, with the active surface of the light detection device, form a contiguous surface. A waveguide integration layer is between the contiguous surface and a waveguide. The waveguide integration layer comprises optical coupling structures over the first and second regions, to optically couple light waves from a light source to the waveguide. The waveguide utilizes the light waves to excite light sensitive materials in nanowells. A nanostructure layer over the waveguide comprises the nanowells. Each nanowell shares a vertical axis with a location on the active surface of the light detection device.
Waveguide integration with optical coupling structures on light detection device
Номер патента: US12111262B2. Автор: Arnaud Rival,Craig Ciesla,Aathavan KARUNAKARAN,Ali Agah,Arvin Emadi,Fabien ABEILLE. Владелец: Illumina Inc. Дата публикации: 2024-10-08.