INTEGRATION OF FAULT RECOGNITION WITH RUN-TO-RUN CONTROL
Номер патента: DE60220063D1
Опубликовано: 21-06-2007
Автор(ы): Alexander T Schwarm, Arulkumar P Shanmugasundram, Terry P Reiss
Принадлежит: Applied Materials Inc
Опубликовано: 21-06-2007
Автор(ы): Alexander T Schwarm, Arulkumar P Shanmugasundram, Terry P Reiss
Принадлежит: Applied Materials Inc
Integration of fault detection with run-to-run control
Номер патента: US20030014145A1. Автор: Arulkumar Shanmugasundram,Terry Reiss,Alexander Schwarm. Владелец: Applied Materials Inc. Дата публикации: 2003-01-16.