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Workpiece holding device including electrostatic chuck and method of manufacturing electrostatic chuck

Номер патента: KR100513569B1
Опубликовано: 22-11-2005
Автор(ы): 아놀드 콜로덴코, 알렉산더 베이저
Принадлежит: 어플라이드 머티어리얼스, 인코포레이티드
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